Table of Contents Refer to pages 12-10-4 to 12-10-5 for the details on effective holding force and allowable overhanging distance. Misc. D2012-10-9 9 Series MHY2 Construction Closed condition Size 10 Size 16 Size 20, 25 r o !8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !
57 75 80 E 41.5 55 55 72.5 77.5 U Q 65 64 66 74 74 T 29.5 28.5 30.5 35 35 N P 2.5 13 10 12 12 L 5.5 7 7 9 9 M 3.2 4 4 4 4.6 B 132 184 187 222 224 AC20C AC25C AC30C AC40C 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 2 (1) 114 143 146 183 185 26.5 28 31 36 36 45 50 50 75 75 126 167 167 220 235 50 71 71 88 88 0 3.5 3.5 3 AC40C-06 Note 1) For AC20 only, the position of the pressure gauge is above
adapter 4 to 8 w q ZP3 Y N B5 B5 04 B r Vacuum inlet Connection thread (Female thread) e B5 M5 x 0.8 Female thread 02 2 One-touch fitting 04 4 U2 For 2 polyurethane tubing Barb fitting U4 For 4 soft tubing 8 B5 M5 x 0.8 8 Model M5 x 0.8 8 0 0.1 M5 x 0.8 Effective thread depth 4 Vacuum inlet direction q Pad dia.
3 Port Solenoid Valve Base Mounted and Body Ported VQZ Series Choice of Rubber or Metal Seal Compact Design With Large Flow Long Life Interchangeable One-Touch Fittings P R O D U C T S Q Q Q Table of Contents Q Q Q Product Features .pages 4-5 Preferred Options Guide.page 7 Q Q Base Mounted Valves and Manifolds.page 9 Specifications.pages 10-11 How To Order .pages 12-15 Options
9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !
5 4 ZQ 5 6 8 32 34 29 39 57 ZPY32B Applicable Tubing Applicable Tubing ZF Q R Applicable tube P Q R Applicable tube P N4 (Nylon tube, 4/2.5) N6 (Nylon tube, 6/4) U4 (Urethane tube, 4/2.5) U6 (Urethane tube, 6/4) 13.5 15.5 5 7 1.8 2.5 ZP N4 (Nylon tube, 4/2.5) N6 (Nylon tube, 6/4) U4 (Urethane tube, 4/2.5) U6 (Urethane tube, 6/4) 14.5 16.5 5 7 1.8 2.5 13.5 15.5 5 7 1.8 2.5 ZCU 14.5 16.5 5
: 10 mm Q R S T 32 40 50 63 Q R S T Q R S T G1/8 7.5 Rc1/8 NPT1/8 156 140 74 7.5 176 160 84 Rc1/8 NPT1/8 G1/8 160.5 144 75 8 180.5 164 85 8 Rc1/4 NPT1/4 G1/4 202.5 179 91.5 12.5 266 242.5 121.5 14 Rc1/4 NPT1/4 G1/4 182 93 10.5 246 123 15 205 269 Note 1) The cylinder rod is retracted.
Example) 26NW 01 11 21 31 41 q w e w q Note 3) Only adjusting spring of regulator is different from standard specification. Note 4) Without valve mechanism. q q q w w w e (1) Numbers in . indicate order of constructtion of equipment from left hand side (the upper stream side) from a view of front side. Ex.)
2 #4 e !8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !
q e r w q e r w 3-position closed center 3-position exhaust center 4-position dual 3-port valve N.C. valve x 2 pcs.
Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.
No. 1 2 3 4 5 6 Description Note White White White Note Part no. SYJ700-9-1(-Q) SYJ700-9-2(-Q) V111(T)SYJ700-19-1A Material Aluminum die-casted Resin Aluminum die-casted Resin Stainless steel 7 Sub-plate Note) 1/8 1/4 Aluminum die-casted Pilot valve Bracket assembly 8 Note) Add suffix -Q for the CE-compliant product.
8 @0 @2 @1 o q !4 !3 y i #1 !5 #2 !9 !7 !1 !2 !0 #0 r t u @9 !6 e #5 #4 w #3 @5 @7 @4 @6 REBH15 @8 @3 Component Parts No. Description Body No. Description Material Note Hard anodized Material Aluminum alloy Note Aluminum alloy Plate B q !
2 #4 e #1 !8 @3 #5 !7 #3 MK(2) @5 @6 @7 @8 RS Q G RS H A RZQ MI W S CEP1 N@4 @9 CE1 Component Parts CE2 No. Description Body No. Description Note Hard anodized Material Aluminum alloy Material Note Hard anodized Aluminum alloy Plate A q !
4 u u !2 !3 i e !5 r t w q y !6 !
Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !
Description Material Note q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No.
Basic style (Through-hole): CQ2WB U 2-H thread effective depth C (Opposite side, too) Q Q 2-Rc 3/8 (Port size) I Width across flats K CUJ 11 D D 32 22 M E CU Minimum lead wire bending radius 10 2.5 Auto switch CQS Note 1) Flat washer 4 pcs. 4-N through-hole CQM 2 x 4-OA thread depth RA B + Stroke A + 2 (Stroke) K J M E 2 x 4-OB counterbore depth RB L L + Stroke CQ2 S (Opposite side, too)
A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 17.2 10.2 3.6 3.6 XLFV-25-2 46 21.4 10.2 3.6 3.6 XLFV-40-2 54.5 33.9 10.2 3.6 3.6 XLFV-50-2 71 35.3 12 4 2 XLFV-63-2 80.5 43.8 12 4 2 XLFV-80-2 90.5 59.8 12 4 2 13 A Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG
S 3 0 7 0 L 2 Q K 7 1 5 . 8 4 9 4 9 6 8 / 1 S 1 0 9 0 L 2 Q K 2 1 2 . 5 1 2 1 5 . 3 2 5 . 3 4 7 4 5 . 8 1 6 0 3 6 1 / 5 4 / 1 S 2 0 9 0 L 2 Q K 4 1 5 . 9 4 1 5 7 4 8 / 3 S 3 0 9 0 L 2 Q K 7 1 5 . 1 5 3 5 4 7 4 / 1 S 2 0 1 1 L 2 Q K 7 1 9 . 7 1 7 1 5 . 5 2 6 5 9 5 1 2 7 9 6 8 / 3 8 / 3 S 3 0 1 1 L 2 Q K 8 5 1 6 6 7 2 / 1 S 4 0 1 1 L 2 Q K 2 2 5 . 4 6 5 . 5 6 7 4 1 R(PT) 4 / 1 S 2 0 3 1 L 2