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Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.

Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.

Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.

Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.

Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.

This SI unit has IP65 protection rating. 29 Supported Protocols DeviceNetTM 11 to 25 VDC (without sensors) Supply Voltage 20 to 25 VDC (with sensors) Current Requirement 0.5A maximum Serial Unit Inputs 32 points Click here for more information Outputs 16 points Dimensions 167W x 57H x 71D Input voltage 10 to 26.4 VDC Solenoid Outputs Power handling 2.8W maximum Input voltage 20 to 25 VDC

Filter case Pin Slot Housing Filter element (ZX1-FE) Filter gasket Gasket groove Connector Socket Lead wire Hook 16-7-3 4 Series ZSP1 Dimensions Grommet type: ZSP10X Adjusting needle Pressure sensor Vacuum supply port ADJ 20 Adsorption nozzle port 08 7 48.3 Lead wire length 600 (3000) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650)

Exploded View of Manifold/Replacement Parts 20 7.1. Exploded View of Manifold 20 7.2. Component Parts for Manifold 20 7.3. Replacement Parts 21 7.4. Manifold Option 22 7.5. How to Increase Manifold Stations 23 8. Maintenance 24 8.1. Maintenance 24 8.2. Replacement Procedure 25 9. Specifications 27 10. Pneumatic Circuit 29 11. Exhaust/Flow Rate Characteristics 30 11.1.

MS Burst pressure (MPa) 20 to +60C (No freezing) Polyurethane Burst pressure Black T 15 10 10 20 VMG Maximum operating pressure How to Order Operating temperature (C) Precautions 2 TFU0425 B Be sure to read before handling.

(Rated voltage 125 V, Plug JIS C 8303, Inlet IEC 60320-C13) *1 Measured with a high pressure probe of 1000 M and 5 pF *2 Measurement value based on a charged plate (Dimensions: 150 mm x 150 mm, Capacitance: 20 pF) as defined in the U.S.

10.2 8 10 17.8 11 5.5 2-3.3 Mounting hole Connector type: ZSP10X C Adjusting needle ADJ Pressure sensor Vacuum supply port 20 08 Adsorption nozzle port 7 48.3 Lead wire length 600 (3000) Adsorption nozzle port 0X: M5 x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 59.5 50 PV 6.5 10.2 8 5.5 17.8 11 10 2-3.3 Mounting hole 16-7-4

25 30 0 5 10 15 20 25 30 Time of water flow (min) Measuring time (min) Test method and conditions The liquid contact portions were filled with sulphuric acid and left untouched for half an hour.

Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.

Symbol Differential pressure indication Symbol Nominal filtration 0 None 4 Differential pressure indicator standard 074 74m 5 Differential pressure indication switch 105 105m 003 3m Table1-1 Port size (Rc) 005 5m Non-standard 010 10m Port size Threaded connection 020 20m Symbol 040 40m 149 149m 06 3/4 270 270m 08 1 10 1 1/4 12 1 1/2 16 2 20 2 1/2 24 3 10 / 17 FGX-OM-F001-A 2.

OFF (OFF) 1. 2. 60 21 - 10. 22 - 23 - B 24 - A RS2H-OM0044PRS2H-OM0045P 12 B 17,24 9 C C +86-10-67885566 : 08:0017:00() SMC() URL http://www.smc.com.cn 2 100176 +86-20-28396516 : 08:4517:30() SMC() URL http://www.smcgz.com.cn 3 2 510660 +81-3-5207-8249 Fax: 81-3-5298-5362 : 09:0017:00() SMC URL http://www.smcworld.com /101-0021 4-14-1 2017 SMC Corporation All Rights Reserved

Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.

Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.

(l/min (ANR)) Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Needle rotation (Turns) Needle rotation (Turns) Needle rotation (Turns) ASD530F ASD630F 1000 1500 14 20 10, 11 12 Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 12 1000 10 8 10, 11, 12 08, 09 15 500

AS1002F-02 AS1002F-23 AS1002F-04 AS1002F-06 AS2002F-04 AS2002F-06 AS2052F-06 AS2052F-08 AS3002F-06 AS3002F-08 AS3002F-10 AS3002F-12 AS4002F-10 AS4002F-12 AS-31B AS-32B AS-33B AS-34B AS-35B AS-36B AS-37B AS-38B AS-41B AS-42B AS-43B AS-44B AS-45B AS-46B AS-47B AS-48B AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11