EtherNet/IP TM Compatible Fieldbus System

(M3 thread) (It is recommended to ground with resistance of 100 ohms or less) Accessories Hexagon socket head cap screw (M3 x 30): 2 pcs. Connects the SI unit and the valve manifold. Seal cap: 1 pc.

Air cylinder

Port (3) Rod seal (2) Seal retainer (1) Retaining ring Fig. 5 Replacement of rod seal 19 - 3-2.

VP300/500/700

Remove pilot valve mounting screws (M3, 2 pcs.), rotate the pilot valve at 180 and then re-tighten the valve with the screw.

Magnetically Coupled

The mounting dimensions (in the drawing below) are identical with those of existing NCY2B series, allowing easy replacement. ( For bore size of 6(1/4"), the mounting is not directly interchangeable with the NCY2B series because the piping port has been reduced to a M3 size.)

PF2D

Real-time switch output ( ) Unit switching Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ZSE ISE ON YES OFF P-1 P-2 GPM gal (US) PSE Real-time flow rate GPM = gal (US)/min P Window comparator mode H: Hysteresis Z I SE3 Note) Fixed SI unit (l/min, l, m3 or m3 x 10) will be set for the type without the unit switching function.

3

Unit Note 9) Instantaneous flow L/min, cfm (ft3/min) Accumulated flow L, ft3 Displayable range Instantaneous flow 25 to 525 L/min (Displays [0] when value is within 4 to 4 L/min range.) 50 to 1050 L/min (Displays [0] when value is within 9 to 9 L/min range.) 100 to 2100 L/min (Displays [0] when value is within 19 to 19 L/min range.)

PSE530/200

Never use pressure sensors in the presence of inflammable or explosive gases. 16-3-19 19 Series PSE Specific Product Precautions 2 Be sure to read before handling.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

1 Stainless steel M4 x 0.7 x 8 Cross-recessed head cap screw Cross-recessed head cap screw Steel wire M4 x 0.7 x 8 M3 x 0.5 x 6 !0 !2 NBR 14284 O-ring 143021 !1 15-9-41 Dimensions AS2000E/3000E 2-port size L7 Max. Min.

ZQ-OM01401

ZQ-OM01401-B / / ZQA No.ZQ-OM01401-B 2 1. 5 2. 9 3. 11 3.1. 11 3.2. 12 3.3. 13 3.4. 14 3.5. 16 4. 17 5. 19 6. 20 7. 21 8. 28 9. 32 10. 35 11. 37 12. 40 13. 42 1 - No.ZQ-OM01401-B /ZQA *1) *2) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery

ZL3-OM00601

(mg/m3) 0.1 d 0.5 0.5 d 1.0 1.0 d 5.0 point() 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 Not specified 90,000 1,000 3 -20 3 1 4 Not specified Not specified 10,000 4 +3 4 5 5 Not specified Not specified 100,000 5 +7 6 +10 3.3.2 Air pressure 1) Operation with a pressure exceeding the maximum operating pressure leads to breakage of the product.

Fieldbus system DeviceNet TM compatible SI unit

Round head screw (M3 x 8), 4 pcs. EX600-ZMV2 (Specified for SY series) Enclosed parts: Round head screw (M4 x 6), 2 pcs. Round head screw (M3 x 8), 2 pcs. (2)End plate bracket EX600-ZMA2 Enclosed parts: Round head screw (M4 x 20), 1 pc. P tight screw (4 x 14), 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4 x 20) with washer, 1 pc.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

PF2D5--1 (With voltage output type) PF2D540-19 Display unit (PF2D30/31) 186 Sensor unit 78 86 Brown 6 2 Analog output Switch output or Pulse output Main circuit Main circuit 56 8 4 Load + 12 to 24 VDC 15 White 7 3 Black 5 1 Blue Load is an analog input equipment such as a voltmeter.

ChemicalThermo-con

Terminal block Morimatsu Co., Ltd.: M111A-7A, for holding screw M3 Connection cable: 22AWG or more, max. 32.8 feet (10 m) 3 1 2 Pin No. Signal contents Pin No.

Speed Controller with One-touch Fittings

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tubing O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

10

37 13 72 62 76.5 M10 x 1.5 10 30 16 5 100 37 26 40 114 89 30 16 55 20 19 37 16 72 71.5 86 M10 x 1.5 10 30 16 5 -Wl Bore size [mm] MM MO N NB P RF S V W WL ZZ S ZZ 32 M10 x 1.25 15 27 35 1/8 11 92 4 6.5 24 143 40 M14 x 1.5 19 27 40 1/4 11 97 4 9 24 152 50 M18 x 1.5 19 31.5 43.5 1/4 11 106 5 10.5 24 168 63 M18 x 1.5 19 31.5 43.5 3/8 11 106 9 12 24 168 80 M22 x 1.5 23 38 56 3/8 21 132 11.5

MB

to 800 19 19 19 19 23 23 27 27 31.5 31.5 38 38 35 40 43.5 43.5 56 56 1/8 1/4 1/4 3/8 3/8 1/2 11 11 11 11 21 21 92 97 106 106 132 132 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 24 24 24 24 40 40 143 152 168 168 208 208 100 110 118 118 150 150 151 165 180 180 226 226 6-6-37 37 Series MBB With Mounting Bracket Foot(L)/Locking at head end (-H) -W -H/ -R (mm) Port Cushion valve Stroke range Bore size

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Not required. m Mey a 30 20 10 0 Transfer load m (kg) Refer to page 94 for deflection data. 60 Standard Motor/Horizontal Mount Specification Series LTF6 Dimensions/LTF6PF thread depth 8 4 x M5 x 0.8 50 (2 x n1) x 5.5, Drill through 11.5, counter bore depth 5 30 Sensor cable Sensor cable fixing clip Stroke + 66 (Table movement range) (20.5) 82.5 40 40 19 A 42.5 32.5 A 19 Stroke + 95 22.5 64

Air Cylinder Series CA2

JIS B4636 + Two-angle socket 19 2.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Nickel plated Spring washer Steel wire @3 Felt Felt @4 Holder Stainless steel @5 8-21-19 19 Series MGG Construction 63 to 100/MGGB #3 !5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !

KG

14 15 K 18.5 26.1 18.0 8 14 M 21 41.5 29.5 10 H 19 14 12 19 22 58.3 46.1 1 2 KGF12-04 18 24 52 D Note) D: Max. diameter MS Straight Union: KGH Model L M Effective area (mm2) Nylon Urethane T Note) Applicable tubing O.D.