Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 30 40 50 60 25 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N F Thread type e Rc NPT G + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 3) H Note 2) a Without mounting option With bracket

AMD

AMD150 AMD250 AMD350 AMD450 AMD550 AMD650 AMD850 Model Note) 200 500 1000 2000 3500 6000 12000 Rated flow (l /min (ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

How to Order Valves How to Order Manifold Assemblies Example 4 0 5 SY 3 1 FU Single solenoid 2 position single Supply/Exhaust block (U side mounting) SY3140-5FU (3 sets) Double solenoid 5 FU Double/3 position 5 SY 3 2 4 SY3245-5FU (1 set) Series 3 SY3000 5 SY5000 Type of actuation 2 2 position double 3 3 position closed center 24VDC +COM + 1 2 3 Stations D side U side 4 3 position exhaust

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Model AMG150 AMG250 AMG350 AMG450 AMG550 AMG650 AMG850 Model Note) Rated flow (l /min (ANR)) 300 750 1500 2200 3500 6000 12000 Port size (Nominal size B) , , , , , , , , , , , 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.

VF1000-OMP0001

B(CYL1) A B EA EB R1(EXH2) R2(EXH1) R1 R2 (B)2 4(A) (B)2 4(A) (R2)3 1 5(R1) (P) (R2)3 1 5(R1) (P) 3(R2) 1(P) 5(R1) JIS () Z (B)2 (A)4 1:P 2:B 3:R2 4:A 5:R1 1:P(SUP) 2:B(CYL.1) 3:R2(EXH.1) 4:A(CYL.2) 5:R1(EXH.2) 1:P 4:A 2:B 5:R1 3:R2 EZTZDZLZMZ DC24V ) 8 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 (VF1000/3000 (VF1000/3000 (VF1000/3000 (VF1000/3000

AME

size 01 B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.

AMF

AMF250 AMF350 AMF450 AMF550 AMF650 AMF850 AMF150 Model Note) 500 1000 2000 3500 6000 12000 200 Rated flow (l/min (ANR)) Port size (Nominal size B) , , , , , , , , , 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Weight (kg) Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.

AMF

AMF150 AMF250 AMF350 AMF450 AMF550 AMF650 AMF850 Rated flow (l/min (ANR))(1) 200 500 1000 2000 3500 6000 12000 Port size (Nominal size B) 1/8, 1/4, 3/8 1/4, 3/8, 1/2 3/8, 1/2, 3/4 1/2, 3/4, 1 1, 11/2 11/2, 2 3/4, 1 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note 1) Max. flow capacity at a pressure of 0.7MPa.

Series 10-, 21- AF-A Air Filter

1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1070 A

Auto Drain Valve Longer life & Higher resistance to foreign matter

Example) AD402-N04D-2VZ-A Thread type Semi-standard specifications Symbol Type Nil Rc F G N NPT Symbol Description 3 Bowl Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl Semi-standard Valve Nil None4 Port size V With bleed valve Symbol Port size 02 1/4 03 3/8 04 1/2 Nil Name plate and caution plate for bowl in SI units Pressure unit Z5 Name plate and caution plate for bowl in imperial units

Peltier-type Chiller Thermo-con/ Compact Type

JFA connector J4000 series SC02B-J42SK-GHXR 2 24 VDC (1000) 1 RS-485 BUS + 2 RS-232C RD 1 2 3 4 5 3 RS-232C SD 4 RUN/STOP signal input Alarm, RUN/STOP , Communication connector 5 SG 6 Output cutoff alarm (open when alarm occurs) 9 8 7 6 7 Common for output cutoff alarm D-sub 9 pin (socket type) Holding screw: M2.6 8 RUN/STOP signal input 9 RS-485 BUS 8 HEF Series Operation Display Panel

AMG

Model AMG250 AMG350 AMG450 AMG550 AMG650 AMG850 AMG150 (1) Flow rate (l /min (ANR)) 750 1500 2200 3500 6000 12000 300 Port size (Nominal size B) 1/8, 1/4, 3/8 1/4, 3/8, 1/2 3/8, 1/2, 3/4 1/2, 3/4, 1 3/4, 1 1, 11/2 11/2, 2 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note 1) Max. flow is at 0.7MPa. Max. flow depends on operating pressure.

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

Series P port/Thread VV2Q22-05 1 set Manifold part No. 2 3 VQ20 VQ30 Rc3/8 NPT3/8 NPTF3/8 G3/8 VQ21M1-5G-C6 00N 00T 00F 4 sets Valve part No. (Stations 1 to 4) Stations VQ21M1-5G-C8 1 set Valve part No.

Process Pump <Fluororesin Type> Series PA3000

Port size Operation type Connection size at main fluid side Connection size at air side 03 F03* N03* T03* P11 P11F* Rc 3/8 G 3/8 NPT 3/8 NPTF 3/8 3/8" inlet/outlet tube 3/8" inlet/outlet tube 3/8" inlet/outlet tube 3/8" inlet/outlet tube 1/2" inlet/outlet tube 1/2" inlet/outlet tube 1/2" inlet/outlet tube 1/2" inlet/outlet tube Rc 1/4 thread G 1/4 thread NPT 1/4 thread NPTF 1/4 thread Rc

Drain Separator for Vacuum Series AMJ 1

AMJ 30 0003 2R ZR ZM Body size Pressure gauge position 30 3/8 None Bracket Nil ZH 40 1/2 B Option 50 3/4 ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Drain cock Nil Metal bowl 2 ZL Thread type Port size Nylon bowl 6 Drain guide (Rc 1/4) 02 1/4 Nil J Rc ZY 03

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

B C D H SNKJ-016B SNLJ-016B SN-020B SN-032B NTJ-010A NTJ-015A NT-02 NT-03 19.6 M12 x 1 4 8.1 M4 x 0.7 3.2 6, 10 17 6, 10 7 21.9 M14 x 1 5 9.2 M5 x 0.8 4 16 19 16 8 30 M20 x 1.5 8 15 M8 x 1.25 5 20 26 20 13 37 M26 x 1.5 8 19.6 M10 x 1.25 6 25 32 25 17 T-bracket 4-TC TH 7 +0.2 0 TU -0.1 -0.3 TN TK TX TV 12 TD H10 TT TY TW Part no.

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

(L): 10-V1 4(A)-L-M5 1 2 M plug connector (M): 10-V1 4(A)-M-M5 1 2 13.1 (Light/surge voltage suppressor) (Light/surge voltage suppressor) + 3 Approx. 300 3 (Lead wire length) 39.6[46.6] Approx. 300 <43.5> (Lead wire length) + 40.7[42.9] <42.9> 30.9[33.1] <33.1> 25.9 2 2 Other dimensions are same as grommet style.

AME

Model AME250 AME350 AME450 AME550 AME650 AME850 AME150 12000 (1) 12000 Rated flow (l/min (ANR)) 500 1000 2000 3500 6000 200 Port size (Nominal size B) 1 8 1 4 3 8 , , , , , , , , , , 1 4 3 8 1 2 3 8 1 2 3 4 1 2 3 4 1 1 3 4 1 1, 1 2 1 2 1 2 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note 1) Max. flow capacity at a pressure of 0.7MPa. It varies depending on operating pressure.

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

1 1/8 1/4 1/4 3/8 1/4 3/8 1/2 3/4 IN, OUT Piping port 1/8 1/2 1/2 1/4 3/8 EXH 4.17 IN OUT 0.54 0.76 1.46 2.06 2.98 4.44 6.78 0.87 1.68 Cv OUT EXH 0.60 0.87 1.75 2.08 2.12 2.85 2.93 2.12 0.76 1.57 Air Fluid 1.5MPa Proof pressure 0.1 to 1.0MPa Operating pressure range JIS Symbol -5 to 60C (No freezing) Ambient and fluid temperature (A) 2 90 Handle switching angle HandleNote): Red, Body: Platinium

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi