Voltage Monitor for PFMV5

Page 30 [F 4] [inP] External input [oFF] Unused Page 31 [F 5] [Eco] Power saving mode [oFF] Unused Page 36 [F 6] [Pin] Security code [oFF] Unused Page 37 [rAn] Select connected sensor [oFF] Unused [F95] Page 38 [Uni] Unit selection function [LPm] L/min [F99] [ini] Reset to the default settings [oFF] Unused Page 40 -23No.PF-OMN0005-E [F 0] Auto-preset This function is capable of calculating

Modular Type Filter Regulator Series AW

Contact P/A regarding the specifications for PSI unit and F .

IDX-OM-V024

/h) (282 m3/h) (420 m3/h) (570 m3/h) dew point Standard Outlet air condition 45oF 155SCFM 215SCFM 314SCFM 406SCFM Air flow capacity pressure (7.2oC) (264 m3/h) (366 m3/h) (534 m3/h) (690 m3/h) (ANR) dew point (Note2) Outlet air 50oF 177SCFM 251SCFM 353SCFM 459SCFM pressure (10oC) (300 m3/h) (426 m3/h) (600 m3/h) (780 m3/h) dew point Rated Inlet air pressure 100 psi (0.7MPa) condition Inlet

modular-press-e

Use the attached mounting screw (M3 x 0.5 x 14) for mounting. The mounting screw (M3 x 0.5 x 7) attached to the digital pressure switch assembly will not be required.

ZSE F/ISE

ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings

Modular F.R.L. Pressure Control Equipment

Use the attached mounting screw (M3 x 0.5 x 14) for mounting. The mounting screw (M3 x 0.5 x 7) attached to the digital pressure switch assembly will not be required.

CHKD/CHKG

Magnet With auto switch only 9 Magnet plate Stainless steel With auto switch only 10 Scraper 11 Rod seal 12 Piston seal NBR 13 Tube gasket 14 Piston gasket 269 CHKD Series Dimensions Basic type/CHKDB 2 x Rc P F with effective thread depth G F with effective thread depth G Q Q Width across flats f c R D R a b g e H E E h + Stroke C B + Stroke 4 x K through 8 x L counter bore 4 x K through

VEX1

x 0.5 (Mounting thread) 4 x 4.5 (Mounting hole) Silencer (P2) Foot F (Option) (Option: N) (Except VEX3120) Hexagonal socket M3 x 0.5 x 8 (2 pcs.)

e

x 65 + 4.35 x 150 + 0.795 x 150 + 1.0 x 150) = 139.4 mm 1 m3 Y = x (mn x yn) 1 7.025 = (0.88 x 0 + 4.35 x 0 + 0.795 x 111 + 1.0 x 210) = 42.5 mm 1 m3 Z = x (mn x zn) 1 7.025 = (0.88 x 5 + 4.35 x 42.5 + 0.795 x 42.5 + 1.0 x 42.5) = 37.8 mm 4 Calculation of Load Factor for Static Load m3: Mass m3 max (from 1 of graph MY2H / m3) = 22.5 (kg) . m3 Load factor a1 = m3 / m3 max = 7.025 / 22.5

MXW

Amount of displacement on A when the load is applied at F. Amount of displacement on A when the load is applied at F.

Air Slide Table Series MXW

Table Deflection (Reference Values) Table displacement due to pitch moment load Table displacement due to roll moment load Table displacement due to yaw moment load Amount of displacement on A when the load is applied at F. Amount of displacement on A when the load is applied at F. Amount of displacement on A when the load is applied at F.

0.55

How to Order Manifold VV5F 3 40 02 2 05 Common exhaust F Series Stations Thread type 02 Nil Series P, R port size A, B port size 2 stations Rc Symbol F N T 3 5 1/4 3/8 1/4 1/4 G VF3000 VF5000 xx 20 20 stations NPT NPTF Up to 10 stations for VV5F5. The A and B ports are made on the bottom.

180

Operating model: MHY2-16D Opening time: 0.15 s a = 40 (mm) b = 7 (mm) c = 8 (mm) d = 5 (mm) e = 10 (mm) f = 12 (mm) A part a b c B part e f d 2.

AWM20 to AWM40

Please contact SMC regarding the bowl assembly supply for PSI and F unit specifications.

AWM20 to AWM40

Please contact SMC regarding the bowl assembly supply for PSI and F unit specifications.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

case of M3 Dimensions with broken lines stand for a locking knob type.

Speed Controller: Standard Type In-line Type AS Series

Nil Metric thread (M3, M5) Rc NPT G N F Bore size Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 1/8 1/4 3/8 1/2 AS1000 AS1000 AS2000 AS2000, 3000, 4000, 5000 AS3000, 4000, 5000 AS4000, 5000 650 A AS Series Speed Controller: Standard Type In-line Type Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

KJ

(mm) <M3, M5> <M3, M5> Weight (g) Note) Model L1 L2 L3 A M D 2-applicable tubing M3 x 0.5 KJY23-M3 KJY23-M5 KJY23-01S KJY04-M3 KJY04-M5 KJY04-01S KJY06-M5 KJY06-01S 2.8 3.2 7.4 3.1 3.5 7.7 4.5 7.5 Reference dimensions after R thread installation.

Floating Joint

How to Order JA 40 F 14-150 Option Mounting type None Nil High temperature specifications 5 to 100C Nil F L Basic type Flange type Foot type Applicable bore size (mm) X11 Symbol Applicable bore size (mm) Model 6 10 15 20 30 40 63 80 100 140 160 6 10 10, 15 20 25, 32 40 50, 63 80 100 125, 140 160 Thread nominal size (Standard) Nominal thread size Applicable cylinder nominal thread size Standard

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

Table deflection due to yaw moment load Displacement at A when load is applied F Table deflection due to roll moment load Displacement at A when load is applied F A A F A F F L L L L dimension mm L dimension mm L dimension mm MXY6 MXY6 MXY6 100 100 100 MXY8 MXY8 MXY8 100 100 100 MXY12 MXY12 MXY12 140 140 140 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-