3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

10 16 4.3 2-3.2 Mounting holes Manual override 24.5 7.8(C3, C4, C6) (M5: 5.7) Cover dia 1.6 Cross section 0.34mm2 (Lead wire) 34 35 300 (53) 27.5 16.3 18 1.2 13.8 13.6 7 (7.8) (24.5) 2-3.4 Mounting holes 41 Foot bracket M5 X 0.8 P port M5 X 0.8 R port R 3 P 1 10.7 9 M5 X 0.8 External pilot port 32 (Only external pilot style (R)) L plug connector (L): VQZ115-lLl-C3, C4, C6, M5-PR M plug connector

3 Port Solenoid Valve Metal Seal Series VZ200 1

x 0.8, Rc 1/8 C4, C6 C4, C6 Rc 1/8 VZ215VZ225Base mounted (Without sub-plate) VVZ200-31A-2 VVZ200-32A-2 M5 x 0.8 Rc 1/8 VZ212--M5 VZ222--M5 Body ported VP Port size Applicable valve model VG VV3Z2-20-061 VP Blanking plate VVZ200-32A-1 VVZ200-31A-1 S070 Screws and Gasket Assembly Part No.

Table of Contents

Mitsubishi Electric Corporation Yaskawa Electric Corporation 02 03 04 05 05 5m Cable length 2m 3m 4m 5m Applicable cables Model Manufacturer part no.

SYJA3000

48(22) Base mounted 2 position double SYJA3240-M5 51(25) 1.8 (0.1) 3 position exhaust center SYJA3340-M5 M3 X 0.5 M5 X 0.8 54 (28) 3 position exhaust center SYJA3440-M5 3 position pressure center SYJA3540-M5 2 position single SYJA3130 22 4 port base mounted (For manifold) 2 position double SYJA3230 25 M3 X 0.5 (1) 1.2 (1) M3 X 0.5 3 position exhaust center SYJA3330 (0.067) M5 X 0.8 3 position

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M6 MB M5 M6 M8 M5 M6 M8 M4 Ms M6 ~.

One-touch Fittings

KQ2 Series Model Applicable tubing Connection thread Part number 3.2 M3 x 0.5 KQ2H23-M3G1 3.2 M5 x 0.8 KQ2H23-M51 4 M3 x 0.5 KQ2H04-M3G1 4 M5 x 0.8 KQ2H04-M51 4 M6 x 1.0 KQ2H04-M61 6 M5 x 0.8 KQ2H06-M51 6 M6 x 1.0 KQ2H06-M61 6 R1/8 KQ2H06-01S1 1/8 10-32UNF KQ2H01-321 5/32 10-32UNF KQ2H03-321 3/16 10-32UNF KQ2H05-321 5/32 NPT1/16 KQ2H03-33S1 1/8 M5 x 0.8 KQ2H01-M51 3/16 M5 x 0.8 KQ2H05-M51

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

B 2 (EA)5 1 (P) 3(EB) M5: M5 x 0.8 3 position closed center 2(B) (A)4 Back pressure check valve 3 J: With switch A 4 Nil None (EA)5 1 (P) 3(EB) K Built-in 2 B 3 position exhaust center The built-in back pressure check valve type has an effective area approximately 20% smaller.

CL

x 0.8 pressurized locking port Pneumatic locking and spring and pneumatic locking Piping port M5 x 0.8 Manual unlocking cam M5 x 0.8 unlocking port Unlocked when pressurized 71 46 6 Head cover port in axial direction (R) M5 x 0.8 Rod side cylinder port 31 Lock nut M14 x 1.0 M5 x 0.8 Head side cylinder port 5 5 32 34 48.5 6.5 M6 x 1.0 6 20 18 Width across flats 10 18 9.5 11.5 65 39 20 14

CL

Double Acting, Single Rod Rod Side Flange Style (F) E D P CLJ2F1619 16 2 8 Silencer 12 25.5 Spring lock CL Piping port M5 x 0.8 CL1 Head cover port in axial direction (R) MLGC Manual unlocking cam M5 x 0.8 pressurized locking port Pneumatic locking and spring and pneumatic locking 71 46 6 M5 x 0.8 unlocking port Unlocked when pressurized CNG 31 M5 x 0.8 Rod side cylinder port Lock nut MNB

Electric Actuator/Slider Type

Tap (4 locations) Body xed/Top mounting Model Bolt Length: L (mm) LEYG25M L M5 x 0.8 2.2 [3.0] 40.5 LEYG32M L M5 x 0.8 2.2 [3.0] 50.5 Max. tightening torque lbfft(Nm) L Body xed/Bottom mounting Model Bolt Max. screw-in depth (mm) LEYG25M L M6 x 1.0 3.8 [5.2] 12 LEYG32M L M6 x 1.0 3.8 [5.2] 12 Max. tightening torque lbfft(Nm) Workpiece xed/Rod end female thread Model Bolt Max.

CNG

x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 141 (149) 11 11 88 15 (16) 23 5.5 3 12 30 M6 x 0.75 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 151 (159) 11 11 98 15 (16) 25 6 3 12 25 M8 x 1.0 M5 x 0.8 depth 8 5.5 10 M10 x 1.25 35.5 Rc 1/8 26.5 2.5 73 154 (162) 11 10 (11) 99 15 (16) 28.5 6 3 12 20 M10 x 1.25 M6 x 1 depth 12 6 14 M14 x 1.5 44 Rc 1/8 28 2.5 81 169

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Max. tightening torque [Nm] Max. screw-in depth [mm] LEYG25M L M5 x 0.8 3.0 8 LEYG32M L M6 x 1.0 5.2 10 25ALEC LEC S LEC SS-T LEC Y LEC Y 3.

Cylinder with Lock Series CNG

x 0.8 141 (149) 88 5.5 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 11 11 15 (16) 23 30 3 12 M6 x 0.75 151 (159) 98 6 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 11 11 15 (16) 25 30 3 12 M8 x 1.0 154 (162) 99 6 M5 x 0.8 depth 8 5.5 10 M10 x 1.25 35.5 Rc(PT) 1/8 26.5 2.5 73 11 10 (11) 15 (16) 28.5 25 3 12 M10 x 1.25 169 (178) 107 8 M6 x 1 depth 12 6 14 M14 x 1.5 44

CG5-S

(mm) Bore size (mm) Stroke range A P AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA S ZZ 20 to 350 1/8 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 83 118 25 to 400 1/8 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 83 123 32 to 450 1/8 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8

Fieldbus System

Cylinder port size C3 C4 C6 M5 CM L3 L4 L6 L5 B3 B4 B6 B5 LM With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread Mixed sizes and with port plug Top ported elbow with 3.2 One-touch fitting Top ported elbow with 4 One-touch fitting Top ported elbow with 6 One-touch fitting M5 thread Bottom ported elbow with 3.2 One-touch fitting Bottom ported elbow with 4

Series SYJA300 3 Port Air Operated Valve

M3 X 0.5 SYJA314-M5 N.C. 39 (Without sub-plate 18) Base mounted (With sub-plate) M5 X 0.8 1.8 (0.1) SYJA324-M5 N.O.

MTS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.1 or less (Within allowable torque values) 0.2 or less (within allowable torque values) Non-rotating accuracy Piping port size M5 x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except lock unit, 0.12 MPa for 12 and 16; 0.10 MPa for 20 to 40

Precision Cylinder Series MTS

x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except for lock unit: 0.12MPa for 12 and 16; 0.10MPa for 20 to 40 Piston Speed Order Made Order Made Specifications 8 50 to 500 0.02 12 16 20 25 32 40 50 to 800 Bore size (mm) Piston speed (mm/s) Allowable kinetic energy J Refer to page 20 for series MTS order made specifications. 0.19 0.32 0.55 0.78 1.6 2.8 End Lock Specifications

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

L d 0.030 0.060 0.030 0.060 0.040 0.076 0.040 0.076 12 16 20 25 12 16 20 25 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.25 4 5 5 6 8 10 13 17 9.2 11.5 15.0 19.6 IY-G012 IY-J015 IY-G02 IY-G03 NTJ-015A NT-015A NT-02 NT-03 Axial C style 5 Axial C style 5 Axial C style 8 Axial C style 10 0.7 0.7 0.9 1.15 1.5 1.5 1.5 1.55 10.2 12.2 16.2 20.2 4.8 4.8 7.6 9.6 5 5 8 10 14.6 16.6 21 25.6 Inch Threads

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

When ordering SI manifolds add suffix "X11" at end of P/N 7 Series VQ100 How To Order How to Order Valve VQ1 1 0 5 L M5 Subplate option Without subplate With M3 subplate With M5 subplate M3 M5 Series VQ Compact 3 port valve Manual override Type of valve actuation Normal close type Non-locking recessed type Latching type : Locking recessed type Locking tool type 1 B * Note) The manual override