MXW

Data Symbol Specifications Anti-corrosive specifications for guide unit (N) -X42 Operating pressure (MPa) Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) 0.7 0.6 0.5 0.4 0.3 0.2 71 61 51 40 30 20 101 R 4 8 53 45 38 30 23 15 75 L 158 136 113 90 68 45 226 R 6 12 119 102 85 68 51 34 170 L 281 241 201 161 121 80 402 R 8 16 211 181 151 121 91 60 302 L 440 377 314 251 188 126

Plug-in/Plug Lead: Single Unit

(Noise reduction of 35 dB or more) VQC SQ VQ0 VQ4 VQ5 VQZ VQD Plug-in type Plug lead type Lead wire length LU D0: 600 mm LU D1: 1500 mm LU D2: 3000 mm 2-Rc 1/8 (External pilot port) 184.5 (3 position, metal type) 200 (3 position, metal type) 194.5 (Single, Double, 3 position, Rubber type) 123.3 106 15.5 17 22 51 69 83.5 117 179 (Single, Double, 3 position, Rubber type) 117 83.5 69 51 22

Compact Cylinder: Standard Type Double Acting, Single Rod Series CQS ø 12, ø 16, ø 20, ø 25

Stroke range Stroke range Bore size Bore size Rod end male thread Long stroke 31 to 199 31 to 199 12, 16 12, 16 Rubber bumper Stroke range 51 to 199 51 to 199 20 20 Rubber bumper is standard equipment for long stroke type. 51 to 299 51 to 299 25 25 Part no.: CQSB25-47D-XB10 Makes 47 stroke tube. B dimension is 69.5 mm. Part no.: CQSB25-47D CQSB25-50D with 3 mm width spacer inside.

Air Slide Table Series MXW

(N) MTS Symbol Specifications Operating pressure (MPa) Piston area (mm2) Bore size (mm) Rod size (mm) Operating direction -X7 -X9 -X11 -X33 -X39 -X42 -X45 PTFE grease 0.2 0.3 0.4 0.5 0.6 0.7 Grease for food R 20 30 40 51 61 71 101 Adjusting bolt, long specification (Adjustment range: 15 mm) 8 4 Without built-in auto switch magnet L 15 23 30 38 45 53 75 Fluororubber seal R 45 68 90 113 136

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

MGG MGC (mm) MGF Stroke range Bore size (mm) D1 J K M B D C E KA GA GB H MGZ 11 12 22 25 25 25 25 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 39 43 49 59 71 82 106 29 33 38 46 55 66 86 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 20 25 32 40 50 63 80 12.5 18 19.5

Escapements Series MIW/MIS

, Tapped on all faces (5 surfaces including end surface) RSQ Stroke adjuster (Rear end stroke only) RSG RS Scraper Can be mounted on standard products Theoretical Output MI Unit: N Operating pressure MPa Operating direction Piston area (mm2) Rod size (mm) Bore size (mm) 0.3 0.2 0.4 0.5 0.6 0.7 15 10 OUT 36 31 26 20 50 8 4 11 7 IN 26 23 19 15 38 34 23 OUT 79 68 57 45 113 12 6 26 17 IN 60 51

SMC Electronic Switch Series Variations

The deviation from the setpoint is +/ 1[kPa]. this means that the output can become energized anywhere between 49 to 51[kPa]. (Refer to the graph below.) Starting Finished Absorbed Absorbed Absorbed Absorbed A P1 Vacuum P2 51 50 49 51 Set value [kPa] 49 Effective area of pressure indication at 50[kPa].

KR

(mm) 6 3-applicable tubing Weight (g) Model D Note) L2 P L1 Q M FR soft nylon FR double layer KRU06-00 12.8 10 20 24.5 27.5 30 12.8 15.2 18.5 20.9 Note) D: Max. diameter 37 11.7 17 10.4 4.2 8 KRU08-00 15.2 42.5 13.7 18.5 25.6 17.7 12 10 KRU10-00 18.5 48 16.1 21 40 28.4 16 12 KRU12-00 20.9 51 18.1 22 57.4 45.4 23 Plug-in Y: KRU Effective area (mm 2) Applicable tubing O.D.

Step Motor Controller (Servo / 24 VDC)

Small Dec (1-050) B RESET input Modify the Deceleration value to a value with a sufficient margin so that the electric actuator can stop within the stroke limit. 51 - For an operation for a specific step data no., the requested number of the step data is not registered.

Mechanically Jointed Rodless Cylinder Series MY1

However, add -XB10 to the end of the part number for non-standard strokes from 51 to 599. Also when exceeding a 600 mm stroke, specify -XB11 at the end of the model number. (Except 10) Backlash 1 mm or less Manual release Possible (Non-lock type) Made to Order Specifications (For details, refer to pages 1395 to 1565.)

OMR0031

Operation Examples and Procedures. 51 12.1 Return to origin example . 51 12.2 Positioning operation example. 52 3 - 12.3 Pushing operation example . 53 13.

Escapements Series MIW/MIS

on all faces (5 surfaces including end surface) Finger options MI12: Arrangement range 6mm MI20: Arrangement range 12mm Can be mounted on standard products Stroke adjuster (Rear end stroke only) Scraper Theoretical Outputs Operating pressure MPa Unit: N Operating direction Piston area (mm2) Rod size (mm) Bore size (mm) 0.3 0.2 0.4 0.5 0.6 0.7 34 23 OUT 45 57 68 79 113 12 6 26 17 IN 34 43 51

Hydraulic Cylinders

Auto switch symbol (mm) (mm) S Bore size (mm) B Bore size (mm) h C A g N S 26.5 30 38 45 55 66 86 104 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 61 63 71 75 81 90 105 132 43 45 51 55 60 67 78 96 18 18 20 20 21 23 27 36 33 36 45 50 56 68 87 111 76 81 96 105 116 135 165 207 6 6 7 7 7 7 7 7 N g C B + Stroke h + Stroke A + Stroke Note) For all dimensions other than the above, please refer

Air Slide Table Series MXQ

(Unit: N) Cylinder bore size (mm) Rod size (mm) Piston area (mm) Operating direction Operating pressure (MPa) 0.2 0.3 0.4 0.5 0.6 0.7 11 17 23 29 34 40 OUT 57 6 3 8 13 17 21 25 29 42 OUT IN 20 30 40 51 61 71 101 8 4 15 23 30 38 45 53 75 OUT IN 45 68 90 113 136 158 226 12 6 34 51 68 85 102 119 IN 170 80 121 161 201 241 281 OUT 402 16 8 60 91 121 151 181 211 IN 302 OUT 628 126 188 251 314 377

High Vacuum Angle Valve, XL Series

) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) 34 High Vacuum Angle Valve Series XL 1 With pilot pressure at 0.5MPa (72psi

CRBU

With auto switch CDRBUWUSize SSCRB Size , #10 CDRBUWU15-lS 25 47 18 M5 X 0.8 CDRBUWU20-lS 34.5 51 20 M5 X 0.8 CDRBUWU30-lS 47.5 55.5 22 M5 X 0.8 With Angle Adjuster and Auto Switch Dimensions/Double Vane Style The dimensions below show rotation middle point during pressurization to A port or B port.

Series KV2 Fittings

22.23 17.46 17.46 22.23 23.81 22.23 22.23 22.23 23.80 25.40 10.0 10.0 12.5 12.5 12.5 17.4 17.4 17.4 17.4 21.0 21.0 21.0 21.0 25.2 27.0 30.7 27.5 31.2 33.3 30.8 34.5 36.6 40.6 31.4 35.4 36.4 40.8 42.9 10.8 13.5 10.6 13.3 15.2 11.3 15.0 15.5 18.9 9.9 13.8 14.8 18.8 18.3 16 16 17 17 17 21 21 21 21 22 22 22 22 24.6 1.6 1.6 3.5 3.5 3.5 5.4 5.4 5.4 5.4 8.5 8.5 8.5 8.5 9.8 17 26 17 26 45 32 33 51

Integrated Controller

Dimensions [mm] Size Stroke range [mm] A B C D EH EV H J K L M O1 R S S2 T T2 U CV V X2 Y Without lock With lock 25 15 to 100 136.2 121.7 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 46 58.1 115 113.6 1 66.3 57.8 144 184 32.2 101 to 400 161.2 146.7 32 20 to 100 153.6 135.1 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1 10 60 70.8 142 140.3 2 83.5 69.8 144 189 39.1 101 to 500 183.6 165.1

7

45.5 D-P4DW 0.5 0.5 3 A 32 4 B D-P79WSE D-P74 23.5 23.5 18 Hs 57.5 51 47.5 D-M9 D-M9W D-M9A 10.5 10.5 13 33.5 33.5 28 51.5 44.5 39 6.5 6.5 9 D-A9 29.5 29.5 24 51.5 44.5 39 Note) The above drawing is the switch rod mounting example for the D-P4DWS.

SMC Pneumatic Clean Series

1.25 M18 x 1.5 11.5 Head side flange style (G) / CA2G, CA2G 10112122Relief port 2-cushion valve M5 x 0.8 GA 6 4-FD 4-J GB Width across flats KA 2-RcP Width across flats B1 FV FY D B E MM H1 AL A N C 18 K N 7 B H S + Stroke FT FX ZZ + Stroke FZ (mm) AL Bore size Stroke range Symbol B B B1 C D E FV FD FT J FX FY MM M FZ P S ZZ A GAGB H H1 K KA N 12 80 42 33 11 40 15 M8 x 1.25 27 Up to 1000 51