IDX-OM-Z004

. i-8 1 1.1 . 1-1 1.2 . 1-2 1.2.1 C . 1-2 1.2.2 G . 1-2 1.2.3 K . 1-2 1.2.4 P . 1-2 1.2.5 R . 1-2 1.2.6 V . 1-2 1.2.7 . 1-2 1.2.7 . 1-2 1.3. . 1-3 2.1 . 2-1 2.2 . 2-2 2.2.1 . 2-2 2.2.2 . 2-3 2.2.3 . 2-4 2.2.4 . 2-4 2.2.5 . 2-5 2.2.6 . 2-6 1 IDX-OM-Z004 2.2.7 . 2-7 2.3 . 2-9 2.3.1 . 2-9 2.4 . 2-9 3 / 3.1 . 3-1 3.2 . 3-1 3.3 . 3-2 3.4 . 3-2 3.5 . 3-2 3.6 . 3-3

ASP-X352

Body size Metric size Inch size 3 4 5 6 1/8 1/4 3/8 1/2 07 09 11 13 06 08 10 12 6mm 8mm 10mm 12mm 1/4 5/16 3/8 1/2 Thread size Universal type 01 02 03 04 1/8 1/4 3/8 1/2 With One-touch fitting Uni-fit thread form Dimensions Models TUBE O.D. d L3 Applicable tubing O.D.

Auto Drain Valve Longer life & Higher resistance to foreign matter

Description Material Color 1 Body Aluminum die-cast White 5 Diaphragm FKM 6 Main valve FKM Port size 3/8 and 1/2 Port size 3/8, 1/2 with V option 26 Bleed valve Replacement Parts No. Description Material Part no. 2 Element Nylon AD402P-040S 3 Bowl O-ring NBR KA00463 4 Bowl assembly1 See below. See below. Bowl Assembly Part Nos. Bowl material Bowl assembly part nos.

Vacuum Regulator Series IRV

50 2-Rc 1/8 Vacuum gauge port IRV3000 IRV3000 54 70 50 66 SMC P K U C S O H L 10.5 x 8.5 2-Rc 1/8 Vacuum gauge port Approx. 130 G 43 74 SET VAC SET Pad side Vacuum pump side 22 Approx. 68 Rc 1/2 2-Rc 1/4, 3/8, 1/2 Connection port 66 2

Drain Separator for Vacuum Series AMJ 1

3/8 F Flow: Right Left R G 04 1/2 N If ordering two options or more, indicate symbols numerically and alphabetically.

Exhaust Cleaner for Clean Rooms AMP Series

2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

V100

List part numbers of the installed valve and option in required station location separately under manifold part number. 4-2-7 8 Series V100 Common SUP/Common EXH Type S41 How to Order Applicable solenoid valve Note) VV100 S41 05 M5 V114V114AV124V124AStations 2 port size 02 M5 M5 x 0.8 2 stations 2 Applicable blank plate assembly V100-77-1A 1 20 20 stations 3 2 1 port M5 x 0.8 3 port M5 x

IR30-OM00013

PRESS. 1. 0 M Pa O U TPU T PRESS. 0. 010. 2 M Pa M AD E I N J APAN So G No. o S o1 T P2 U Q3 V R4 W Z12 6- (1) Nm 1/4 3/8 1/2 12~14 22~24 28~30 (2) (3) (4) 7- (1) (2) (3) (4) (1) (2) (3) (1) (2) O 3 (3) 3 (4) P.5 0 (5) 0 8- (1) (2) (3) 21Nm (4) ON-OFF 5 79Nm (6) (7) (8) 0.5MPa 0.1MPa (9) AN Rc1/2 (1) (2) 9- (1) (2) 1.5~2 (1) 1 1.5 (2) (3) a b

Air Suction Filter

type allows element replacement ZFB30 8, 10, 3/8" 75 Easily replaced filter element ZFB40 1/2" 100 ZFC 10 4, 5/32" ZFA ZFA IN/OUT straight piping ZFC5 In-line type 20 Easy installation and removal with One-touch fittings ZFB ZFB 6, 1/4" 30 ZFC ZFC 5 P.281 Light and compact molded resin parts 8, 5/16" 70 ZFC7 10, 3/8" 80 Easily replaced filter element 12 100 Note) Flow rate when initial

VFN2120N-5B-02N-X36 NAMUR Solenoid Valve Rotary Actuator Configuration

VFN Series VFN2120N-5B-02N-X36 NAMUR Solenoid Valve Rotary Actuator Configuration How to Order 3-way solenoid valve configuration (for Single acting actuator) VFN2120N 5B 02 N X36A Left side port operation Right side port operation C-TYPE A-TYPE NAMUR interface 3 port/5 port A 3 port Port #4 on Coil side B 5 port Port #2 on Coil side C 3 port Port #2 on Coil side D 5 port Port #4 on Coil

BP1000

Other than above: 2%F.S.

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

M plug connector, Without lead wire and light and surge voltage suppressor U side D side Port size (Body ported only) Station1 2 3 4 5 VQD1151-5L M5 thread M5 VQD1000-10A-5 2B 4A 3R 1P 2B 4A VV4QD15-05M5 1.13-8 Series VQD1000 Manifold Option Blank Plate Assembly/Body Ported VVQD1000-10A-2 SY Blank plate assembly includes 2 screws and 1 gasket.

Peltier-type Chiller Thermo-con/ Compact Type

JFA connector J4000 series SC02B-J42SK-GHXR 2 24 VDC (1000) 1 RS-485 BUS + 2 RS-232C RD 1 2 3 4 5 3 RS-232C SD 4 RUN/STOP signal input Alarm, RUN/STOP , Communication connector 5 SG 6 Output cutoff alarm (open when alarm occurs) 9 8 7 6 7 Common for output cutoff alarm D-sub 9 pin (socket type) Holding screw: M2.6 8 RUN/STOP signal input 9 RS-485 BUS 8 HEF Series Operation Display Panel

AMC

ANR: 20C atmospheric pressure, relative humidity 65% 200 300 1,000 1 4 3 8 1 4 3 4 1 2 , , 0.12 AMC-EL2 BE20 0.2 AMC-EL3 BE30 0.5 AMC-EL5 BE50 VEX How to Order AN 5 1 0 AMC 06 AMC Thread Body size Suffix Port size 1 4 std. 3 8 std. 3 4 1 std. std. 1 2 2 std. 2 std. 3 5 6 8 9 B With bracket 1 2 14 20 1 1 02 Female Female Male Female Female Male 1 Male thread 10 1 4 Male Male Male D Drain piping

Air Cylinder NCM Series Stainless Steel Cylinders

Action/Double acting. 250 PSr (17.5 8 PSI 40140.F 2 -20 inch/sec (50 Front nose. Double end. Rear Pivot HOWTO ORDER Stock Stroke Li3t ""uE@@@" Ex.) Cushion standard on 76 and l/a bore onlv {must include C if desired on these bore sizes). ultENstoNs r":-t _1-1,--lY+/ 075 {!a) .250 \-24 0.50 .624 .621 0.25 0.86 0.38 it-l6 .251 .zfi 0.75 0.25 o.34 It.oo o.75 o.62 o.12 # 1 8 o.75 1-?

Exhaust Cleaner Series AMC

Exhaust Cleaner Series AMC How to Order Ensures clean plant air and reduces noise pollution; Over 35 dB (A) noise reduction Over 99.9% oil mist removal 5 1 0 AMC 06 Thread Body size Suffix std. 1 4 std. 3 8 std. 3 4 1 std. 1 std. 1 2 2 std. 2 3 5 6 8 9 B With bracket 1 Male thread D Drain piping (Except AMC220) (1) (2) 2 Female thread Note 1) Female thread: Available only AMC220, 320, 520

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators Lead wire length 300 mm 1(P), 3(R) port 4-Rc1/8 Indicator light 7 2-4.5 (Mounting hole) 57 5.3 5.3 50.5 52 0.6 P 1 R 3 4 4 4 4 4 R 3 P 1 30 17 6.5 15 2 2 2 2 2 8 0.5 0.5 P=11 10 M5: M5 thread 2n-M5 4(A), 2(B) port 4 L2 35 L1 38 42 M plug connector (M) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches

VEX-OMV0001

NPT 23 (R,NPT) Nm 1/8 35 1/4 812 3/8 1520 1/2 2025 3/4 2830 1 3638 11/4 4042 11/2 4850 2 4850 () 1 5 VEX-OMV0001 VEX1 Series / () 5 () 30 ( ) 6 VEX-OMV0001 VEX1 Series (904 ) 3.57 () (AF )(AMAFM ) ( ) 22 3 JIS C 3306 0.5mm () () IR2000 A VEX1 B33 VK300-82-1 ITV VY AC100V 100V VK300-82-2-01 AC110V 110V VK300-82-2-03 AC200V 200V VK300-82-2-02 AC220V 220V VK300-82-2-04 ) AC240V 240V

-- NCM seies

Double acting only 250 PSt {r 7.5 8 PSI -22158.F (-30 2-20 inch/sec Double None FroDt nr HOW TO ORDER Stod( Stroke Ust rcu@f Ex.) NCMB 075-0400-XB7 ---E-Low tgmperatule Alto-switch capable not avaitable.

ASD

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 Flow