REC

Reed switch Solid state switch Relay, PLC 100 V, 200 V Yes Connector Terminal conduit DIN terminal Grommet 12 V 2-wire 24 V PLC Relay, PLC 100 V, 200 V Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC circuit Grommet 2-wire 12 V Connector IC circuit 3-wire (NPN) 2-wire Terminal conduit 5 V, 12 V Relay, PLC Yes 24 V 12 V 3-wire (NPN) 3-wire (PNP)

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

Black Brown Red None None None None None None None White Black Black Red Red Red Black Black White None None Black White White Red Red White None 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 10 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 Seal (Length indication) Orange Yellow Pink Blue Purple Gray White White Yellow 015 L Molded cover 2-M2.6 x 0.45

HRX-OM-W060

P.5-12 (15) CH2 Independent pump operation CH2 pump operates independently while the button is pressed. P.5-12 To select a operation mode from the touch panel ( mode), contact input ( mode) (16) Operation mode P.5-12 Common or serial communication ( mode). (17) Operating condition display It indicates the run and stop status of the product. P.5-12 (18) Run/Stop To run/stop the product.

10

Made to Order (For details, refer to pages 16 to 21.)

LJ1H

10 20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean

Rotary One-touch Fittings Series KS/KX

Weight (g) M5, M6 M D1 D2 L1 L2 A Nylon Urethane M5 0.8 M6 1.0 KSL04-M5 KSL04-M6 KSL04-01S KSL06-M5 KSL06-M6 KSL06-01S KSL06-02S KSL08-01S KSL08-02S KSL08-03S KSL10-02S KSL10-03S KSL10-04S KSL12-03S KSL12-04S 20.5 21 22 8 9 4 16 2.5 21 10.4 12 3.5 3.5 1 8 M5 0.8 M6 1.0 23.5 23.5 12 14 22 21 21.5 23 26 26.5 29.5 31 34 35 38 36.5 39.5 2.5 3 3.5 5.0 3.5 5.0 8 12 24 23 12.8 14 17 6 1 8 1 4 25.5

PSxx-OMT0001CN

-A CF G1/8 ISA-12-C -11No.PS-OMT0001CN-E 2 ISA-21ISA-20 2 ISA-21-2 3 ISA-21-3 4 ISA-21-4 5 ISA-21-5 6 ISA-21-6 AR20-02-1-B 0.4MPaMPa 0.2MPaMPa 60PSI0.4MPa PSI 2 30PSI0.2MPa PSI 2 0.4MPa 0.2MPa 0.4MPa 0.2MPa MPa MPa/PSI 2 11/8 2SI -12No.PS-OMT0001CN-E 2 2 VX210X276 X276 DIN 2 AC100V AC110V Z (1/8) 1 () ((38)2 ) ISA-17 Y200T-A E210-U01 ISA-18 O 2 -13No.PS-OMT0001CN-E

15

M4 x 12 2.5 9 5.2 NW M4 x 12 2.5 9 12.5 NV M4 x 12 2.5 9 5.2 NU M4 x 12 2.5 11 12.5 NT M3 x 12 1.5 12 17.5 NM1 M4 x 5 1.5 6.35 4.5 NM2 M4 x 12 2.5 10 12 Motor type MM TT PD FP NZ M3 x 12 1.5 14 17.5 NY M3 x 12 1.5 14 17.5 NX M4 x 12 2.5 9 5.2 NW M4 x 12 2.5 9 13 NV M4 x 12 2.5 9 5.2 NU M4 x 12 2.5 11 13 NT M3 x 12 1.5 12 17.5 NM1 M4 x 5 1.5 6.35 5 NM2 M4 x 12 2.5 10 12 Included Parts List

AC Servo Motor Driver (Pulse input type/Positioning type)

(RES) A.10 Undervoltage A.12 Memory error 1 (RAM) A.13 Clock error A.15 Memory error 2 (EEP-ROM) A.16 Encoder initial communication error1 A.17 Board error A.19 Memory error 3 (Flash-ROM) A.1A Motor combination error A.1C Software combination error A.1E Encoder initial communication error 2 A.1F Encoder initial communication error 3 A.20 Encoder normal communication error 1 A.21 Encoder normal

Speed Controller with

15.4 8.8 13.5 12.7 13.5 17 18 17 18 21 22 21 22 3.3 5.5 10 12.6 17 10.5 4.3 7.8 14 17 12 22.8 20.5 4.3 8 19.3 22 25 12 22.1 28 33 14 4.3 8 25 26.2 Note) Reference dimensions Inch Size D1 D2 D3 D4 L1 L2 L3 MAX.

EXxx-OMY0006CN

X PROFINET FW 24 H watch dog FW EX##-OMY0004 1 No.EX##-OMY0006CN . 1 . 2 2. . 10 2.1. . 10 2.2. . 11 2.3. . 12 2.4. . 12 2.5. . 13 2.6. . 13 3. . 14 3.1. . 14 3.2. . 15 3.3. ()UT1/UT2 . 16 3.4. . 20 4. . 21 5. . 22 5.1. . 22 5.2. . 23 6. . 24 7. . 25 7.1. . 25 7.2. . 27 8. . 33 8.1. . 33 8.2. . 36 9. . 44 9.1. IO . 44 9.2. . 48 10.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Copper, fluorine and silicone-free + Low particulate generation Action 21 22 Relief type Vacuum suction type D Double acting Rod end thread Nil M Standard (Rod end female thread) Rod end male thread Model Model Bore size (mm) Port size Relief port Action Standard stroke (mm) 10-/21-CQSB12 10-/21-CQSB16 10-/21-CQSB20 10-/21-CQSB25 11-/22-CQSB12 11-/22-CQSB16 11-/22-CQSB20 11-/22-CQSB25 12

Brake mechanism added

(n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 60 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 65 + 30 (n 4) 2 70 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 10 + 30 n (n = 2, 4, 6, 8 ) Note 1) (n = 4, 8, 12, 16 ) Note 2) 2 (Different surfaces, Same surface) 1 95 100 D-M9A 85 15 80 (n 2) 2 80 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 85 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 95 + 40 (n 4) 2 100 +

Series KP/KPQ/KPG

KPY10-02 KPY10-03 KPY12-03 KPY12-04 4 7.5 7.5 10.4 20.7 18 D1 10 6 11 11 12.8 22.8 19.5 D1 14 8 12 21 21 15.2 26.3 21.5 D2 M 45 57 45 52 10 H 18.5 29.4 24 17 17 Connection threads 12 57 57 20.9 31.4 25 22 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

Series KP/KPQ/KPG

KPY10-02 KPY10-03 KPY12-03 KPY12-04 4 7.5 7.5 10.4 20.7 18 D1 10 6 11 11 12.8 22.8 19.5 D1 14 8 12 21 21 15.2 26.3 21.5 D2 M 45 57 45 52 10 H 18.5 29.4 24 17 17 Connection threads 12 57 57 20.9 31.4 25 22 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

KP/KPQ/KPG

59.5 62.5 6 7 8 9 12 13 19 20 21 24 4 18 20.7 10.4 7.5 7.5 D1 10 6 19.5 22.8 12.8 11 11 D1 14 8 21.5 26.3 15.2 21 21 12 D2 M 45 52 45 57 H 10 24 29.4 18.5 17 17 Connection threads 12 57 57 25 31.4 20.9 22 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

KPY10-02 KPY10-03 KPY12-03 KPY12-04 4 18 20.7 10.4 7.5 7.5 D1 10 6 19.5 22.8 12.8 11 11 D1 14 8 21.5 26.3 15.2 21 21 12 D2 M 45 52 45 57 10 H 24 29.4 18.5 17 17 Connection threads 12 57 57 25 31.4 20.9 22 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

Vacuum Unit

VDC to 24 VDC Black OUT + (Analog output) 1 k 12 VDC to 24 VDC rown DC(+) Brown DC(+) Brown DC(+) Black OUT + White LED (Green) Load 12 VDC to 24 VDC For release valve (, +) Load Main circuit Main circuit Load 12 VDC to 24 VDC Black Brown Black Brown + + OUT1 12 VDC to 24 VDC Load 12 VDC to 24 VDC Black OUT 1 Black OUT 1 Load + + 12 VDC to 24 VDC ack OUT + + + Load White OUT 2 White

LX

LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12

Thermo-con/Rack Mount Type

Pressure Loss in Facility Water Circuit p. 18 Dimensions p. 19 Operation Display Panel p. 20 Alarm p. 20 Maintenance p. 20 VOptions With Feet and No Rack Mounting Brackets p. 21 With Flow Switch p. 21 High-Pressure Pump Mounted p. 21 VOptional Accessories Power Supply Cable p. 22 Specific Product Precautions p. 23 4 HECR Series Model Selection Guide to Model Selection 1.