Environment

x 0.8 8 37 38 15.4 8.2 28 0.9 15.9 146 196 24.5 101 to 400 32 20 to 100 40 M6 x 1.0 10 37 38 15.4 8.2 28 1 15.9 151 201 27 101 to 500 [mm] Body Bottom Tapped Size Stroke range [mm] MA MC MD MH ML MO MR XA XB 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41 101 to 124 75 125 to 200 59 49.5 201 to 400 76 58 25 20 29 20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200

3 Way,3 Port Solenoid Valve NVZ Series

41\,i-OOO fst orAa*rt 1O-32Nom. (M5) one buch One touch .NW3Z3-40R-@1-O NVZ3!4R-OOO Blsnk plale .sCy: DXT200-a-1A lltherc aae more lhan I stations, supply alr and exhaust lrom both sides of manllold.

NVZseies

41\,i-OOO fst orAa*rt 1O-32Nom. (M5) one buch One touch .NW3Z3-40R-@1-O NVZ3!4R-OOO Blsnk plale .sCy: DXT200-a-1A lltherc aae more lhan I stations, supply alr and exhaust lrom both sides of manllold.

Compact Cylinder

27 7 22 M5 7 16 10 26 40 26 4 16 26 6.6 2.8 8 38 60 73 M5 29 7 22 M5 7 16 15 32.5 46 32 4 30 32.5 7 5 10 50 64 32 79 M6 33.5 7 24.5 M6 9 18 17.5 38 52 36 4 35 38 9 5 10 55 72 36 90 M6 38 10 26 M6 9 21 20 46.5 64 45 5 40 46.5 9 6 12 70 90 45 110 M8 45 10 31 M8 9 21 22.5 56.5 74 50 5 45 56.5 9 6 12 80 100 50 120 M8 50 10 31 M8 Single clevis bracket Hexagon socket head cap screw (accessory

MHK2

M5 x 0.8 (Finger opening port) 22.5 2.3 12-6-13 13 Series MHK2 Dimensions MHK2-20: Standard type 18.6 20 2-M5 x 0.8 thread depth 8 (Mounting thread) 4H9 depth 4 +0.030 0 21H9 depth 1.5 +0.052 0 2-M5 x 0.8 thread depth 10 (Mounting thread) 24-M5 x 0.8 thread depth 10 (Mounting thread) Bottom hole 4.3 through (Mounting hole) 0 0.1 8 Open 26 +1.2 0 5 16 0.02 13.5 42 30 60 58 32 0 0.2 29 Closed

MHK2

groove (2 positions) S O 15 3 15 10 0 0.05 5 9 4 7.5 Note) For single acting, one port is used as a breather port. 21 M5 x 0.8 (Finger opening port) 2.5 MHKL2-20: Long stroke type 18.6 2-M5 x 0.8 thread depth 8 (Mounting thread) 24 4H9 depth 4 +0.030 0 21H9 depth 1.5 +0.052 0 2-M5 x 0.8 thread depth 10 (Mounting thread) 24-M5 x 0.8 thread depth 10 (Mounting thread) Bottom hole 4.3 through

Wedge Cam Operation Provides

M5 X 0.8 (Finger opening port) 22.5 2.3 2.4-13 Series MHK2 Dimensions MHK2-20l /Standard model 18.6 20 2-M5 X 0.8 thread depth 8 (Mounting thread) 4H9 depth 4 +0.030 0 21H9 depth 1.5 +0.052 0 2-M5 X 0.8 thread depth 10 (Mounting thread) 4-M5 X 0.8 thread depth 10 (Mounting thread) Bottom hole 4.3 through (Mounting hole) 0 -0.1 8 Open 26 +1.2 0 5 16 0.02 13 . 5 42 30 60 58 32 0 -0.2 29 Closed

Wedge Cam Operation Gripper Series MHK2

M5 X 0.8 (Finger opening port) 22.5 2.3 19 Series MHK2 Wedge Cam Operation Gripper Dimensions MHK2-20 /Standard model Scale: 37% (mm) 18.6 20 2-M5 X 0.8 thread 8 deep 4H9 4 deep +0.030 0 21H9 1.5 deep +0.052 0 2-M5 X .8 thread 10 deep 4-M5 X 0.8 thread 10 deep Bottom hole dia.4.3 through-hole 0 -0.1 8 Open 26 +1.2 0 5 13.5 16 0.02 60 58 32 42 30 0 -0.2 Closed 16 29 4H9 4 deep +0.030 0 21

VCW

, 3/8 VCW31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 59 46 57 60 54.5 48.5 101 57 68 104 1/2 22 45 90 41 11 17 36 22.5 23 M5 8 26 64.5 48 62.5 62 60 50.5 103 62.5 70 107 1/4, 3/8 VCW41 30 50 94 41 13.5 17 36 25 23 M5 8 26 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 70 48 68 62 65.5 50.5 103 68 70 119 3/4 17-2-55 8 Series VCW Dimensions (N.O.)

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 2 x P (Rc, NPT, G) H2 Width across flats B2 2 x NN G Relief port M5 x 0.8 G H1 Width across flats B1 Standard port I Relief port 2 x Eh8 D MM AL A F K NA N N H S + Stroke F ZZ + Stroke (mm) ZZ S P N I E D A 12.5 11 10 10 13 F Bore size Stroke range AL K MM NA NN G H2 41 32 32 26 B2 H H1 22 17 17 13 B1 0 6 6 5 8 8 8 50 45 45 41 200 to 1000 150

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Manifold Specifications for 41 and 42 Type Manifold Specifications for 41 and 42 Type SS5Y5-41 SS5Y5-42 SS5Y7-42 Port size Flow characteristics Model 52-SY740 52-SY540 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) 1,5,3 Model Applicable valve 4,2 (A,B) (P ,EA,EB) b Cv c[dm3/(sbar)] c[dm3/(sbar)] Single base / B mounting Manifold style b Cv SS5Y5-41 1 (SUP) / 3/5 (EXH) Common SUP / Common EXH 1/4

MY1

NH NC DTT UU TT UU Auto switch magnet holder M5 x 0.8 (Port) -X GA GA 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) Cushion needle G G 20GB M5 x 0.8 (Hexagon socket head plug) N A M5 x 0.8 (Port) Data Z + Stroke M5 x 0.8 (WW) (WW) (Hexagon socket head plug) 2 x 2-J depth K M5 x 0.8 (Hexagon socket head plug) XX XX M5 x 0.8 (Port) VV VV 2-M5 x 0.8 (Hexagon socket

Solid State Auto Switches

x 0.8 x 16 M5 x 0.8 x 20 M5 x 0.8 x 25 ( ): Denotes the values of D-A44C Dimensions (mm) D-A3C D-A44C 2 x M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland 2 x M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland G 1/2 G 1/2 4 x Z 4 x Z (Applicable cable O.D. 6.8 to 9.6) (Applicable cable O.D. 6.8 to 11.5) Hexagon socket head cap bolt Hexagon socket head cap bolt Indicator

MHF2

MHF2-16D1 Scale: 50% 4H9 +0.030 0 depth 3 60 4H9 +0.030 0 depth 3 2-M5 x 0.8 thread depth 12 Mounting thread 6 79.5 5 M5 x 0.8 2-M5 x 0.8 thread depth 5.5 50 94 Mounting thread Finger closing port 26 74 10.6 E 20 20 24 33 E 0 -0.1 1.2 2-4.3 through (mounting hole) 27 29 1.2 29 M5 x 0.8 2-7.5 +0.1 0 Close: 0 Finger opening port E-E Open: 321 58 4-M5 x 0.8 thread depth 5.5 8-M4 x 0.7 thread

MHF2

6 MHS 62 86 MHC 33 Finger closing port M5 x 0.8 2-M6 x 1 thread depth 6 56 MHT Mounting thread E 13 MHY 25 30 41 25 MHW MRHQ 2-5.2 through (Mounting hole) 0 -0.1 32 E Misc.

MHF2

MHZ MHF MHL 2-M5 x 0.8 thread depth 12 MHR Mounting thread 6 79.5 5 MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHS M5 x 0.8 2-M5 x 0.8 thread depth 5.5 50 94 Finger closing port Mounting thread MHC 26 74 10.6 MHT E MHY 20 20 24 33 MHW E MRHQ 2-4.3 through

CM2

8 75 60 4 7 18 13 37 34 8 62 15.5 13 26 30 5 8 28 5 M8 x 1.25 15 24 M20 x 1.5 1/8 116 20 0 0.033 25 45 8 75 60 4 7 22 13 41 40 10 62 19.5 17 32 37 6 8 33.5 5.5 M10 x 1.25 15 30 M26 x 1.5 120 1/8 26 0 0.033 32 45 8 75 60 4 7 22 13 41 40 12 64 19.5 17 32 37 6 8 37.5 5.5 M10 x 1.25 15 34.5 M26 x 1.5 122 1/8 26 0 0.039 40 50 11 82 36 66 5 7 24 16 45 52 14 88 21 22 41 47.3 8 10 46.5 7 M14

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

BA -06 BA -08 BA -10 BA -32 BA -02 BA -01 CX D-G5NBL 35 40 45 45 45 40 50 45 D-G5/K5 D-B7/B8 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 BM1 -06 Since this is a guideline including hysteresis, not meant to be guaranteed.

MRHQ

18 6 21 9 5 5 23 34 Side A Side B 12-11-13 14 Series MRHQ Dimensions MRHQ16 A B 41 50 66.5 4-M5 x 0.8 depth 8 30 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 -0.062 47h9 +2.2 -0.2 20.9 opened 0 -0.1 5 41 +0.03 0 3-4H9 depth 6 (one each on three sides) 4-M3 x