Air Cylinder

13 M22 x 1.5 26 1/4 83 158 85 Up to 500 40 37 95 32 74 22 45 12 13 62 13 M10 x 1.25 7 19 14 M22 x 1.5 26 1/4 83 159 100 Up to 500 40 37 110 41 87 26 50 10 14 66 16 M10 x 1.25 12 23 14 M26 x 1.5 28 3/8 88 168 Rod end nut (Standard) 30 d D C H B [mm] Part no.

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

12.5 P=11 L plug connector (L) Dimensions n: Stations L n 19 226 218 20 237 229 13 160 152 15 182 174 17 204 196 5 72 64 6 83 75 7 94 86 9 116 108 11 138 130 L2 L1 2 39 31 3 50 42 4 61 53 16 193 185 18 215 207 10 127 119 12 149 141 14 171 163 8 105 97 601

Speed Controller with

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tube O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

180

or main body. 709 MHY2 Series Dimensions MHY2-25D 2 x M6 x 1 thread depth 10 Pin hole positioning (Mounting thread) 16 5 23 50 4H9 + 0.030 depth4 0 4 x M5 x 0.8 through (Thread for mounting attachment) 10 4 x M6 x 1 thread depth 12 12 0.005 0.025 (Mounting thread) 6 12 2 x 6.6 through 2 x M6 x 1 thread depth 12 22.5 (Mounting hole) (Mounting thread) (Limted area for mounting attachment) 46

MHY2/MHW2

closing port) MHY2-16D2 43.4 Opening/closing direction through hole type (Hole for mounting attachment) 8 0.005 0.025 4 7 14 (Limited area for mounting attachment) Do not extend the attachment from limited area for mounting to avoid interference with the attachment or main body. 2.8-12 180 Angular Gripper Series MHY2 MHY2-20D 2-M5 X 0.8 Depth 8 Pin hole positioning (Mounting thread) 14 5 19

VP300/500/700

Y: 4.5 to 7 D: 6 to 8 78.3 2(A) 2(A) 63 19 (A port) Rc1/2 Stations L L1 L2 Formula L1 = 41 x n + 33 L2 = 41 x n + 17 9 402 386 10 443 427 2 115 99 3 156 140 4 197 181 5 238 222 6 279 263 7 320 304 8 361 345 : With light/surge voltage suppressor ( ): Dimensions for external pilot 4-8-15

Title not found

flats 19 OUT Purge air for dehumidification IDG 30, 50, 60, 75, 100 Dimensions (mm) A IDG3, 5, 10, 20 A IN IDG1 Series IDG Series IDG Comes with pre-filter as detailed left + regulator AR.

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

10 to 50 54 14 depth 10.5 63 64 56 15 20 77 10.5 M10 x 1.5 103 7 17 8 60 9 1/4 15 93 47.5 19 56 75, 100 64 53.5 10 to 50 63.5 17.5 depth 13.5 80 73.5 63.5 21 25 98 12.5 M16 x 2.0 132 6 22 10 77 11 3/8 16 112.5 57.5 26 63.5 75, 100 73.5 63 10 to 50 75 17.5 depth 13.5 100 85 73 27 30 117 13 M20 x 2.5 156 6.5 27 12 94 11 3/8 23 132.5 67.5 26 73 75, 100 85 7

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

PF2D5--1 (With voltage output type) PF2D540-19 Display unit (PF2D30/31) 186 Sensor unit 78 86 Brown 6 2 Analog output Switch output or Pulse output Main circuit Main circuit 56 8 4 Load + 12 to 24 VDC 15 White 7 3 Black 5 1 Blue Load is an analog input equipment such as a voltmeter.

Clean Rodless Cylinder Series CYP

19 39 64.9 73.5 49.5 39 M10 x 1.5 12 20 LD LW MM M N L P PA PB Q QW R T TA TB W WA WB Y Z Model CYP15 5.6 69 M4 x 0.7 6 4.5 67 M5 x 0.8 25 60 105 48 45 23 13 18 69 32 17 2.5 118 CYP32 8.6 115 M6 x 1 8 7.5 90 Rc 1/8 50 100 138 87 79.5 29 17 22 115 46 27 3.5 155 Note 1) These dimension drawings indicate the case of piping port position "Nil".

Rotary Gripper Series MRHQ

Side B Scale: 45% 10 Rotary Gripper Series MRHQ Dimensions (mm) 1in = 25.4mm Scale: 50% MRHQ20 A B 48 59 78 38.5 4-M6 x 1 Depth 10 0 0.074 54h9 26.3 opened + 2.2 0.2 8 0 0.1 M5 x 0.8 0 0.05 10 16.3 closed 0 0.7 4-M4 x 0.7 Finger closing port (mounting screw attachment ) 5 24.5 9 Max. 9.2 51 4-M6x1 Depth 9 (two on opposite side) M5 x 0.8 Finger opening port 3-R2.5 24 3.4 62 16.5 27 19

3 Way Direct Acting NVKF 300 Series

Stations Applicable blank plate ass'y vK300-42-1A Dimuuiun $uies t{U|ff30 Body Ported Grommet (G): NVKF332-"G-M5 inch (mm) Base Mounted Grommet (G) : NVKF334rG-01 T inch (mm) =1 1 .81 (=3001 lld wi'e hQt') Ssis ilUff300 Dimsui Body Ported (Top Ported) lType 20 Manifold NVV3KF3-20-Stations-007 inch(mm L: Dimensions 19 20 14.84 15.59 (377) 't3.78 r4.53115.28 (350) (36s) (388) ( 1 r 1 ) (

SFOD-OMT0012

Setting Software Functions . 9 4.1 Various windows . 9 (1) Main window . 9 (2) Status window . 16 (3) Teaching window . 19 (4) Parameter window . 22 (5) Step Data window . 23 (7) Test Drive window . 26 4.2.

SFOD-OMT0011CN

No.SFOD-OMT0011CN-A (4 ) // JXC-W1 (JXC3 Series) 1. . 3 2. . 5 2.1 . 5 2.2 . 5 2.3 . 5 3. . 6 3.1 . 6 (1) . 6 (2) . 6 3.2 . 6 (1) . 6 (2) . 6 (3) . 8 4. . 9 4.1 . 9 (1) . 9 (2) . 16 (3) . 19 (4) . 22 (5) . 23 (6) . 24 (7) . 26 4.2 . 28 (1) . 28 (2) . 31 (3) . 32 4.3 . 33 (1) . 33 (2) . 35 4.4 . 36 4.5 . 36 4.6 . 39 (1) . 39 (2) JOG . 40 (3) 1 . 40 4.7 . 42

EXxx-OMV0017-D

I/O monitoring . 45 4.1 Input . 45 4.2 Output . 46 4.3 Input / output detailed information . 47 4.4 Forced output . 48 4.4.1 Forced output conditions . 48 5.

PF2D

pulse output Accumulated pulse output Output 2 Switch output Switch output Shipment 16-11-37 2 Digital Flow Switch For Deionized Water and Chemicals Series PF2D How to Order PF2D5 13 20 1 Remote type Sensor unit Output specifications Flow rate range Output for display unit Note 1) + analog output (1 to 5 V) Output for display unit Note 1) + analog output (4 to 20 mA) 3/8 1/2 3/4 1 2 11 13 19

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

12.5 P=11 VS7 L plug connector (L) n: Station Dimensions n L 2 39 31 3 50 42 4 61 53 5 72 64 6 83 75 7 94 86 8 105 97 9 116 108 10 127 119 11 138 130 12 149 141 13 160 152 14 171 163 15 182 174 16 193 185 17 204 196 18 215 207 19 226 218 20 237 229 L1 L2 1.13-11

NVKF

Stations Applicable blank plate ass'y vK300-42-1A Dimuuiun $uies t{U|ff30 Body Ported Grommet (G): NVKF332-"G-M5 inch (mm) Base Mounted Grommet (G) : NVKF334rG-01 T inch (mm) =1 1 .81 (=3001 lld wi'e hQt') Ssis ilUff300 Dimsui Body Ported (Top Ported) lType 20 Manifold NVV3KF3-20-Stations-007 inch(mm L: Dimensions 19 20 14.84 15.59 (377) 't3.78 r4.53115.28 (350) (36s) (388) ( 1 r 1 ) ( 1

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

60 70 N 11 18 18.5 20 26 ZZ 103 132 137 156 182 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 Model 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 P (Piping port) Model Mounting nuts (2 pcs.) are shipped together.

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

8 22 8 15 80 18 M6 x 1 20 40 36 M26 x 1.5 124 13 10 70 41 41.6 3 16 11 29 10 16 92 23 M6 x 1 26 50 46 M32 x 2 150 13 TF TN Nil P (Piping port) ZZ X W TT Model 12-REA25 12-REA32 12-REA40 50 Rc1/8 30 NPT1/8 137 G1/8 17 50 Rc1/8 40 NPT1/8 156 G1/8 19 60 Rc1/4 40 NPT1/4 182 G1/4 22 12-REA50/63 0 L0.2 33 B 2 x 4 x V Effective thread depth 16 2 x P (Piping port) 14 14 8 (R) D X Q Q 14.5 22 I 2