Oil Filter FH150 Series

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM Model Port size (Rc) Rated flow rate (L/min) Model/Rated Flow Rate FH FH FH150-02 FH150-03 FH150-04 5 1/4 HOW 10 3/8 20 1/2 Description Part no.

Power Valve Precision Regulator

Note 5) Non-lubricated specifications are not available for valve sizes 1 to 9.

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

Note) Metric size 23 04 06 08 10 12 Inch size 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 Made to Order (For details, refer to page 622.)

฀AS

Bodysize Metricsize Inchsize 100 200 205 300 400 M3,M5standard 1/8standard 1/4standard 3/8standard 1/2standard Grease-free(Sealant:Fluorocoated)+ Restrictor(WithoutCheckValve) -X21 02 23 04 06 08 10 12 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2 3.2 Ex.)AS2002F-04-X21 Note)Notparticle-free 4 6 8 10 12 Withone-touchfittings Restrictor(WithoutCheckValve) -X214 Use1/8"tube.

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

VP717 AC40-A Y400-A Y400T-A E400-04-A AN40-04 AN402-04 * Refer to page 3 for details of the spacer. 1 Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve VP500/700 Series Specifications Fluid Air Type of actuation N.C.

VFRA3000

VFRA4111 5 pcs. VVFS4000-10A 1 pc. 3.2-23 VFRA4000 Dimensions 2 position single: VFRA4111-03 04 2 position double: VFRA421103 04 SlA VlA SlA VlA VM/VR VH 03 04 03 04 03 04 3 position closed center: VFRA43113 position exhaust center: VFRA44113 position pressure center: VFRA45113.2-24

Digital Flow Switch for Water Series PF3W 3-color display ®

PF3W 5 04 03 1T Remote sensor unit Integrated display PF3W 7 04 03 AT M Type Made to Order 5 7 Remote sensor unit Integrated display Thread type X109 X128 X143 Seal material EPDM Nil N F Rc NPT G Analog 4 to 20 mA 2 output type Note) Rated flow range (Flow range) Piping material brass Symbol Rated flow range Note) Applicable only for remote type with 04 20 40 11 21 0.5 to 4 L/min 2 to 16

Table of Contents

5.

AC Servo Motor Driver (CC-Link Type ）

OPERATION 5 1 to 5 -60 5.1 Switching power on for the first time . 5 2 5.1.1 Startup procedure . 5 2 5.1.2 Wiring check . 5 3 5.1.3 Surrounding environment . 5 4 5.2 Startup . 5 5 5.2.1 Power on and off procedures . 5 5 5.2.2 Stop . 5 5 5.2.3 Test operation. 5 6 5.2.4 Parameter setting . 5 7 5.2.5 Point table setting . 5 8 5.2.6 Actual operation . 5 8 5.3 Driver display . 5 9 5.4 Automatic

AC Servo Motor Driver (CC-Link Type ）

OPERATION 5 1 to 5 -60 5.1 Switching power on for the first time . 5 2 5.1.1 Startup procedure . 5 2 5.1.2 Wiring check . 5 3 5.1.3 Surrounding environment . 5 4 5.2 Startup . 5 5 5.2.1 Power on and off procedures . 5 5 5.2.2 Stop . 5 5 5.2.3 Test operation. 5 6 5.2.4 Parameter setting . 5 7 5.2.5 Point table setting . 5 8 5.2.6 Actual operation . 5 8 5.3 Driver display . 5 9 5.4 Automatic

Quick Exhaust Valve Series AQ 1

-00 Model Tubing O.D. d AQ240F-04-04 6 4 9.3 5 4 9.3 AQ240F-06-00 AQ240F-06-06 13.7 13.7 15.4 6.2 13.7 26.7 40.7 8 10.0 14.7 6 11.6 6 6 11.6 6.2 40.7 AQ340F-06-00 AQ340F-06-06 13.7 19.5 13.7 13.7 6.3 44.8 31.7 13 19.6 11.8 6 11.6 11 6 11.6 6.3 44.8 AQ240F-07-00 AQ240F-07-07 13.7 13.7 15.4 6.2 13.7 27.3 40.7 8 10.0 15.1 6.2 1/4" 12 6 1/4" 12 40.7 AQ340F-07-00 AQ340F-07-07 16.8 20.3 13.7 16.8

Air Cylinder

(0) 1 () 0 () 7 (5) 6 (4) 4 (2) 3 (1) CA2 25 10.5 (8) 9.5 (7) 6.5 (4) 5.5 (3) 0.5 () 0 () 6 (4) 5 (3) 2.5 (0.5) 1.5 (0) 1 () 0 () 7 (5) 6 (4) 4 (2) 3 (1) CS1 32 11.5 (9) 10.5 (8) 7.5 (5) 6.5 (4) 1.5 (0) 0.5 (0) 7 (5) 6 (4) 3.5 (1.5) 2.5 (0.5) 2 (0) 1 (0) 8 (6) 7 (5) 5 (3) 4 (2) 40 17.5 15.5 13.5 11.5 6.5 5.5 12 11 8.5 7.5 7 6 13 12 10 9 CS2 * ( ): Setting position for the auto switch with

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

). 5 15 5.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1.2-72

HRX-OM-Y120

. 5-4 5.7 Setting method . 5-5 5.7.1 IP Address Setting . 5-6 5.7.2 Setting of subnet mask and default gateway. 5-7 5.8 Communication sequence. 5-8 5.9 Message configuration . 5-8 5.10 Function codes . 5-9 5.11 Explanation of function codes . 5-10 5.12 Register Map . 5-11 5.12.1 Circulating fluid discharge temperature . 5-13 5.12.2 Circulating fluid electrical conductivity . 5-13 5.12.3

90

Note) When ordering ejector without valve, select Nil for mounting. 04 KJH C2 Port size 04 06 03 07 !

Vacuum System Peripherals:

Both sides D side 05 5 Can accommodate up to 8 solenoids.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

5 Port Solenoid Valve SY Series

For type W, DC voltage is only 5 16" One-touch fitting for N9 5 5 16" One-touch fitting for N9 One-touch fitting for One-touch fitting for One-touch fitting for available.

Pin Cylinders Series CJP2/CJP

I-P006A I-P010A I-P016A Y-P006A Y-P010A Y-P016A 5 +0.040 0 0.020 0.045 +0.040 0 3 3 3 6 9 12 3.5 M3 x 0.5 3 5 4 5 6 5 6 12 3.5 M3 x 0.5 3 5 4 5 6 6.5 +0.048 0 0.030 0.060 +0.048 0 5 5 5 10 13.6 16 5.5 M4 x 0.7 5 8 6.3 7 10 6.5 10 16 5.5 M4 x 0.7 5 8 6.3 7 10 7 +0.048 0 0.030 0.060 +0.048 0 6 6 6 12 15.8 19 7 M5 x 0.8 6 10 7.8 9 16 7 12 19 7 M5 x 0.8 6 10 7.8 9 16 Knuckle pin Trunnion pin