VHK

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

, 1/8 M5 1 (IN) port 1 (IN) port M5, 1/8 M5 2 (OUT) port 2 (OUT) port 15 2-M2.5 x 0.45 Thread depth 3.5 2-M3 x 0.5 Thread depth 5 VDW31 36 (27.6) Lead wire l approx. 300 SMC SMC 30 40 1 1 Rectifying device AC type 45 25 34 28 Bracket assembly part number.

Vacuum Gripper

4.7 8.0 12 18 29 48 [kPa] -55 2.7 4.3 7.3 11 17 27 44 -50 2.5 3.9 6.7 10 15 24 40 -45 2.2 3.5 6.0 9.0 14 22 36 -40 2.0 3.1 5.3 8.0 12 19 32 -10No.

REC

1.5 32 159 9 10 40 40 60 40 217 150 to 1000 22 51 M32 X 2 40 181 10 11 53 53 77 44.5 247 200 to 1000 26.5 CC REC T/Rear trunnion H2 TDe9-0.025 -0.061 2-Rc(PT)P 2-NN G Relieving port Relieving port Width across flats B1 Relieving port M5 X 0.8 G Standard port Standard port H1 I 2-Eh8 TY D MM AL lNA TT K A TX TZ N N F S+Stroke H 40 Z+Stroke ZZ+Stroke (mm) 32 H1 H2 I K MM A AL B1 D F G H E Bore

PSE530/200

Specifications Model PSE530-M5 PSE531-M5 101 to 101 kPa PSE532-M5 PSE533-M5 Rated pressure range 0 to 1 MPa 0 to 101 kPa 0 to 101 kPa Proof pressure 1.5 MPa 500kPa Air/Non-corrosive gas Fluid 12 to 24 VDC (Ripple 10% or less) Power supply voltage Current consumption 15 mA or less Output specification Analog output (1 to 5 V, Output impedance: Approx. 1 k) Accuracy 2% F .S. or less (Within

Series VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Model Grommet: G Conduit: C Conduit terminal: T Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

Air Cylinder Series CA2

surfaces and same surface) 1 85 90 95 D-M9 D-M9W (n 2) 2 15 80 CM2 80 + 40 (n 4) 2 (n = 4, 8, 12, 16) 85 + 40 (n 4) 2 (n = 4, 8, 12, 16) 90 + 40 (n 4) 2 95 + 40 (n 4) 2 (n = 4, 8, 12, 16) 15 + 40 n (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) CG1 2 (Different surfaces and same surface) 1 60 65 70 D-M9V D-M9WV (n 2) 2 55 10 MB 55 + 30 (n 4) 2 (n = 4, 8, 12, 16) 60 + 30 (n 4) 2 (n = 4, 8, 12, 16) 65

CM2

6 15 8 9 13 17.5 11.5 27 40 40 40 203 75 28 4 50 40 40 8 15 11 9 16 21.5 15 32.5 6-4-20 21 Series CM2 Accessory Bracket Dimensions Single Knuckle Joint Single Knuckle Joint I-020B/032B Material: Rolled steel I-040B Material: Free cutting sulfur steel Y (Max.)

CA2

up to 500 20 to 500 30 27 22 44 16 32 10 12 42 100 15 8 M8 x 1.25 71 60 80 60 9.0 50 up to 600 20 to 600 35 32 27 52 20 40 10 12 50 110 17 11 M8 x 1.25 81 70 90 70 9.0 63 up to 600 20 to 600 35 32 27 64 20 40 10 15 59 130 17 11 M10 x 1.25 101 86 105 85 11.5 80 up to 750 20 to 750 40 37 32 78 25 52 14 18 76 160 21 13 M12 x 1.75 119 102 130 102 13.5 100 up to 750 20 to 750 40 37 41 92 30 52

CM2

G LD WB P LF Q LG LH LP LT LV LY LZ 20 20 20 17.5 13 8 6.8 8.5 6 15 23 30 30 37 3.2 18.4 59 152 25 25 25 17.5 13 8 6.8 10.5 6 15 26 30 30 37 3.2 18.4 59 156 32 32 32 17.5 13 8 9 11.5 6 15 28.5 40 40 50 4 28 75 174 40 40 40 21.5 16 11 9 15 8 15 32.5 40 40 50 4 28 75 203 Integrated clevis Built-in One-touch fitting CM2E20SCM220A, #10 SCM220A, #10, #19 CM2E25SCM225A, #10 SCM225A, #10, #19 CM2E32SCM232A

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

M5 thread With 3.2 One-touch fittings With 4 One-touch fittings With 6 One-touch fittings M5 thread 2(B) (A)4 Side ported 5 (R1)5 1 (P) 3(R2) Note) For double solenoid specification, the function symbol below is D.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

x 0.8 depth 5 6.4 Piping port R, NPT 1/4 18.35 3.5 12.4 7 7.8 25.1 2.5 10.7 2.6 8.45 10.1 12.4 30 15.2 14.5 22 Piping port G 1/4 Piping port G 7 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 Dimensions Bracket A A 30 20 20 45 55 4.5 11.5 40 15 4.5 6.5 1.6 20 41.5 ZS-24-A Bracket A View A Bracket D A 30 20 20 45 55 4.2 4.5 40 11.5 15 7.2 7.5 1.6 41.5 35 22

Vacuum Gripper

4.7 8.0 12 18 29 48 [kPa] -55 2.7 4.3 7.3 11 17 27 44 -50 2.5 3.9 6.7 10 15 24 40 -45 2.2 3.5 6.0 9.0 14 22 36 -40 2.0 3.1 5.3 8.0 12 19 32 -10No.

Quick Exhaust Valve Series AQ

1 Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Weight (g) Model IN OUT OUT EXH M5 x 0.8 AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 2 4 25 35 40 60 105 135 2.8 5.8 25 40 42 70 115 180 25 45 110 105 215 205 690 650 1 8 1 8 1 4

High Vacuum Angle Valve

Heater: 15 Aluminum High Vacuum Angle Valve XLG Series Dimensions XLG: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLG-16-2 40 108 38 20 30 17 44 19 XLG-25-2

ZSE F/ISE

15 PS 4.5 Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6.5 1.6 ZSP 20 41.5 ZS-24-A Bracket A View A ISA2 IS Bracket D ZSM A PF2 30 20 IF Data 20 45 55 4.2 4.5 40 11.5 15 7.2 7.5 1.6 41.5 35 22 ZS-24-D Bracket D View A Cutting dimensions for panel mounting

e-Rodless Actuator

(A clearance of 40 or more is required.) (60) (74.7) 101.7 60 (40) 80 40 74.7 27 27 4H7 depth 5 Motor 72 43.5 50 42 60 102 102 50.4 40 5 5.1 40 3.5 40 Long hole depth 5 Controller 4 15.5 6 7.2 5.6 (Max. 8.6) 14.4 6.5 4H7 2-6.5 counterbore depth 3.3 28 (60.3) 87.3 2 x 2-3.3 through hole 4 152 + Stroke 4-M4 x 0.7 depth 7 FG terminal M3 T-slot section for mounting I/O cable (9 wires) 5.8 3.5

rep-modular-e

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

Free-Mounting Cylinder with Air Cushion Series CU

mm) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard strokes 20 25 32 M5 x 0.8 with depth 8 M5 x 0.8 with depth 8 M6 x 1.0 with depth 9 9.3 with depth 8 9.3 with depth 9 11 with