EXxx-OMV0028.eng 'HFODUHVXQGHULWVVROHUHVSRQVLELOLW\WKDWWKHIROORZLQJHTXLSPHQW 7UDGH1DPH 60&:LUHOHVVV\VWHP 0RGHO1XPEHUV (;:(1(;:(1 (;:31(;:31(;:69(;:69 (4) Mounting the valve plate. Mount the valve plate (EX600-ZMV#) to the valve manifold using the set screws. (M3 x 8) Apply 0.6 to 0.7 Nm tightening torque to the screws. M12 4-pin Socket, D-code 4 Configuration Pin No.
Specifications Series PSE200A PSE533 PSE543 PSE563 PSE573 PSE530 PSE540 PSE560 PSE570 Applicable SMC pressure sensor PSE550 PSE531 PSE541 PSE561 PSE532 PSE564 PSE574 PSE575 PSE576 PSE577 Rated pressure range 0 to 2 kPa 0 to 101 kPa 100 to 100 kPa 0 to 100 kPa 0 to 500 kPa 0 to 1 MPa 0 to 2 MPa 0 to 5 MPa 0 to 10 MPa Display/Set pressure range 0.2 to 2.1 kPa 10 to 105 kPa 105 to 105 kPa 10
0.7 29 40 30 10 70 3.5 20.9 4 25 2.5 25 5 14 MXY12 M5 x 0.8 31 52 40 15 86 8.5 30.9 5 3 36 32 6 18 PH TB Z T WR RL QW R RH WE WD Q W PR P PL TH Model MXY6 5.1 2.9 88 4 12 60 5 7 30 11 13 3(depth 3) 3(depth 3) 2.5 9 20 25.5 MXY8 6.1 98 3.4 4 15 70 6.5 7 38 19 13 3(depth 3) 3(depth 3) 3 10 25 32 MXY12 7.8 114 4.5 21 5 8.5 90 7 50 29 18 4(depth 4) 4(depth 4) 4 13 33 42 n QL Model 50 100 150
10 10 54 32 26 11 22 20 44 16 11 15 6 27 71.5 60 42 22 21 150.5 8 M8 x 1.25 25 to 800 25 to 650 50 35 12 13 10 59 40 27 11 27 21 52 20 10 17 9 32 80.5 70 46 24 28.5 162.5 11 M8 x 1.25 25 to 800 25 to 650 60 35 15 18 10 67 40 26 27 23 64 20 13 17 9 32 98.5 85 48.5 24 28.5 174 11 M10 x 1.25 13.5 25 to 750 25 to 600 70 40 17 23 14 72 52 30 32 23 78 25 15 21 11 37 117.5 102 55 26.5 36 189 13
Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) GWP: 20887 Refrigerant charge [oz (g)] 13.7 0.4 (390 10) 18.7 0.4 (530 10) 22.2 0.4 (630 10) 27.5 0.4 (780 10) Auto drain Float type (Normally open, Min. operating pressure: 14.5 psi (0.1 MPa)) Port size Symbol N NPT1 NPT1 1/2 NPT2 Symbol Nil R1 R1 1/2 R2 Drain tube O.D.
(Y): VQZ2 2(R)Y -N3T, N7T, M5T Indicator light 87 MAX.10 300 (Lead wire length) 83 Applicable cord O.D.
1.30) 220 V 1.27 (With indicator light: 1.46) 23(P2) D b b Air operated External pilot solenoid Internal pilot solenoid Power consumption [W] DC G, L, M 1.0 (With indicator light: 1.1) D 1.0 (With indicator light: 1.1) * Allowable voltage fluctuation for S and Z types 24 VDC: 7% to +10% 12 VDC: 4% to +10% Flow Rate Characteristics/Weight Caution Flow rate characteristics Weight [kg] 1(P)
OFF M3 hexagon screw Tightening torque 0.6 Nm 1 2 0 0 0 IP address 192.168. Y . X : Thread size: M3 x 30 The following instructions must be followed during maintenance: Turn off the power supply. Stop the air supply, exhaust the residual pressure and verify that the air is released before performing maintenance. Otherwise an injury can result.
M3 hexagon screw Tightening torque 0.6 Nm Terminating resistor Valve manifold : Thread size: M3 x 30 Troubleshooting The following instructions must be followed during maintenance: Turn off the power supply. Stop the air supply, exhaust the residual pressure and verify that the air is released before performing maintenance. Otherwise an injury can result.
L/min 24 VDC 10% 12 to 24 VDC 10% 12 to 24 VDC 10% 12 to 24 VDC 10% 24 VDC 10% Temperature characteristics (25C reference) 3% F .S. (15 to 35C) 5% F .S. (0 to 50C) 2% F .S.
No.PS-OMG0001CN-H // PSE300 2 8 9 10 10 12 14 16 19 21 23 24 31 31 33 -1No.PS-OMG0001CN-H *1) (ISO/IEC) (JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating
A A1 E1 L1 MM U1 L M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 16 Y-G02 Y-G03 Y-G04 Y-G05 34 41 42 56 8.5 10.5 14 18 16 20 22 28 25 30 30 40 10.3 12.8 12 16 11.5 14 14 20 34 41 42 56 8.5 16 25 30 30 40 M8 x 1.25 10.3 11.5 21 I-G02 I-G03 I-G04 I-G05 8 10 18 22 8 10 10 14 8 10 18 22 8 10 10 14 IY-G02 IY-G03 IY-G04 IY-G05 +0.058 0 +0.4 +0.2 0.2 0.4 +0.058 0 20 10.5 12.8 14 25.6 20 M10 x 1.25 +0.058
Option J: With drain guide Bracket (Option) female thread T: With element service indicator Maintenance space Drain Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
Solenoid on side B 1 3 5 7 9 17 29 31 No. Designation Description 1 3 5 7 1 1 5 7 Bit No.
Individual grounding should be provided close to the product with a short cable. 28 30 Hexagon socket head cap screw (M3 x 30): 2 pcs. Seal cap: (for M12 connector socket): 1 pc. Pollution degree D Side (SI unit side) NOTE Output No. 1 9 Solenoid on B side 3 5 7 17 29 31 (Note): Y connectors for external power supply are available as accessories.
Address HW/SW 9 10 7 8 5 6 3 4 1 2 ON Note: Be sure to switch off the power supply when set on the switch. Safety Instructions Address setting (switch No. 5 to 10) Set the DeviceNetTM node address (MAC ID) in binary coded. Address range is 0 to 63. Note: Factory default setting is 63.
Qi '5 0 ~ 5l :r 0. 31<.-t-~-+---="I--;;::'--t-t_1 Q. 0.15 f-t.,---+t--t-+---1--+-t--t-l 8Tightening torque of mounting screw (M3) for gauge is 3-Skgf . cm.
Model AU ALU ALHU F R Barb fitting M3, M5 M3 M5 Barb elbow Barb one-touch Reducer Removing tubing Withdraw the sleeve straight along the tubing. Use a tool such as long-nose pliers if it is difficult to pull out by hand. 1. Withdraw the tubing straight. 2.