CY1F

+0.012 0 NPT1/8 G1/8 5 1 5 9.5 depth 5.4 7.5 5.5 140 RB1006X552 Note 1) When adjusting the stroke, keep the T dimension within a 0 to 2 mm range.

VXA21/22

4.3 3 0.3 4 0.5 9 VXA3245-00 230 Note 1) OAdd the V type (VXA31) 80g, (VXA32)130g.

IDX-OM-W095

5-1 5.2 . 5-2 5.2.1 . 5-2 5.2.2 . 5-2 6 . 6-1 6.1 . 6-1 6.2 . 6-4 IDFC60/70/80/90 Series IDX-OM-W095 7 . 7-1 7.1 . 7-1 7.2 GWP . 7-2 7.3 . 7-3 7.4 . 7-4 7.5 . 7-5 8 C . 8-1 8.1 . 8-1 8.2 . 8-1 9 L . 9-1 9.1 . 9-1 9.2 . 9-1 9.3 . 9-2 9.4 . 9-2 10 R . 10-1 10.1 . 10-1 10.2 . 10-1 10.3 . 10-2 11 T . 11-1 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 11.4 . 11-3 11.5

PFxx-OMS0001CN

[F 2] OUT2 OUT1 -41No.PF-OMS0001CN-A [F 3] <> [F 3] [RES][] [rES] [] [F 3] -42No.PF-OMS0001CN-A [F10] OUT1 OUT2 OUT1 OUT2 OFF <> [F10] [SUb][] [SUb] [] [F10] -43No.PF-OMS0001CN-A <> a. 500L/min =P_1 =N_1 =P1L =P1H =N1L =N1H -44No.PF-OMS0001CN-A <()> b. 9 L 3 1.5 6 3 9 L 9 F30(49 ) + 1 =0 =0 F20(47 ) 9 L 3 1.5 6 3 9 L 6 0 0 F30(49 ) + 1 = = 47 F20 -45No.PF-OMS0001CN-A

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note 1) Threaded through hole is used for the standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm stroke.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note 1) Threaded through hole is used for the

VT325

DXT083-13-1 Qty. 1 pc. VZ Hexagon socket head screw DXT083-19-1 2 pcs.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

(mm) P = Operating pressure [MPa] T 0425 T 0604 TU 0805 T 0806 1/8B T 1075 TU 1208 T 1209 1/4B TS 1612 3/8B T 1613 1/2B 3/4B 1B 4.9 4 2.5 l = Length of piping [mm] 12.6 6 4 a = Internal cross section of piping [mm ] 19.6 8 5 QC = Air consumption required for one reciprocation of rotary actuator [l (ANR)] 28.3 8 6 33.2 6.5 44.2 10 7.5 50.3 12 8 63.6 12 9 66.5 9.2 113 12 16 127 12.7 133

MHL2

MHL2-10D MHL2-10D1 MHL2-10D2 SMHL, #1 SMHL2A, #1 SMHL2A, #2 2.2-7 Wide Opening Air Gripper Series MHL2 Dimensions MHL2-16Dl 8 8 Closed J A cross view (Finger closing) 10 D C B A MHZ2 MHZJ2 42 6.45 MHQ 5 MHL2 4 5 Dimensions of auto switch mounting groove (Enlarged view) MHR MHK MHS G H 55 22.6 6.5 MHC2 0.5 10 MHT2 16.5 9 15 19 11 20.5 Width across flats 10 (4 locations) 39 19 A MHY2 (58) 25

PF2A7H.eng

Upper digits Middle digits Lower digits 50% of max. rated flow Input of Set point 2 Input of hysteresis 2 [ 0] Monitor part L display [ U_1] 9 L Unit selection function 1 [oU1_n] Reverse output [F_4] Selection of switch operation LCD display 9 m3 (9 L) 9 m3103 (9 L) 9 L FLOW SWITCH [F_5] Key-lock function [ UnL] Unlocked Indicator LED (flow rate) Indicator LED (reference condition) 50% of

Sine Rodless Cylinder Series REA

range Usable range Usable range 10 10 10 5 5 5 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 1 0 1 2 3 4 5 6 8 9 10 11 13 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 7 12 Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) 50 63 1000 1000 Recommended driving force: Fn(N) Recommended driving force: Fn(N) 500 400 500

Booster Relay Series IL100

0 Exhaust portr Adjusting springe Upper diaphragmw Upper diaphragm chamberq SIG Lower diaphragmy Lower diaphragm chambert OUT IN1 Springo Valvei Pistonu IN2 56 Series IL201/211/220 Construction 2 12 IL211 IL201 1 r r e t e !2 !2 u t u w w i !9 i !9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !

CYP

n = 1 + 2 + 3 1 Load factor n 1 = m/mmax Item Note Review m mmax is the maximum load mass 1. Max. load mass 2 = M/Mmax Review M1, M2, M3 Mmax is the allowable moment 2. Static moment 3 = Me/Memax Review Me1, Me3 Memax is the allowable moment 3.

CYPSeries

n = 1 + 2 + 3 1 Load factor n 1 = m/mmax Note Item Review m mmax is the maximum load mass 1. Max. load mass 2 = M/Mmax Review M1, M2, M3 Mmax is the allowable moment 2. Static moment 3 = Me/Memax Review Me1, Me3 Memax is the allowable moment 3.

CYPSeries

n = 1 + 2 + 3 1 Load factor n 1 = m/mmax Note Item Review m mmax is the maximum load mass 1. Max. load mass 2 = M/Mmax Review M1, M2, M3 Mmax is the allowable moment 2. Static moment 3 = Me/Memax Review Me1, Me3 Memax is the allowable moment 3.

33

pc., Operation Manual (for installation/operation) 1 Weight Note 9) kg 32 For option -T: 39 Note 1) It should have no condensation.

MHS

19 31 55 88 140 251 1 N 12 21 35 61 97 153 268 mm 4 4 6 8 8 12 16 g 66 110 154 300 390 590 1,095 1) 1625 L=20mm 3263 L=30mm 0.5MPa 4 MHSJ3 MHSJ316D MHSJ320D MHSJ325D MHSJ332D MHSJ340D MHSJ350D MHSJ363D MHSJ380D mm 16 20 25 32 40 50 63 80 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 30 9 21 36 62 97 155 280 400 1 N 16 28 47 82 130 204 359 525 mm 4 4 6 8 8 12 16 20 g 95 150 230 440

Vacuum Equipment

Selection Step 1. Pad selection 1-A Theoretical lifting force 1-B Calculation method: Pad diameter 2.

Heavy Duty Stopper Cylinder

9 !5 u o !4 t #8 @2 @1 y q #9 $0 Single acting (TL, TM) Double acting spring type (BL, BM) !0 r #7 @5 !1 !

Micro Mechanical Valve Series VM1000

N F.O.F. 2 x 1 8 3 x 1 4 P.T.