Slide Unit Series CX2/CXWM/CXWL

A80H E76A E73A E80A 3-wire (NPN equivalent) A72 A73 A80 A73C A80C 5 V 12 V 200 V 100 V IC circuit 10 16 20 25 32 16 20 25 32 Grommet CXS Relay, PLC 5 V, 12 V 12 V 100 V or less IC circuit 2-wire 24 V Connector 5 V, 12 V 5 V 12 V 24 V or less 100 V IC circuit 10 3-wire (NPN equivalent) DGrommet Relay, PLC 24 V 2-wire 5 V, 12 V 100 V or less IC circuit -X Solid state auto switches

MHK2

-12S 90 12 9 11 9 20 105 Normally open Normally closed MHKL2-16S 16 17 14 14.6 28.6 165 MHKL2-20S 20 32 18 16 34 314 MHKL2-25S 25 53 22 19 41 565 MHKL2-12C 12 11 11 9 20 105 L1 MHKL2-16C 16 22 14 14.6 28.6 166 L2 MHKL2-20C 20 40 18 16 34 314 MHKL2-25C 25 63 22 19 41 565 Note) At the pressure of 0.5 MPa, when gripping point L is 20 mm.

MHK2

-12S 90 12 9 11 9 20 105 Normally open Normally closed MHKL2-16S 16 17 14 14.6 28.6 165 MHKL2-20S 20 32 18 16 34 314 MHKL2-25S 25 53 22 19 41 565 MHKL2-12C 12 11 11 9 20 105 L1 MHKL2-16C 16 22 14 14.6 28.6 166 L2 MHKL2-20C 20 40 18 16 34 314 MHKL2-25C 25 63 22 19 41 565 Note) At the pressure of 0.5 MPa, when gripping point L is 20 mm.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Valve model Port size VCW2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCW4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCW Dimensions (

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

state switch Relay, PLC 24 V 12 V Grommet Yes Water resistant (2-color indication) IC circuit 5 V, 12 V 12 V Auto switches marked with a symbol are produced upon receipt of order.

CG1

Standard stroke range (mm) Long stroke range (mm) Bore (mm) TC GB GA F E AL TB C D B1 ZZ A H H1 I J K KA MM NA P S TA WA WB W WH 30 12 12 12 13 14 14 20 20 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 14 11 11 20 25 32 40 50 63 80 100 8 10 12 16 20 20 25 30 18 22 22 30 35 35 40 40 15.5 13 17 17 19 27 27 32 41 10 (12) 35 5 6 6 8 11 11 13 16 26 31 38 47 58 72 89 M4 X 0.7 Depth 7 5 6 8 10 14 18 18

CXWM/CXWL

V Yes 24 V Connector 3-wire (NPN equivalent) IC circuit 10 5 V Grommet 2-wire 24 V Relay, PLC 100 V 12 V F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 10 16 20 25 32 3-wire (NPN) 3-wire (PNP) 24 V IC circuit 16 20 25 32 5 V, 12 V Diagnostic indication (2-color indication) Yes Relay, PLC F7PW J79W F7BA Water resistant

JXCx-OMU0004

6 24 12 6 *20%F.S.

Wedge Cam Operation Gripper Series MHK2

S O 3 20 4 16 12 0 -0.05 6 12 8 Note) When single acting, other port is used as bleed port. 23 M5 X 0.8 (Finger opening port) 2.3 MHKL2-25 /Long stroke model 4H9 4 deep +0.030 0 22 26H9 1.5 deep +0.052 0 2-M6 X 1 thread 12 deep 30 2-M6 X 1 thread 10 deep 5 17.5 20 0.02 4-M6 X 1 12 deep Bottom hole dia. 5.1 through-hole 0 -0.1 10 Open 41 +1.2 0 81.6 40 84 56 36 0 -0.2 22 4H9 4 deep +0.030

Electric Rotary Table

Note 5) For step data input, up to 12 controllers connectable.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

port S99 Heavy-duty cord 3-wire (NPN) Yes Yes Yes Yes No No Change threaded hole to through-hole S99V 5 V, 12 V For 10 and 15 Change the screw position S9P Relay, PLC 3-wire (PNP) IC circuit 24 V Grommet Change rotation range S9PV Change rotation range between 0 and 200 90 5 V, 12 V 5 V, 12 V, 24 V Parallel cord Change rotation range between 0 and 110 5 V, 12 V, 100 V 5 V, 12 V, 24 V, 100

Compact Cylinder with Lock Series CLQ

Load voltage Auto switch model Perpendicular Lead wire length (m) 0.5 (Nil) Indicator light Wiring (Output) Applicable load Pre-wired connector 1 (M) Type Special function Electrical entry In-line 3 (L) 5 (Z) None (N) AC DC 32 to 100 20, 25 40 to 100 20, 25 32 M9N M9P M9B M9NV M9PV M9BV 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC circuit Grommet 2-wire 12V 5 V, 12 V 12 V 5 V, 12 V 12 V Solid

Wedge Cam Operation Provides

17 MHKL2-20S 314 34 16 18 20 32 MHKL2-25S 565 41 19 22 25 53 L1 Single acting MHKL2-12C 105 20 9 11 12 11 L2 MHKL2-16C 166 28.6 14.6 14 16 22 MHKL2-20C 314 34 16 18 20 40 MHKL2-25C 565 41 19 22 25 63 Note) At the pressure of 0.5MPa , when holding point L is 20mm.

HRX-OM-S004

4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Circulating fluid temperature [oC] 50Hz 60Hz Fig. 8-6 Cooling capacity(HRS150-A-20/40/46/46-) 8.4 Cooling capacity HRS Series 8-12 HRX-OM-S004 Chapter 8 Documents : Facility water temperature 32 oC 8.4.3 HRS100-W-20/40/46: Facility water temperature 40 oC 14 14 12 12 10 10 Cooling capacity [kW] Cooling

HRX-OM-T002

AL45 Compressor over current *12 AL47 Pump over current AL50 Incorrect phase error AL51 Phase board over current *12: Water-cooled type model does not generate this alarm.

HRX-OM-Q026

Threshold for alarm generation generation and other settings Code Alarm name A.RUN P.RUN A.STP Display Default Settable OFF Display range AL39 Internal unit fan stoppage Set time AL40 Dust-proof filter maintenance 500 h 1 to 9 h 12 AL41 Power stoppage AL42 Compressor standby AL43 12 Fan breaker trip AL44 12 Fan inverter error AL45 Compressor breaker trip 13 AL46 Compressor inverter error

Mist Separator Regulator

Plug Assembly Replacement 37 12. Disassembly Drawing 38-39 13. Dimensions 40-41 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Ｍ icro Mist Separator Regulator

Disassembly Drawing of the Pressure Gauge Port [Applicable model: without pressure gauge / with pressure gauge (round type)] (12) Plug assembly (12) Plug assembly (3) Pressure gauge (round type) Micro mist separator regulator 12-3.

Thermo-chiller/Rack Mount Type

, Ion exchange resin*12 Temperature range [C] 5 to 40 Pressure range [MPa] 0.3 to 0.5 Required flow rate (50/60 Hz)13 [L/min] 8 12 Facility water system Inlet-outlet pressure differential of facility water [MPa] 0.3 or more Port size Rc3/8 Fluid contact material Stainless steel, Copper (Heat exchanger brazing), Bronze, Synthetic rubber Power supply Single-phase 100 VAC (50/60 Hz), 115 VAC

NCQ8

Solid state switch Reed switch Yes 5 V A96V A96 Grommet A90V A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV A90 A93 M9N M9P M9B F9NW F9PW F9BW F9BA 100 V 5 V, 12 V 12 V IC circuit Relay, PLC No 2-wire 24 V Yes 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC circuit Grommet 12 V Relay, PLC Yes IC circuit Diagnostic indication (2-color display) 5 V, 12 V Grommet 12 V 2-wire