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text FloW sensor Initial value is indicated as 8-digit. 16 octets fixed character string 0x0015 (21) 0 R Serial number Example: "x" (22) 0 R Hardware version HW-Vx.y x: Large revision number y: Small revision number 0x0016 (23) 0 R Software version FW-Vx.y x: Large revision number y: Small revision number 0x0017 (36) 0 R Device status parameter Refer to "Device state parameters" on page 41

[] 14096 X (1) ()1 ()1 11 800 1 (2) ()1 ()2 1600 1 (3) ()2 ()1 400 1 ()1 ()1 0 1 4097 4096 1 2 1 [] 1 LEY16C-300 2.5mm 1/1 2 LEY16B-300 5mm 25/50 3 LEY16A-300 10mm 25/100 14096 X 12 1 800 2.5mm 2 3 =1 /2 3 =2.5mm/5mm (2.5mm/10mm) =25/50 (25/100) 1) 50 No.SFOD-OMT0009CN-B 7.3 XX X 1CW X 1 2 2CCW 1 XX 1 2 2 1) XX 1) XX 1) XX 0 XX 02 1a 2b 21 1)

CN5I/O . 23 6.1 . 23 6.2 (NPNPNP ) . 23 (1) I/O (NPNPNP ) . 23 (2) I/O . 23 6.3 . 24 6.4 I/O . 27 7. . 28 7.1 . 28 7.2 . 31 7.3 . 33 8. . 34 8.1 . 34 8.2 . 34 8.3 . 35 (1) . 35 (2) (). 35 (3) . 35 8.4 . 36 8.5 . 36 9. (). 37 9.1 . 37 9.2 . 38 10. . 39 10.1 . 39 10.2 I/O . 39 (1) . 39 (2) . 40 (3) . 41 (4) HOLD. 42 (5) . 42 2 - 6 . 42 (7) . 43 11. . 44 11.1 . 44 11.2 (). 45 11.3 I/O . 46 11.4

CN5I/O .23 6.1 /.23 6.2 /(NPNPNP ).23 (1) I/O (NPNPNP ).23 (2) I/O .23 63 /.24 64 I/O .27 7 .28 71 .28 72 .31 73 .33 8 .34 81 .34 82 .34 83 .35 1 .35 2 (.35 3 .35 84 .36 85 .36 9 .37 91 .37 92 .38 10 .39 101 .39 102 I/O .39 1 .39 2 .40 3 .41 4 HOLD.42 5 .42 2 - 6 .42 7 .43 11 .44 111 [5m ].44 112 [820m].44 113 [5m ].45 114 [820m] .45 115 I/O .46 116 .46 117 .47 12. .48 12.1 .48 12.2 .49 13

Specifications 41 Dimensions 43 Accessories 46 -1No.EX-OME0015-F Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Refer to page 66 for part numbers. 37 41 Non-standard Motor 10mm/6mm lead Series LTF6 Motor Output Rolled Ball Screw 100W Horizontal Mount How to Order Motor/switch entry direction Stroke E LTF6 NF 1 G X10 Left entry Power supply voltage Motor specification Switch specifications Right entry Matsushita Electric Industrial Co., Ltd.

Stroke F(N) F(N) 9 15 105 110 115 14 120 125 130 8 13 140 150 175 7 12 5 200 11 Number of auto switches mounted Rotation Linear motion 2 0 0 1 0S 02 S0 S2 SS 1 20 n0 2 2S nS n2 n Combinations of made to order products No.1 to 4 are available. Consult SMC for further information. 1.5-19

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Body ported Series CJ2 Series CM2 Series MB, CA1 T0425 x 1 m Tube bore x Length VQ0149-C4 Speed controller AS2001F-04 AN103-X233 Silencer Tube bore x Length T0604 x 1 m 30 41 VQ11 -C6 Speed controller AS3001F-06 Silencer AN103-X233 T0806 x 1 m Tube bore x Length VQ2149-C8 Speed controller AS3001F-08 Silencer AN200-KM8

Basic style Width across flats 3.5 23 9 4.5 4.5 MXH MXU 6.5 3.5 2 x M3 x 0.5 (Port size) MXS 2 x M3 x 0.5 MXQ (Port size for axial piping type MTS8-P) 0.2 2 x M3 x 0.5, effective length 5 9 5 MXF +0.035 +0.025 4 MXW 22 12 16 MXJ M2.5 x 0.45 12 41 + Stroke MXP 53 + Stroke 9 15 MXY MTS 0.2 9 4 x M3 x 0.5, effective length 5 10 15 Rod end male thread Width across flats 3.5 +0.035 +0.025 4 M3

VNB 02, 12 (N.O.) In contrast wth the N.C., when the power to the pilot solenoid valve is turned off (or when air is exhausted from the P2 port of the air operated style), the valve is held open by the return spring. When the pilot solenoid valve is energized (or when pressurized air enters through the P2 port of the air operated style), the valve element closes. VNB 03 (C.O.)

The dried air flows lo the outlet port, Exhaust Input Wet Air Fig, 4.11 Principle of the Adsorption Air Dryer Between 10-20% of the dry air passes through orifice 02 and column 2 in reverse direction to re-adsorb moisture trom the desiccant to rgenerate it, The dry air enters the saturated chamber and expands (dropping the temperature furthr, making the dry air ffectively even more dry to

Terminal no. 16 16 43 43 Length indication label Length indication label 10 11 19 10 9 2 1 2 1 20 SMC SMC 33.4 33.4 030 015 41 41 25 Approx. 10 Approx. 10 17 8 18 8 7 6 14 26 15 9 2 x M2.6 x 0.45 For N, 2 x No. 4-40 UNC For N, 2 x No. 4-40 UNC 2 x M2.6 x 0.45 Socket section Socket section D-sub Connector Cable Assembly D-sub Connector Cable Assembly Cable length L Assembly part no.

with light/surge voltage supressor Valve size 1 to 7 358 Series VNA Process Valve: 2 Port Valve For Compressed Air and Air-hydro Circuit Control Model Flow characteristics Measured by air Measured by water Note) Mass (kg) Orifice diameter (mm) Air operated Model Port size Rc Cv Av x 10-6 m2 b External pilot solenoid C [dm3/ (barsec) ] VNA1-6A VNA1-8A 1 8 1 4 10 0.88 1.5 1.9 3.8 4.8 7.5 25 41

LVC Refer to pages 17-3-40 and 17-3-41 for specifications and models.

Changing PD06 from 002B to 0006 0 6 -41- (2) Symbol allocation using the setup software: Changing pins CN6-2 from Proximity dog (DOG) to Clear (CR). Change PD06 from 002B to 0006 in the I/O settings tab. Click on the "Single Axis Write" button. Cycle the power off, then on for the parametersto be enabled. 002B 0006 Please allocate pins CN6-2 separately.

Acceleration/de celeration time 0 to 50 ms Set the time until the servo motor reaches/stops to the rated speed (3000 r/min). -41- 5.5 Changing I/O Signal Allocation Input/output signal assignment can be changed as appropriate from initial settings. There may be cases when changes to the Input/output signal assignment are required for actuator operation.

64 76 10 00 Spain (34) 945-18 41 00 Belgium (32) 3-355 14 64 Netherlands (31) 20-531 8 Germany (49) 6103 4020 Sweden (46) 8-603 12 00 (420) 5-414 24611 Norway (47) 67 12 90 20 Austria (43) 2262-62 280 Italy (39) 02-927 11 Fig.2-1 P-clip Fig.2-2 U-clip Fig.2-3 Soldering Country Telephone Country Telephone *Websites Kingdom Ireland (351) 1-403 9000 United SMC Corporation www.smcworld.com SMC

The dried air flows lo the outlet port, Exhaust Input Wet Air Fig, 4.11 Principle of the Adsorption Air Dryer Between 10-20% of the dry air passes through orifice 02 and column 2 in reverse direction to re-adsorb moisture trom the desiccant to rgenerate it, The dry air enters the saturated chamber and expands (dropping the temperature furthr, making the dry air ffectively even more dry to

CD-MU02 Model MLU25 MLU32 MLU40 MLU50 Model MLU25 MLU32 MLU40 MLU50 Z 142.5 159 171 205.5 LX RR 8.5 10 11 16 LD LU 11 14 15 20 LC 16 18 20 28 Z LB 27 31 36 46 LB 27 31 36 46 LX RR 8 10 10 16 LA 35.5 41 47 62 ZZ 151 169 182 221.5 L 52.5 59 67 81 LA 35 41 46 62 LD LU 13 14 17 23 ZZ L 52.5 59 67 81 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 The L, Z and ZZ dimensions are reference dimensions when

CD-MU02 Z 142.5 159 171 205.5 LX RR 8.5 10 11 16 LD LU 11 14 15 20 LC 16 18 20 28 Z LB 27 31 36 46 LB 27 31 36 46 LX RR 8 10 10 16 LA 35.5 41 47 62 ZZ 151 169 182 221.5 L 52.5 59 67 81 LA 35 41 46 62 LD LU 13 14 17 23 ZZ L 52.5 59 67 81 Model MLU25 MLU32 MLU40 MLU50 Model MLU25 MLU32 MLU40 MLU50 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 The L, Z and ZZ dimensions are reference dimensions when