Series: VP300, Exhaust Type: Common Exhaust, Pilot Type: Internal Pilot, Stations: 7 Stations, Symbol: 1, Port Size: 1/4, Thread Type: NPT

Series: VP300, Exhaust Type: Common Exhaust, Pilot Type: Internal Pilot, Stations: 11 Stations, Symbol: 1, Port Size: 1/4, Thread Type: NPT

Series: VP300, Exhaust Type: Common Exhaust, Pilot Type: Internal Pilot, Stations: 13 Stations, Symbol: 1, Port Size: 1/4, Thread Type: NPT

Series: 3 (VP300), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 20 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: N (NPT)

Series: 3 (VP300), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 18 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: N (NPT)

Stations: 10 Stations, Piping: P Common, R Common, A Side, Thread: NPT, Option: Mounting Adaptor, CE/UKCA Compliant: CE/UKCA-Compliant

Stations: 10 Stations, Piping: 1 (P Common, R Common, A Side), Thread: N (NPT), Option: A (Mounting Adaptor), CE/UKCA Compliant: Q (CE/UKCA-Compliant)

Fluoropolymer Piping Equipment

8 30 26 18 36 41 78 74 49 Inch Size Model Applicable tubing O.D.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Applicable solenoid valve Refer to the p.1.2-41.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds

VQ5000

3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds

High Vacuum Angle Valve, XL Series

O After a few seconds at 10-6Torr 41

XL

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

AC

Q R Model Port size A B C D M P N B B E F G H J K L 1/8, 1/4 1/4, 3/8 124.5 153 153 188 3.3 4.3 0.8 0.8 80 80 80 105 140 181 181 238 38 38 38 41 40 48 53 70 147.5 56.8 60.8 60.8 65.5 30 41 41 50 50 64 64 84 24 35 35 40 5.5 7 7 9 8.5 11 11 13 5 7 7 7 22 34.2 34.2 42.2 50 70.5 70.5 88 23 26 26 33 AC2001 AC2501 AC3001 AC4001 194 194 229 1/4, 3/8 1/4, 3/8, 1/2 Option marks in the dimension diagram

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

45 45 50 37 41 41 45 13 17 17 22 26 32 32 41 26 26 26 31 5 6 6 8 8 8 8 10 134 138 140 174 M8 x 1.25 M20 x 1.5 M10 x 1.25 M26 x 1.5 M10 x 1.25 M26 x 1.5 M32 x 2 M14 x 1.5 The bracket is shipped together.

25

IZS 41 IZS 42 IZF Sensor not connected Offset voltage (V) 30 Total number of ionizers that may be connected IZS41: Max. 8 units. IZS42: Max. 5 units.

VQ5000

R2 R1 18.5 P 41 41 41 41 27.5 27.5 Rc 1/8 PE port Rc 1/8 external pilot port 5-Rc 1/2 5-Rc 1/2 (P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3 position type 1(P), 4(A), 2(B), 5(R1), 3(R2) port 2-6-6 7 Base Mounted Series VQ5000 Plug-in/Plug Lead: Single Unit Plug Lead Type Grommet 2 position single: VQ5150 1-G H 194.5 121.3 73.2 194.5 121.3 73.2 53 59.5 59.5 27.5

Modular Type Lubricators Series AL

Body Size 21 31, 41 Description Metal Bowl Metal Bowl With Sight Glass Residual Pressure Relief Valve Symbol Nil V NPT Threads Applicable Model Combo All All Description Without Valve With Downstream Valve Port Size Symbol 02 03 04 Applicable Body Size 21 31 41 Port Size 1/4 3/8 1/2 Accessories Symbol Nil C D Applicable Body Size All 31, 41 31, 41 Description None Float Auto Drain (N.C.)

Thermo-chiller

type 1.8 [1.0] 41 to 95 [5 to 35] (400 V as standard) HRSH090 Inverter type 0.18 [0.1] 41 to 104 [5 to 40] Indoor use (400 V as standard) UL Standards (To be obtained) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.18 [0.1] 41 to 95 [5 to 35] (200 V only as an option) 4 Thermo-chiller Standard Type Series HRS100/150 Circulating Fluid Temperature Controller

SMC's 3 port air operated valve, VPA300/500/700 is available in body ported or base mounted styles.  The VPA offers a high flow capacity of Cv1.0 (VPA300), Cv2.3 (VPA500), Cv4.0 (VPA700).  It is possible to use the series as either a selector valve, or divider valve. The VPA is changeable from a normally closed style to a normally open style., MANIFOLD BASE, 3 PORT SOLENOID VALVE