Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

74 94 09 11 14 09.5 16.0 15.0 M8 x 1.25 M10 x 1.5 PA PG 7 8 9 Bore size (mm) 25 32 40 P Rc 1/8 Rc 1/8 Rc 1/4 SS 5.1 4.0 9.0 PB 112 134 150 PP1 12.7 15.5 17.5 PP2 12.7 18.5 20 Q 206 264 322 QQ 16 16 26 QW 46 60 72 RR1 18.9 22.0 RR2 17.9 24.0 TT 15.5 21.0 26.0 UU 16 16 21 VV 16 19 23 W 122 144 160 WW 11 13 20 YW 070 088 104 Z 240 300 360 60 80 100 25.50 29 .0 Hole sizes for centralized piping

Series CE1

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No. No.

SMC

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm J D side G1/4 port part Tightening torque: 10 1 Nm K G e w q Note) H r q w e Note) e w q Note) F q w E C A U side B D M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm Block Assembly C: 2 port valve manifold block assembly Manifold block assembly for gate valve D: 3 port valve manifold block assembly

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted

DC: DL (With indicator light) Option Grommet G D DIN terminal 5 Base mounted 0 Manifold 4 Coil rated voltage 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 5 9 24 VDC Construction Other Body ported De-energized Base mounted De-energized Component Parts q Description Stainless steel Aluminum die-casted Material Note No.

RB/RBL/RBQ

60 45 45 30 Max. allowable thrust (N) 294 490 686 981 1177 Ambient temperature (C) 10 to 80 6.08 12.75 15.69 21.57 24.52 Extended Spring force (N) 13.45 27.75 37.85 44.23 54.23 Retracted Weight (g) 28 60 110 182 240 Option/Stopper nut RBQ16S RB20S RBQ25S RBQ30S RBQ32S It denotes the values at the maximum energy absorption per one cycle.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

1 q t i PF2D540 o !0 u !0 !2ywr e !

Possible to transfer a workpiece at low-speed.

5 q r q w r y !5 !6 i CRQ2X MSQX CRQ2X MSQX MRQ Component Parts Component Parts Description Material No. Description Material No.

RB/RBL/RBQ

Selection of applicable model Selection of applicable model According to Data D , the tentatively selected RBQ2508 satisfies Me = 40 kg < 60 kg at = 0.7.

30

17 18.6 20.8 M L Q A D N M O L Q A Note 1) D is maximum diameter.

PF2A/PF2W

Refer to page 16-11-10. 16-11-28 25 Series PF2W Digital Flow Switch, High Temperature Fluid Type For Water Dimensions: Integrated Display Type for Water Internal circuit and wiring example to are terminal numbers. 74 120 Brown 1.6 23 60 Load 1 OUT1 Main circuit 4 Load Black OUT2 2 ZSE ISE 12 to 24 VDC FLOW SWITCH + U P White 3 SET 60 50 34 Blue PSE OUT2 OUT1 PF2W7T--27(-M) DOWN FOR WATER

ZX

ZX 36 A VJ10 ZR Rated voltage Lead wire length ZM (Mounting hole) Symbol L (mm) Symbol Rated voltage Lead wire color Nil 6 10 15 20 25 30 1 300 100 VAC 50/60 Hz 110 VAC 50/60 Hz (115 VAC 60 Hz) Blue (2 pcs.)

Plate Cylinder

q y e !

Compact Cylinder with Air Cushion and Lock Series RLQ

Rod side cylinder port Rc, NPT, G 1/8 Head side cylinder port Rc, NPT, G 1/8 Approx. 55.4 Approx. 40.4 Head side cylinder port Rc, NPT, G 1/8 Rod side cylinder port Rc, NPT, G 1/8 Approx. 55.4 Approx. 40.4 w e r t q u i y w e r t q u i y Approx. Max. 77.4 Approx. Max. 77.4 Approx. 53.8 Approx. Max. 59.4 Approx.

15

Load Blocking Xb,Xc,Xd zb A za CY3B CY3R Wb X Z CY1S CY1S Wc yc yd CY1L Wa Wd CY1H Y zc,zd Y CY1F CYP Mass and center of gravity of the load Calculation for Overall Center of Gravity Center of gravity mt = mn q Load no.

WRF100

Note 3) The symbol F in the dimensions indicates the position where the clamping force is generated defined by the product specifications. 82 WRF100 Dimensions WRF-S/S-type clamp arms (Without cover) WRF100-S200/S240 4 x M8 x 1.25 depth 12 108 60 2 x M12 x 1.75 through 25 25 80 0.015 0 2 x 8H7 ( ) 60 0.05 depth 12 (2 x 4 x M5 x 0.8 through) ( ) C B For limit switch mounting A 60 60 36 0.5

SMC Pneumatic Clean Series

45, 60, 75, 100, 125, 150, 175, 200 Standard Non-lube Double acting Single rod 15, 30, 45, 60 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Air cushion is not available for 21-/22-.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

0 q t r i S u y o !4 !8 !

CE2

RHC Brake valve Actuating valve MK(2) RS Q G RS H A Stroke reading cylinder with brake (CE2) Extension cable RZQ Sensor cord Head side cylinder port Controller: Series CEU2 MI W S External equipment (PLC, etc.)

CE2

RS Q G RS H A Stroke reading cylinder with brake (CE2) Extension cable RZQ Sensor cord Head side cylinder port Rod side cylinder port Controller: Series CEU2 MI W S External equipment (PLC, etc.)