Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

It should be used as prefilter of compressed air for precision instruments or clean room required for higher clean air. (1) 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note 1) Max. flow capacity at a pressure of 0.7MPa

IR30-OM00013

Rc1/8 [2 ] 0.64 (1) (0.1MPa) (2) IR3000:0.2MPa (3)2 ON-OFF () (4) 4- (C) (C) (A) (A) (C) (A) (C) BLEED SUP OUT SU P N/ M Pa/ ( S) N N m 1 1 M Pa/m ( ) m 2 M Pa M Pa (A) /N (B) / ( ) m 2 ( A ) m 2 5- I R 3 0 0 1 SUP OUT 2 3%F.S. 3 R B(P36203018) G 2 3 RcF N IR3000G43-2-01 G43-P2-N01-X30 IR3010G43-4-01 G43-P4-N01-X30 IR3020G43-10-01 G43-P10-N01-X30 02:1/4 03

IR20-OM00008

JIS B 8370: JIS B 8361: JIS B 9960-1: -(1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. -2- . / 1 1.5 *3) *3) 1 1 () -3- IR21000 (1) 0.2% F.S. (IR2000:F.S.=0.2MPa,IR2010:F.S.=0.4MPa,IR2020:F.S.=0.8MPa) ) F.S. (2) (3) (4) 0.010.8MPa(IR2000 0.005MPa) 1.

IR10-OM00007

JIS B 8370: JIS B 8361: JIS B 9960-1: -(1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. -2- . / 1 1.5 *3) *3) 1 1 () -3- IR1000 (1) 0.2% F.S.

IZ-OMU0031-CN

of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: 2) : 1. 2. 3. 1. 2. 3. 4

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 2 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported

VER2000/4000

1 !2 !3 !4 !5 !6 q w e r t y u i Block packing !

Quick Exhaust Valve Series AQ 1

30 to 60C) 1 4 8 3 Note) AQ1500 and AQ1510 are not available. 3 4 Type Port size Symbol 0 5 Type Applicable model Diaphragm Lip AQ2 to AQ5 AQ1 Only Port size Applicable series M5 01 02 03 04 06 M5 x 0.8 AQ1500 AQ1510/2000 AQ2000/3000 AQ3000 1 8 Standard 1 4 0 1 M5 x 0.8 8 3 1 8 Note) AQ150 only 1 2 AQ5000 3 4 Thread type Metric thread (M5) Rc NPT G Nil N F Caution Be sure to read before handling

Speed Controller: Standard Type In-line Type AS Series

M5 AS 1 000 Body size Lock nut option Nil J (3) 1 2 3 4 5 M3, M5 standard Hexagon lock nut Round lock nut 1 8 1 4 , standard standard standard standard 8 3 Note 3) Only for AS1000 2 1 Option H (1) 2 1 High temperature (5 to 80C) Thread type Low temperature (30 to 60C) L (2) Note 1) AS5000 is available as special. AS1000 is not applicable. Note 2) AS1000, AS2000 are not applicable.

Air Catch Sensor

ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.

lPSMt

INSTALLATION A B c D Installation Transmission oin & Feed-back lever Fig. 1 SINGLE.ACTING ACTUATOR OPERATION ACTUATOR SIGNAL RANGE INSTALLATION STYLE (REFFIG. 1) OUT 1 OUT2 Direct ? 3-15 osi A used ptugged 1i2 Snlit t) 3-15 nsi rl plugged USEQ 1/2 Solil B Reverse _z 3-15 osi USEd plugged 1/2 Solil B 3-15 osi A plugged useo 1/2 Snlit D Fig.

lPSMt

INSTALLATION A B c D Installation Transmission oin & Feed-back lever Fig. 1 SINGLE.ACTING ACTUATOR OPERATION ACTUATOR SIGNAL RANGE INSTALLATION STYLE (REFFIG. 1) OUT 1 OUT2 Direct ? 3-15 osi A used ptugged 1i2 Snlit t) 3-15 nsi rl plugged USEQ 1/2 Solil B Reverse _z 3-15 osi USEd plugged 1/2 Solil B 3-15 osi A plugged useo 1/2 Snlit D Fig.

Precision Clean Regulator Series SRP

Precision Clean Regulator Series SRP How to Order SRP 1 R 1 0 1 01 Set pressure Gauge port orientation Nil: Standard 0.005 to 0.2MPa 0 OUT IN 1 0.01 to 0.4MPa Knob Gauge port R: R specifications Gauge port JIS symbol Port size Piping port size M5 x 0.8 Rc 1/8 Symbol M5 01 OUT IN Gauge port positions are indicated with the knob on the top side.

NVKF

(Bottom Ported) lType 40 Manifold NVV3KF3-40-Stations-0 1 T inch (mm) L: Dimensions '-{ 1 2 3 5 6 7 I I i.44 089) 1 0 1 1 1 5 1 7 1 8 19 20 1 . 4 6 {37) 2.20 2.95 (56) (75) (94) 4.45 5.2 ( 1 1 3 ) 0 3 2 ) 5.94 ( 1 5 1 1 6.7 ( 1 7 0 ) 8.19 8.94 l2o8) (227J 9.69 {2461 1 0 . 4 3 1 1 . 1 a (265) (284) 1 1 . 9 3 (303) 12.68 \322) 13.43 (341) '14.17 14.92 (360) (379) 15.67 (398) 1 . 0 6 l27l 1.81

Speed Controller with One-touch Fittings

Made to Order Body size 100 200 205 300 400 M3, M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard Grease-free (Sealant: Fluoro coated) + Restrictor (Without Check Valve) -X21 Metric size 02 23 04 06 08 10 12 Inch size 01 03 07 09 11 13 Lock nut option 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2 3.2 Ex.)

Quick Exhaust Valve Series AQ

30 to 60C) 1 4 8 3 Note) AQ1500 and AQ1510 are not available. 3 4 Type Port size Symbol 0 5 Type Applicable model Diaphragm Lip AQ2 to AQ5 AQ1 Only Port size Applicable series M5 01 02 03 04 06 M5 x 0.8 AQ1500 AQ1510/2000 AQ2000/3000 AQ3000 1 8 Standard 1 4 0 1 M5 x 0.8 8 3 1 8 Note) AQ150 only 1 2 AQ5000 3 4 Thread type Metric thread (M5) Rc NPT G Nil N F Caution Be sure to read before handling

3 Way Direct Acting NVKF 300 Series

(Bottom Ported) lType 40 Manifold NVV3KF3-40-Stations-0 1 T inch (mm) L: Dimensions '-{ 1 2 3 5 6 7 I I i.44 089) 1 0 1 1 1 5 1 7 1 8 19 20 1 . 4 6 {37) 2.20 2.95 (56) (75) (94) 4.45 5.2 ( 1 1 3 ) 0 3 2 ) 5.94 ( 1 5 1 1 6.7 ( 1 7 0 ) 8.19 8.94 l2o8) (227J 9.69 {2461 1 0 . 4 3 1 1 . 1 a (265) (284) 1 1 . 9 3 (303) 12.68 \322) 13.43 (341) '14.17 14.92 (360) (379) 15.67 (398) 1 . 0 6 l27l 1.81

Speed Controller: Standard Type Series AS In-line Type 1

Note 2) AS1000, AS2000 are not applicable. 8 3 2 1 Bore size 2 1 Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 AS1000 AS1000 AS2000 AS2000/3000/4000/5000 AS3000/4000/5000 AS4000/5000 Thread type Nil Metric thread (M3, M5) Rc NPT G N F Caution Be sure to read before handling.

AU

JIS Symbol VY1 G 2 G 1 R 00 02 AU PPA Construction Lube unit AL Body Diaphragm assembly Valve assembly Sight dome Plug assembly of supplying oil Body size (Standard) Gasket for valve guide Thread type Nil N F 1 8 Damper 1 2 3 Rc NPT G 4 1 O-ring 3 8 Auto-drain specifications Description Component Parts AU100 type Body Material Zinc die-casted, Aluminum die-casted No.

AU

JIS Symbol VY1 G 2 G 1 R 00 02 AU PPA Construction Lube unit AL Body Diaphragm assembly Valve assembly Sight dome Plug assembly of supplying oil Body size (Standard) Gasket for valve guide Thread type Nil N F 1 8 Damper 1 2 3 Rc NPT G 4 1 O-ring 3 8 Auto-drain specifications Description Component Parts AU100 type Body Material Zinc die-casted, Aluminum die-casted No.