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Color Refer to the burst pressure characteristics curve. 20 to 60C (-4 to 140F) Polyurethane Black 1in = 25.4mm Polyurethane Flat Tubing Series10-TFU Specifications Model 10-TFU 10-TFU 10-TCU 10-TFU 10-TFU 10-TCU 0425B-2 0425B-3 0604B-2 0604B-3 0805B-2 0805B-3 3 cores 2 cores 3 cores 2 cores 3 cores Number of cores Tubing O.D. mm Tubing I.D. mm Fluid 2 cores 4 6 4 8 5 2.5 Air Maximum operating

Color Refer to the burst pressure characteristics curve. 20 to 60C (-4 to 140F) Polyurethane Black 1in = 25.4mm Polyurethane Flat Tubing Series10-TFU Specifications Model 10-TFU 10-TFU 10-TCU 10-TFU 10-TFU 10-TCU 0425B-2 0425B-3 0604B-2 0604B-3 0805B-2 0805B-3 3 cores 2 cores 3 cores 2 cores 3 cores Number of cores Tubing O.D. mm Tubing I.D. mm Fluid 2 cores 4 6 4 8 5 2.5 Air Maximum operating

Remarks Bracket A ZS-50-A With 2 mounting screws M4 x 6 Bracket B ZS-50-B With 2 mounting screws M4 x 6 ZS-31-B Straight: 5 m Lead wire with M12 connector ZS-31-C Right angle: 5 m -8No.PS-OMW0002-C Summary of Product parts Names of individual parts Body Power supply/ output connectors: Connects the power supply/ output lead wire. Operation/Display: Refer to the table below.

port 25 10 C 3 x 3 depth 6 +0.02 0 53 (A, B, C common view) MHZ 34 6 x M3 x 0.5 thread depth 6 (A, B, C common view) 18.5 12h9 0 0.043 MHF 1.5 MHL 5 2 x 4.2 14.5 3.1 4.7 MHR MHR 5.5 43.5 (47) 3 MHK 22.5 MHS MHC 2 5 6 2 3.5e8 0.020 0.038 12 MHT Open: 13.5 Closed: 9.5 Auto switch mounting groove MHY MHW -X 8 0 0.05 MRHQ MA 15 D3 x M3 x 0.5 thread depth 6 (Thread for mounting attachment) 537

Bottom Side Top Direction 1/8 1/8 1/8 P, R port M5 x 0.8, 1/8, C4 (One-touch fitting for 4), , C6 (One-touch fitting for 6) M5 x 0.8 1/8 Port size M5 x 0.8 A port M5 x 0.8 X port Note) M5 x 0.8 M5 x 0.8 Note) Only for external pilot Flow Characteristics Flow characteristics Port size 1 2 (P A) 2 3 (A R) Manifold C [dm3/(sbar)] 1(P), 3(R) port 2(A) port b Cv C [dm3/(sbar)] b Cv SYJ52

Dimensions [mm] Model L1 L2 L3 A B C D E F G J LEPS6-25 127.1 138.6 11.5 16.5 21 24.5 28 16.5 28 36 76.4 LEPS6-50 156.6 169.6 13 22 45 30 52 22 52 60 107.4 393 LEPS Series Step Motor (Servo/24 VDC) Dimensions LEPS10 D E C B 4 10 22 ( ) +0.025 0 ( ) +0.025 0 3H9 depth 3 3H9 depth 3 2 x M5 x 0.8 thread depth 10 4 x M4 x 0.7 thread depth 6 28 24 16 K 25 14 Table operating range Note 1) [1] 1

Z type 24 VDC: 7% to +10% 12 VDC: 4% to +10% T type 24 VDC: 5% to +10% 12 VDC: 6% to +10% PS port 2(B) Vacuum pad port Flow Characteristics Response Time Flow Characteristics (When restrictor is fully open) 2(B)3/5(E) 1(P)2(B) b 0.19 Cv 0.05 C [dm3/(sbar)] 0.40 b 0.18 Cv 0.10 C [dm3/(sbar)] 0.24 Valve model Fluid passage 2(B) Port size M5 Valve model Response time ms (at 0.5 MPa) SJ3A6-ll-l

Refer to the page 58 for details. 4.5 5 5 Circuit Diagram Power supply terminal block PCW-EC16Z00 PCW-EC16Z01 20 18 16 14 12 10 8 6 4 2 Input/output connector (CS0) 0 1 2 3 4 5 6 7 19 17 15 13 11 9 7 5 3 1 Green Red F E D C B A 9 8 9 8 7 6 5 4 3 2 1 0 F E D C B A 4 3 2 1 CN1 4 3 2 1 CN2 4 3 2 1 CN3 4 3 2 1 CN4 4 3 2 1 CN5 4 3 2 1 CN6 4 3 2 1 CN7 4 3 2 1 CN8 4 3 2 1 CN9 4 3 2 1 CNA 4 3 2 1

(c) COM A byte (d+3) byte (b+2) Word(c+1) COM B byte (d+5) byte (b+4) Word(c+2) COM C byte (d+7) byte (b+6) Word(c+3) COM D : : (c, d=0 to) NOTE Read carefully the user manual of PLC which is used as a master.

(Aluminum: 6.5 g, Stainless steel: 17.6 g) ZNC30 to 80: The weight value is for the basic type without a plug. *6 For pressure sensor details, refer to the PSE540 series in the Web Catalog and the Operation Manual. 6 ZNC Series Lifting Force ZNC20m ZNC30m ZNC40m 12 16 6 14 10 5 12 8 Lifting force [N] Lifting force [N] Lifting force [N] 4 10 6 8 3 6 4 2 4 2 1 2 0 0 0 0 0.6 0.5 0.4 0.3 0.2

LEC-CGD LEC-CGD N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 LEC CN4 LEC CN4 No. No.

of the ventilation grille . 5-2 5.2.2 Auto drain maintenance . 5-2 Chapter 6 Troubleshooting . 6-1 6.1 TROUBLESHOOTING . 6-1 6.2 RESET THE THERMAL RELAY AND HIGH PRESSURE SWITCH. 6-4 IDF60/70/80/90 Series IDX-OM-V022 Contents Chapter 7 Documents . 7-1 7.1 SPECIFICATIONS . 7-1 7.2 REFRIGERANT AND GWP VALUE . 7-2 7.3 DIMENSIONS . 7-3 7.4 ELECTRIC CIRCUIT . 7-4 7.5 AIR/ REFRIGERANT CIRCUIT

3, 4, 5) 20 + 35 D-M9V 5 20 35 CHS (n = 2, 4, 6) Note 3) (n 2) 2 25 + 35 (n 2) (n = 2, 3, 4, 5) 15 + 35 D-A9V 5 15 25 CH2 (n = 2, 4, 6) Note 3) (n 2) 2 D-M9WV D-M9AV 35 + 35 (n 2) (n = 2, 3, 4, 5) 20 + 35 10 20 35 CHA (n = 2, 4, 6) Note 3) (n = 2, 4, 6) Note 3) 15 + 45 (n 2) 2 D-H7/H7W D-H7NF/H7BA 60 + 45 (n 2) (n = 2, 3, 4, 5) 10 15 60 Related Products (n = 2, 4, 6) Note 3) 15 + 45

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

E R I E S P S 1 0 0 0 / 1 1 0 0 L PS 00 L Grommet and Lead Wire 3m W I R I N G M E T H O D P I P I N G M E T H O D RO6 6 Reducer R07 1/4 Reducer S W I T C H S P E C I F I C AT I O N 10 2-Wire System (for Positive Pressure) 11 2-Wire System (for Vacuum and Residual Pressure) D I M E N S I O N S PS1000/1100 S W I T C H O U T P U T F U N C T I O N Courtesy of Steven Engineering, Inc. !

(Coil temperature: 68F (20nC), at rated voltage) 2 Series VF1000/3000/5000 Flow-rate Characteristics/Weight Port size Flow-rate characteristics Note 1) Weight (g) Note 2) 1 l 4/2 (P l A/B) 4/2 l5/3 (A/B l EA/EB) Type of actuation Valve model 1, 4, 2 5, 3 C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv Grommet DIN terminal (P, A, B) (EA, EB) Single 0.49 0.40 0.13 0.52 0.35 0.13 140 176 M5 x 0.8

Blanking cap 6 1/2, 3/4, 1, 1 1/4, 1 1/2, 2, 2 1/2, 3, 3 1/2, 4 Suction Filter with Case FH99 series Micromesh 74, 105, 149 Negative pressure Differential pressure indicator Differential pressure indication switch Air breezer Cap 10 1/2, 3/4, 1, 1 1/4, 1 1/2, 2, 2 1/2, 3 Suction Guard FHG series Micromesh 74, 105, 149 Negative pressure Max. 3.5, 7, 14, 21 MPa Paper 5, 10, 20 (Micromesh)

[C] 5 10 15 20 25 30 35 Circulating fluid temperature [C] HRS090-W-20/40 (50 Hz) HRS090-W-20/40 (60 Hz) 14 12 12 10 Facility water temperature 32C Facility water temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 8 8 6 Facility water temperature 40C Facility water temperature 40C 6 4 4 2 2 0 0 5 10 15 20 25 30 35 Circulating fluid temperature [C] 5 10 15 20 25 30 35 Circulating