CQS

16 89 104 120 136 152 167 183 199 215 231 20 127 146 166 186 206 227 247 267 287 308 25 Minimum Operating Pressure Unit: MPa Weight/With Auto Switch(Built-in magnet) Unit: g Bore size(mm) 12 16 20 25 Stroke (mm) Bore (mm) Min. operating pressure 0.07 0.07 0.05 0.05 5 10 15 20 25 30 35 40 45 50 Allowable Kinetic Energy Unit: J Bore size(mm) 46 54 62 70 77 85 12 12 16 20 25 60 71 81 91 102

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

-11 counter bore depth 6.3 98 96 1 6.3 76 5 75 0.2 44 8 4.1 M8 x 1.25 x 23l and M8 x 1.25 (hexagon bolt) (hexagon nut) 2-M6 x 1 (through) 18 2-M5 x 0.8 Thread depth 8 30 (Z) 8-M5 x 0.8 thread depth 7.5 (same on reverse side) 4-Rc 1/8 thread depth 6.5 (piping port) (same on reverse side) 9 20 Model S ZZ Z SS 19 CXS32-10-XB19 10 122 92 CXS32-15-XB19 15 127 97 10 56 40 CXS32-20-XB19 20 132 102

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

C4 C6 C4 C6 Stations L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 123 135.5 125 102 16.5 148 148 160.5 150 173 185.5 175 198 210.5 200 112.5 91.5 15.5 137.5 137.5 123 12.5 162.5 144 14.5 187.5 165 16.5 133.5 13.5 154.5 15.5 175.5 17.5 112.5 17.5 Stations SS5Y3-45GUBC4 C6 2 3 4 5 6 7 8 9 10 Stations L1 L2 L3 L4 135.5 125 108 13.5 148 160.5 150 129 15.5 173 185.5 175 150 17.5 185.5 175 198 210.5 200 223

IDX-OM-Y002

Fig. 1 shows the possible issues due to water quality 9 Trouble due to scale is likely to occur 8 pH (25oC) Within criteria 7 Trouble due to corrosion is likely to occur 6 5 4 102 2 3 4 5 103 2 3 4 5 104 102 102102102 102 102102102 Electric conductivityS/cm Fig. 1 Relation between pH conductivity and trouble (3) Maintenance and inspection of the strainer (monthly) CAUTION If the mesh of the

MY1

MY1 HT MY1 W MY1 W MY1CW (Cam follower guide type) 16, 20 25, 32, 40, 50, 63 MY2C MY2 H/HT MY3A MY3B MY3M B A B A Proper Auto Switch Mounting Position (mm) D-Z7/Z80 D-Y59/Y7P D-Y7W D-Y7BA D-M9V D-M9WV D-M9AV D-A9 D-Y69/Y7PV D-Y7WV D-M9 D-M9W D-M9A Bore size (mm) A B A B A B A B A B 16 20 25 32 40 50 63 74 86 70 90 94 106 90 110 102 118 102 118 97 123 97 123 132 148 132 148 127 153

3 Way,3 Port Solenoid Valve NVZ Series

NW3Z5-21R-O1-007 NVzslzR-elCO 01T NW3 ott, statpns t 20 20 stations ll there are more than I stations, supdy air and exhaust from trcth sides of manifold. Abnk pbr .8dy DXT201-15-1A Side ported NW325.41-O-O Applicau Yelv .

Base mounted VFS3000/5000/6000 series: ③ Base mounted VFS3000 to 6000 series
Manifold/01 type (with attachment plug lead wire): ④ Type 01 with attachment plug lead wire
Manifold/01T

Single/Base mounted VFR2000 to 6000 series: ① VFR series
Manifold/01T type (with terminal block): ② Type 01T with terminal block
Manifold/01C type (with multi-connector

NVZseies

NW3Z5-21R-O1-007 NVzslzR-elCO 01T NW3 ott, statpns t 20 20 stations ll there are more than I stations, supdy air and exhaust from trcth sides of manifold. Abnk pbr .8dy DXT201-15-1A Side ported NW325.41-O-O Applicau Yelv .

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

(NN 1) x H H 10.5 5.5 10.5 5.5 A B 3H9( ) depth 2.5 +0.025 0 3.2 3.2 6.3 7 7 12 1 A B NN x M4 x 0.7 thread depth 8 4 3H9 ( ) depth 2.5 +0.025 0 HA GA A-A B-B (mm) Model F 22 25 21 26 27 N 4 4 6 6 6 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16 9 J 17 27 37 48 65 K 21.5 31.5 41.5 51.5 61.5 M 42 52 62 80 90 Z 41.5 51.5 61.5 79.5 89.5 ZZ 64 74 84 102

Possible to transfer a workpiece at low-speed.

CRQ2X MSQX CRQ2XB20CRQ2XB30CRQ2XB40101 101 MSQXB30A MSQXB50A MSQXB20A 102 102 Moment of inertia (kgm2) Moment of inertia (kgm2) MSQXB10A 103 CRQ2XB10CRQ2XB15103 D104 104 105 5.0 0.7 106 5.0 0.7 105 2.0 1.0 0.5 0.3 0.2 1.0 0.5 0.3 0.2 2.0 Rotation time (s/90) Rotation time (s/90) If the rotation time exceeds 2 s per 90, kinetic energy is calculated with rotation time of 2 s per 90. 305 CRQ2X

7

Port size K L F I J (D) Flat terminal C E U 11 T A OUT IN M B 2 x P Port size I F J L K (D) (mm) Electrical entry Model Flat terminal Conduit terminal Conduit Port size P A B C E F I J K L D M T T V U U T 68.5 (74.5) 126.5 (134.5) 76.5 (84.5) 76.5 (84.5) 82.5 (90.5) U 62.5 (68.5) 107.5 (113.5) 29 62.5 (68.5) 5 C VXD2 30 3/4 99.5 68.5 47.5 23 71 20 4.5 17 51 32.5 38.5 35 6 D VXD2 33 35 1 102

1

Width across flats 22 G1/2 32 H (44) H 31.5 25 C C J G1/2 J Dimensions [mm] Model A B C D E F M P Q Grommet: G Grommet: GS Conduit: C Flat terminal: F DIN terminal: D Terminal: T G H G H G H G H G H J G H J XSA1-1P(N) 30 30 66 30 11 20 8 1/8 19 27 56.5 30 43 47.5 50.5 23 56.5 64.5 48.5 52.5 99.5 50.5 68.5 XSA2-2P(N) 36 36 79 35 14 22 10 1/4 24 29.5 68.5 32.5 55 50 62.5 25.5 68.5 67 60.5 55 102

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 39 39 40 40 41 41 43 45 47 54 54 55 55 56 60 65 68 70 70 71 71 72 77 78 82 84 87 89 91 93 96 97 98 99 99 100 101 102 Series MSUB Rotary Table: Basic Type Vane Style Size: 1, 3, 7, 20 . How to Order . Specifications. Construction. Dimensions .

ML2B

G 2-PA (Hexagon socket head taper plug) I F B + Stroke 2-PA (Port for operating cylinder) J J J J D D 2-PB 2-PB 2-MB, Depth LB II II (Hexagon socket head taper plug) (Hexagon socket head taper plug) J J 28 32 36 G 30 37 45 J 40 46.5 55 DD 11 15 16.5 A 110 140 170 H 73 88 106 EE 14.5 16 22 K 46 58 68 FF 63.5 77.5 95 L 45.5 54 64 GG 22 27 35 M 30.9 32.4 41.4 HH 24 32 37 N 16 15 19 O 69 84 102

MVGQ

J MVGQM (Slide bearing) A, DB, E Dimensions MVGQL (Ball bushing bearing) A, DB, E Dimensions DSymbol A E Symbol Bore size (mm) 40 A DB E DB Bore size (mm) Stroke Up to 50 st Over 50 st Up to 50 st Over 50 st -X 40 54 90 0 36 16 71.5 20 17.5 50 50 60 102 4 46 20 81 25 25 2063 63 61 102 0 41 20 81 25 20 Data 10-16-13 14 Valve Mounted Guide Cylinder Series MVGQ 80, 100 How to Order How to Order

REC

D-C80 D-C80C D-B53 D-B64 D-G5NTL Without indicator light Reed switch Without indicator light With timer Solid state switch 10-2-102

C85

22 6 6 19.7 16 22 20 8 G 1/8 M22 x 1.5 8.2 M8 x 1.25 24 13 12 15 15 11 32 17 6 20 16 11 44 24 8 28 20 8 22 22 10 G 1/8 M22 x 1.5 10.2 M10 x 1.25 30 17 12 15 15 11 32 20 8 22 16 11 50 28 8 33.5 25 (mm) S XC ZZ Z Bore 1 to 50 1 to 50 1 to 50 1 to 50 101 to 150 101 to 150 101 to 150 101 to 150 51 to 100 51 to 100 51 to 100 51 to 100 8 46(52){56(62)} 64(70){74(80)} 76(82){86(92)} 86(92){96(102

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) Stroke range (mm) O P AJ AI AH AG AB AA V U T S N M L A K J I B AP AK AL Rc 1/8 20 95 82 125 112 11 12 48 82 12 26 45 25 80 60 55 30 108 99 6.6 25 9 75, 100, 125, 150, 200 M6 x 1 depth 9 Rc 1/8 25 108 92 150 134 13 16 57 100 13 31 54 35 100 70 65 35 130 30 109 9 9 M6 x 1 depth 13 75, 100 125, 150 200, 250 300 Rc 1/8 32 118 102 150 134 16 16 65 114 16 38 60 35 106 80 73 40 135

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Stainless steel linear guide (specially treated) 102 CX The specially treated linear guide achieves low particulate generation, high linearity and high precision.