Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

fittings Rod end male thread With rubber bumper Through-hole (Standard) Mounting Both ends tapped style Built-in magnet JIS Symbol Double acting, double rod (1) M5 x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 Rc 1/4 Rc 1/4 Rc 3/8 Rc 3/8 Piping Screw-in type Rod end male thread Note 1) In the case of without auto switch, M5 x 0.8 is used for 5 stroke only.

ZP

)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material.

Table of Contents

TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part no.

Table of Contents

B port D B C G1 U G2 U If B port of Body (B) is machined, the port is plugged with Rc 1/8.

Air Slide Table

J I Pilot port 2 x M5 x 0.8 7 5H9 ( ) depth 2 +0.030 0 43 7.3 (Maximum screw-in depth) 5.5 38.6 +0.030 0 5H9 ( ) depth 2 3.3 (Minimum screw-in depth) B 30 42 60 3 72 36 B N x M5 x 0.812 F N 2 1 x F 29 Cross-sectional view B-B 2 x M5 x 0.8 thread depth 7 27 16 36 48 M 0.5 7 ZZ Z J I Bottom view of MXQ20A-50Z Pilot port 2 x M5 x 0.8 (Plug: Width across flats 7) G (NN 1) x H 5H9 ( ) depth

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

-S/D M5 x 0.8 depth 10 3-M5 x 0.8 depth 10 56 3-M5 x 0.8 depth 16 25 25 M5 x 0.8 depth 16 5.5 depth A port B port 11.5 10 g6 -0.005 -0.014 2 20 0 -0.030 4 6.5 10 30 45 Body B (mm) (90) h Keyway dimensions b l Body A l h (h9) b (h9) Series CRB2BW400 0.030 4 20 0 0.030 4 15 2-M5 x 0.8 Connection port for side port 9 4.5 1 CRB2BW40-SE/DE

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

B port D B C G1 U G2 U If B port of Body (B) is machined, the port is plugged with Rc 1/8.

CQ2

M5 X 0.8 Rc(PT)1/8 M5 X 0.8 M5 X 0.8 M5 X 0.8 M5 X 0.8 Rc(PT) 1/8 Rc(PT) 1/4 Rc(PT) 1/4 Screw-in style Piping 6/4 8/6 8/6 6/4(2) With built-in One-touch fitting Rod end male thread Rear boss mount Note 1) When requring style without auto switch, only 5 stroke uses M5 X 0.8.

Vacuum Pad

)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material.

CRB2/CRBU2/CRB1

B port A port 1-1> 1> B port A port B port A port Clockwise Clockwise CRB1 Free-Mounting Type CRBU2 CRB2 Hatched area represents a stopper lever.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

fittings Rod end male thread With rubber bumper Through-hole (Standard) Mounting Both ends tapped style Built-in magnet JIS Symbol Double acting, double rod (1) M5 x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 Rc 1/4 Rc 1/4 Rc 3/8 Rc 3/8 Piping Screw-in type Rod end male thread Note 1) In the case of without auto switch, M5 x 0.8 is used for 5 stroke only.

Micro Mechanical Valve Series VM1000

25.4 1 (P) 2 x 4.6 mounting hole (A) 2 3 port 14 8.5 12 10 2 x M5 x 0.8 depth 4 1 (P) 3 (R) * 0.5 MPa supply F .O.F .* 27 N T.T. 6.5 mm Twist selector (2 position) VM122-M5-34 (R, B, G, Y) A VM132-M5-34 (R, B, G, Y) A Panel mounting hole ON Max. 6 T.T. 40 39 OFF 38 24.5 Symbol 2 port (A) 2 1.5 1.5 (80.1) (52.1) 30 22.1 28 3 10.5 12 10 R port (3 port only) 1 (P) (A) 2 3 port 12 10 1 (P) 3

Table of Contents

Metal bowl Optional specifications B B B B B N.C.: Gray N.O.: Black B B O S O S 1/4 M5 x 0.8 10 One-touch fitting Barb fitting Applicable tubing: T0604 Width across flats 17 (mm) Standard specifications Accessory specifications With pressure gauge With auto-drain Bracket mounting size Model Port size B C D A H J Q B G M P E F K K L N AC20D AC30D AC40D AC40D-06 1/8, 1/4 1/4, 3/8 1/4, 3/8,

KJ

Body size Port size M5 x 0.8 R 1/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK2P-M5M -01MS KK3P-01MS -02MS -03MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS KK2S-M5M -01MS KK3S-01MS -02MS -03MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS M5 x 0.8 R 1/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 M5 M5 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type

AC

gauge) N (Silencer) 00 M5 00 M5 01 00 01 02 00 02 03 04 Without sub-plate D M5 Without sub-plate B M5 1 8 Base mounted style Without sub-plate 1 8 1 4 2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol M5 01 02 02 03 04 04 06 10 10 12 14 20 A M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 3 Body ported style 5 1 1 1 1 4 7 1 4 1 1 2 1 9 2 2 1.15-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 0 1 VY140

Table of Contents

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT

VQZ1000/2000/3000

fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 10 M5 thread Rc 1/4 C3 C4 C6 C8 C10 M5 02 Type of actuation 2 position single (B) 2 (A) 4 1 5 (R1) 1 (P) 3 (R2) 2 position double (B) 2 (A) 4 (B) 2 (A) 4 Note) For inch size and One-touch fittings, refer to page 2-7-27. 2 1 (P) 3 (R2) 5 (R1) 5 (R1) 1 (P) 3 (R2) Metal seal Rubber seal Manual override 3 position

SQ1000/2000

SQ1441 SQ1341 (A)(B) (A)(B) (A)(B) 2 4 (A)(B) (A)(B) 2 4 (A)(B) 4 2 4 2 4 2 4 2 5 1 3 (R1) (P)(R2) 5 1 3 (R1) (P)(R2) 5 1 3 5 1 3 (R1) (P)(R2) 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) (R1)(P)(R2) Parts list Dual 3 port valve: SQ1 41 A B C No.

ZP

1 8 M5 x 0.8 M6 x 1 M8 x 1.25 Rc M6 x 1 M8 x 1 M6 x 1 M8 x 1 4 6 8 10 13 16 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 1 8 M6 x 1 M8 x 1.25 Rc 1 8 13-11-2 3 Series ZPT Vacuum Pad: Vertical Vacuum Entry without Buffer How to Order Vacuum entry port Pad dia.

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ON-flow 0.04 40 B p ipe pe 3/4 B p pi 3B 30 1 0.03 2B, pipe 20 0.02 , 5B , 4B pe 1/4 1 B pi 10 Max.