Clean Regulator/Fluororesin Type

Nil X401 Standard Applicable fittings LQ1 LQ2 Symbol 1 2 Nil N Rc 1/8 NPT 1/8 Rotating the mounting hole 90 Fitting size (IN side) Fitting size (OUT side) Note 2) Note 2) Applicable model SRF10 SRF30 SRF50 Applicable model SRF10 SRF30 SRF50 Fitting size Fitting type Applicable fitting size Fitting type Symbol Symbol Nil 07 11 13 19 25 Note 1) 2 3 4 5 6 Same as IN side 2 3 4 5 6 07 11 13

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Since this will make it impossible to satisfy the specifications, operate with adjustment within the range of maximum values. 11-5-21 21 Series MSUB Dimensions These drawings indicate the condition when the B port is pressurized.

MLGC

(30) 23 (32) 19.5 (28.5) 40 10 13.5 35 37.5 38 8.5 15.5 14.5 11.5 ( ): Denotes the values of long strokes. 9-4-9 10 Series MLGC Operating Range Auto switch model Bore size (mm) 40 32 25 20 D-B7/B80 D-B73C/B80C D-C7/C80 D-C73C/C80C D-B5/B64 8 10 9 10 8 10 9 10 8 13 8 10 13 10 9 14 9 10 14 10 D-B59W D-G79/K79/K79C D-H7BAL D-H7/H7W/H7NF 4 4 4.5 5 7 8.5 9 10 D-H7C D-G5/K59 D-G5W/K59W D-G5NTL

K35-OMX0029

signal power supply 24V 13 CAL 14 E-STOP *1 *1 When the air servo cylinder is operated, turn ON the E-STOP signal.

Air cylinder (Series compatible with secondary batteries)

Description Qty 1 Rod cover 1 2 Head cover 1 3 Cylinder tube 1 4 Piston rod 1 5 Piston 1 6 Cushion ring 1 7 Cushion ring B 1 8 Bushing 1 9 Cushion valve 2 10 Tie-rod 4 11 Retaining ring 2 12 Spring washer 8 13 Tie-rod nut 8 14 Wear ring 1 15 Cushion seal 2 16 Rod seal 1 17 Piston seal 1 18 Cushion valve seal 2 19 Cylinder tube gasket 2 20 Piston gasket 1 21 Rod end nut 1 22 Magnet (1) 25

MLGC

(30) 23 (32) 19.5 (28.5) 40 10 13.5 35 37.5 38 8.5 15.5 14.5 11.5 ( ): Denotes the values of long strokes. 9-4-9 10 Series MLGC Operating Range Auto switch model Bore size (mm) 40 32 25 20 D-B7/B80 D-B73C/B80C D-C7/C80 D-C73C/C80C D-B5/B64 8 10 9 10 8 10 9 10 8 13 8 10 13 10 9 14 9 10 14 10 D-B59W D-G79/K79/K79C D-H7BAL D-H7/H7W/H7NF 4 4 4.5 5 7 8.5 9 10 D-H7C D-G5/K59 D-G5W/K59W D-G5NTL

Non-Standard Motor Compatible Drivers Matsushita Electric Industrial Co., Ltd. Drivers for LJ1, LG1, LX

Drivers for LJ1, LG1, LX Dimensions 5.2 Driver 150 168 160 5.2 20 A 105 3 Driver dimensions For LJ1, LG1 Driver input/output signal list (CN-1/F connector) Signal description Control signal power supply Servo ON input Alarm clear input Counter clear input Gain switching input Pin no. 12 13 14 19 20 21 22 23 24 25 26 Symbol IM COM GND OZ+ OZ CZ CW+ CW CCW+ CCW FG Signal description Torque

Heavy Duty Stopper Cylinder Series RSH/RS1H

Spring pin Roller pin Lever pin Ring A Ring B Adjustment dial End rod Lever spring Magnet Flat washer Flat washer C type snap ring for shaft C type snap ring for shaft C type snap ring for shaft Return spring 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 Clear anodized Clear anodized 20, 32 only 20, 32 only Nickel plated Nickel plated Hexagon socket

VFS4000-OMY0001

14 15 16 17 18 19 20 21 22 23 24 /01FD COMA B AXT100-DS25-015 1.5m AXT100-DS25-030 3m AXT100-DS25-050 5m MIL D AXT100-DS25-080 8m 25 AXT100-DS25-100 10m 25 0.3mm 2 AXT100-DS25-150 15m AXT100-DS25-200 20m AXT100-DS25-300 30m 11 No.VFS4000-OMY0001 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 6 3 5G 7 1) 2)()() 3)3 , 12 12 12 12 2 Nm M5 1.52 Rc 1/8 79 Rc 1/4 1214

ISA2

Valve open (horizontal slit) Valve closed (vertical slit) 16-8-21

VDW Series

SOL. 2 () 2 ( ) 21 Compact Direct Operated Series VDW 2/3 Port Solenoid Valve for Fluid Control Specific Product Precautions 1 Be sure to read before handling. Refer to pages 18 through 21 for safety instructions and precautions for 2/3 port solenoid valve for fluid control.

,,: ,.

21 Refrenc torque specification Table #3 Plug-in Reducer: KVR** Male Elbow: KVL I 1 8 E 1 1 30 28 ;a Consull factory tor intormation r' Nol ayailabls at lime of catalog pdnting.

PFxx-OMO0004CN

No.PF-OMO0004CN-E // PFMB7201 2 10 13 14 16 16 19 21 [] 25 OU1OUT2 {3 ] 26 28 [] 28 28 F0 29 F1 OUT1 31 F2 OUT2 39 F3 44 F10 45 F13 46 F20 47 F22 48 F30 49 F31 50 F80 OFF 51 F81 52 F90 53 F98 55 F99 56 57 61 62 64 65 65 68 71 -1No.PF-OMO0004CN-E (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic

KS/KX

Weight (g) D1 D2 L1 L2 A M Urethane M5 X 0.8 M6 X 1.0 20.5 21 22 KSL04-M5 KSL04-M6 KSL04-01S KSL06-M5 KSL06-M6 KSL06-01S KSL06-02S KSL08-01S KSL08-02S KSL08-03S KSL10-02S KSL10-03S KSL10-04S KSL12-03S KSL12-04S 8 9 4 10.4 12 21 16 2.5 3.5 3.5 23.5 23.5 12 14 1 8 M5 X 0.8 M6 X 1.0 22 21 21.5 23 26 26.5 29.5 31 34 35 38 36.5 39.5 2.5 3 3.5 5.0 3.5 5.0 8 12 24 12.8 14 23 17 6 25.5 26.5

Series LQ3 High Purity Fluororesin Fitting

M L K J H E t W1 W2 M 14 20 25 29 37 49 58 69 89 100 117 136 14.5 20.5 24.5 30.5 36.5 48.5 6 7 7 9 9 10 11 16 21 24 32 41 10 17 22.5 24.5 27 30 16 21 26 32 41 50 17 24 28 36 43 55 8 8 8 8 13 13 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3P1A LQ3P2A LQ3P3A LQ3P4A LQ3P5A LQ3P6A 1/4 (E) (E) L Panel Aperture (K) Straight Union : LQ3U (mm) Inch Size H Model Tubing O.D.

Air-hydro Unit

size (mm) Bore size (mm) CCVL10/11/12/13 4.

AFF

Please refer to pages 14-20-13 to 14-20-14 for details. Sight glass AFF75B is aluminum casted. Tempered glass Replacement Parts AFF11B Model No.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Support brackets are not for mounting; use them solely for providing support. 8-14-21 21 Series MY3A/3B Floating Bracket Facilitates connection to other guide systems.

33

Refer to back page 50 for Safety Instructions and pages 13 to 16 for Temperature Control Equipment Precautions. Operating Environment/Storage Environment Warning Warning 1. Do not use in the following environment as it will lead to a breakdown.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Note 13) Do not allow collisions at either end of the table traveling distance. Additionally, when running the positioning operation, do not set within 2 mm of both ends. Note 14) For the manufacture of intermediate strokes, please contact SMC.