CY1F

Maintenance and Replacement Caution Caution Replacement of actuator Replacement of shock absorber 1. The actuator (cylinder) of series CY1F can be replaced. Refer to "Replacement Actuator (Cylinder)" on page 11 about how to order . 2.

PFxx-OMS0001CN

) 050 5500 L/min 101000 L/min 202000 L/min 5525 L/min 101050 L/min 202100 L/min 0999,999,990 L 1 L/min 10 L (50 msec.) 1 L/pulse 10 L/pulse 1 2 5 00.8MPa 1.2MPa 2 5F.S.(00.8 MPa0.6 MPa ) DC1224 V10 P-P10 55 mA 3F.S. 3F.S. 1F.S.(0.05S 2F.S.) 5F.S.(050 25 ) NPN PNP 80 mA (NPN) DC28 V () NPN 1 V (80 mA ) PNP 1.5 V (80 mA ) 3 0.05 0.1 0.5 1 2 4 0 -66No.PF-OMS0001CN-A PFMC7501

PSxx-OMT0001CN

1 6 2 1 3 G1/8 G1/8 3 7 NPN2 PNP2 A B 4 L 7 5 SI N 1 2 3 1 2 3 4 5 6 S 6 7 8 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101 1 2 2 -8No.PS-OMT0001CN-E 2 B 2 F 0.010.03mm 0.020.15mm 0.050.30mm G H DC24V AC100V AC110V 10 1 10 2 Rc1/8 4 1 C 2 6 10 N 3 10 0.4MPaMPa 0 G1/8 F G1/8 3 1 11 0.4MPaMPa 0.2MPaMPa 0.2MPaMPa 2 3 C Rc1/4 F 12 G1/4 4

VXA21/22

VXA22 , , 18 21 9 10.5 40 45 21 27 55 62 64 71 11 13 36 46 46 56 11.5 Dimensions (Orifice Size: 8 mm, 10 mm) VXA225/VXA226 Thread fixed: (VXA2262 0-04 only) 2-M5 x 0.8 depth 8 Dimension of view from A Pilot port Port size P Rc , With bracket E Port size View from A Model A B C D VXA22 52 60 02 03 VXA226 -04 2 0 1 4 3 8 22 28 11 14.5 67 73 77 83 27 30 1 2 Fixing with thread is also possible

Parallel Type Air Gripper

Internal C 13 38 57 83 161 267 gripping force Open/close stroke (Both sides (mm) 4 6 10 14 22 30 230 420 715 1,275 Note 2) Weight (g) D 55 115 SC 235 425 760 1,370 Note 1) Values based on pressure of 0.5 MPa, gripping point L=20 mm, at center of stroke. Note 2) Values excluding weight of auto switch. 4 - 2. Operating method or operation 2-1. Design precautions Warning 1.

MHx-OMU0057

: *2) 1. 2. 3. 1. 2. 3. 4. 2 - / *3) 1 1.5 *3)1 1 () 3 - 1 1-1. 1)0.5MPa L = 20mm MHZ2-10* MHZ2-16* MHZ2-20* MHZ2-25* MHZ2-32* MHZ2-40* mm 10 16 20 25 32 40 D 0.20.7 0.10.7 MPa S 0.350.7 0.250.7 C oC -1060 mm 0.01 0.02 c.p.m. 180 60 D 11 34 42 65 158 254 1 N 17 45 66 104 193 318 S 7.1 27 33 45 131 217 C 13 38 57 83 161 267 mm 4 6 10 14 22 30 2 g D 55 115 230 420

Pressure Control Equipment

San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 14-4-11 Miniature regulator ARJ310 Small, compact Allows smaller mounting pitch Bracket Pressure gauge M5 0.2 to 0.7 1 8 / to 2 1 4 Pilot operated regulator AR425-925 AR435-935 Compact manifold regulator ARM10/11 / 14-4-15 Internal pilot type Relieving type Bracket Pressure

3 Port Air Operated Valve VPA3145/3165/3185 Series

C[dm3/(sbar)] C[dm3/(sbar)] 1(IN), 2(OUT) 3(EXH) b Cv b Cv 19 0.43 5.5 18 0.47 5.4 23 0.32 6.2 42 0.39 5.8 28 0.36 7.6 26 0.35 7.0 1.0 3 8 1 2 3 4 VPA3145 3 4 SYA SYJA Port size Effective area (mm2) Valve model Weight (kg) 12(INOUT) 23(OUTEXH) 1(IN), 2(OUT) 3(EXH) VZA 3 4 1 230 280 280 310 310 330 570 650 650 670 650 670 2 2 1.5 VPA3165 11 4 VFA 11 4 11 4 11 2 VFRA VPA3185 2.3 VPA4 SYJA Dimensions

ML1

1 !2 !3 !4 !5 !6 !7 !8 !

Serial Network

Built with two self-diagnostic features: 1. Over-current protection of input blocks (mechanical fuse) 2.

MXU

For details, refer to page 8-30-31. 8-3-11

MXU

For details, refer to page 8-30-31. 8-3-11

air-filter-e

FGF-BT02 4 Element Polyester Element 4 Polyester 1 AL-26S AL-26S V-band 5 FGF-BA01 Stainless steel NBR Legs assembly (with bolt, nut, flat washer) AL-27S 1 AL-27S FGF-OP01 FGF-OP01 (Set) FGF1 6 1 Carbon steel O-ring 11 1 AL-23S AL-23S FGFS1 FGFL1 1 1 NBR FKM FGF-KT01 FGF-KT02 FGF-KT01 FGF-KT02 FKM O-ring 7 1 AL-24S AL-24S FGF-KT03 FGF-KT03 (Set) Polypropylene/ NBR FGFS1 1 Holder assembly

Air Preparation Equipment

FGF-BT02 4 Element Polyester Element 4 Polyester 1 AL-26S AL-26S V-band 5 FGF-BA01 Stainless steel NBR Legs assembly (with bolt, nut, flat washer) AL-27S 1 AL-27S FGF-OP01 FGF-OP01 (Set) FGF1 6 1 Carbon steel O-ring 11 1 AL-23S AL-23S FGFS1 FGFL1 1 1 NBR FKM FGF-KT01 FGF-KT02 FGF-KT01 FGF-KT02 FKM O-ring 7 1 AL-24S AL-24S FGF-KT03 FGF-KT03 (Set) Polypropylene/ NBR FGFS1 1 Holder assembly

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

75 95 65 110 150 85 135 185 SUP VAC EXH 28 28 33 66 11 12 16 27 43 55 95 ZH ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 1 8 1 8 Box type (Built-in silencer) 0.7 1.0 1.3 0.5 0.7 88 48 1 4 1 8 ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 8

Process Valve

-40A VNA7-50A 1 8 1 4 1 4 1 4 1 105 120 140 77 96 113 53 60 74 26.5 30 37 120.5 137 160 20 24 24 129.5 147 170 170.1 187.6 210.6 211.5 229 252 55 63 74 1 2 1 2 564 A VNA Series Process Valve: 2 Port Valve For Compressed Air and Air-hydro Circuit Control How to Order Pilot Solenoid Valves Valve size 1/2/3/4 Valve size 5/6/7 SF4 5 D 23 Q VO307 5 D 1 Q CE-compliant CE-compliant Coil rated voltage

AR Series Modular Type Regulator

16 25 47.4 11 12.5 M18 x 1 12.5 26 26 25 28 30 4.5 6.5 40 2 18 18.5 AR20-A 1/8, 1/4 1/8 40 67.4 23.5 22 M36 x 1.5 22 37.5 58.5 37.5 59.5 30 34 43.9 5.4 15.4 55 2.3 27.3 36.5 17.5 6 AR25-A 1/4, 3/8 1/8 53 70.4 23.5 22 M36 x 1.5 22 37.5 58.5 37.5 59.5 30 34 44.3 5.4 15.4 55 2.3 30.3 36.5 17.5 6 AR30-A 1/4, 3/8 1/8 53 83.5 27 28.5 M45 x 1.5 28.5 37.5 65 37.5 66 41 36 46 6.5 24 65 2.3 32.5

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

C D F J K ARP20(K) 1021 1021 1021 2 Note 2) 40 1/8 98 27 28.5 M28 x 1 28.5 1/8, 1/4 ARP30(K) 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 ARP40(K) 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

C D F J K ARP20(K) 1021 1021 1021 2 Note 2) 40 1/8 98 27 28.5 M28 x 1 28.5 1/8, 1/4 ARP30(K) 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 ARP40(K) 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Dimensions inch (mm) AK3652 & 4652 1.50 (38) 2.17 (55) 2 x Compression 2 x R, NPT male 2 x Rc, NPT female 0.44 (11.2) B B A A A Connections: 4T, 6T Connections: N, BRN Connections: 4, 6, BR 4 6 4 6 4 6 25.4 45 Ports A B Connections inch (mm) inch (mm) 4T 2.56 (65.0) 1.12 sq. (28.4) 1/4 inch compression 4BR 1.70 (43.2) Rc 1/4 4BRN 2.32 (58.9) 1.12 sq. (28.4) R 1/4 4 1.70 (43.2) NPT 1/4