LX

F A A Lr Lr = 150mm L X F 60 Table displacement (m) Table displacement (m) Table displacement (m) 10 40 LXFH-100 50 LXFH-100 LXFH-100 8 40 30 LXFH-75 LXFH-75 6 30 20 LXFH-50 LXFH-50 LXFH-75 4 20 LXFH-25 LXFH-25 10 LXFH-50 2 10 LXFH-25 0.5 1 1.5 2 2.5 3 0.5 1 1.5 2 2.5 3 0.5 1 1.5 2 2.5 3 0 Weight (kg) 0 Weight (kg) 0 Weight (kg) Displacement at the section indicated by the arrow when a load

Modular F.R.L. Unit

X430 03 BG F N X425 03 Regulator Regulator For high/low temperature For high pressure 25 30 40 50 60 20 25 30 40 50 60 Body size Body size X430 X440 Low temperature High temperature Thread type Thread type Nil Rc Nil Rc N NPT N NPT F G F G Port size Port size Body size Symbol Port size Body size Symbol Port size 25 30 40 50 60 20 25 30 40 50 60 02 1/4 01 1/8 03 3/8 02 1/4 04 1/2 03 3/8 06

Modular Design with Uniform Body Style

400 10 70 0.01 2 40 6000 100 40 0.1 3 90 1000 20 1 4 10 +3 5 5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0.5 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated

LJ1H

motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard

Modular F.R.L. Units

Example) AF30-03B-2R-A-X430 X430 Low temperature X440 High temperature Symbol Description Nq Body size 20 30 40 50 60 Symbol Description Nq Body size 30 40 50 60 Nil Rc N*1 NPT F*2 G + Nw Pipe thread type Nil Rc N*1 NPT F*2 G + Nw Pipe thread type 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size Ne Port size Nr Option (Mounting) Nil Without mounting

1

25 18 22 24 30 34 40 46 58 13 15 18 21 24 27 32 39 6 8 10 13 16 16 20 20 11 11 10.5 11.5 12.5 14 12 16.5 26 30 36 42 48 54 64 78 8 10 12 16 20 20 25 25 6 8 10 12 16 16 20 20 M4 x 0.7 90 94 109 109.5 135.5 142 155 160 13 15 18 21 24 27 32 39 M4 M4 M5 M5 M6 M6 M8 M10 7 7 9 9 9 9 10 10 5 5 6 6 10 10 12 12 42 46 53 53.5 59.5 66 72 77 19 19 30 30 38 38 60 60 8 8 10 10 12 12 16 16 51 58 68 82

CL

M14 X 1.5 85 95 95 103 91 101 102 111 10 10 10 10 19 20 21 23 54 62 62 67 3.5 4 4 4 5.5 9 9 11 4 7 7 8 4 7 7 8 26 31 38 47 6 8 ZZ With rod boot W Without rod boot ZZ e f h l Bore (mm) Stroke range H1 P PG PH PL PW S TA TB TC WA WW WB WH H 20 25 32 40 M5 X 0.8 M5 X 0.8 Rc(PT)1/8 Rc(PT)1/8 141 151 10 10 33 38 39 44 19.5 24 24 24 86 96 97 5.5 7 7 9 30 30 25 20 198 215 218 241 20 24 24 24 5

CQ2

W/o auto switch B L L1 With auto switch Bore (mm) 5st 10 A 20 20 20 20 5st 10 5st 10 5st 10 32 48 58 12 33.5 58 68 17 38.5 40 64.5 12 33.5 64.5 74.5 17 38.5 45.5 50 67.5 77.5 18 43.5 87.5 97.5 28 53.5 Rod end male thread Double clevis (mm) A Without auto switch B CL A B CL With auto switch Bore (mm) Double clevis/CQ2D, CDQ2D 5st 10 20 20 20 20 20 20 5st 10 5st 10 5st

High Purity Fluoropolymer

M H L2 L1 Y E 1/8 3 4 Class 1 LQ1L12-F LQ1L11-F 11.5 18.5 10 Rc (NPT) Port size 17 18 1/8" Y 4 6 4 6 LQ1L43-F LQ1L42-F LQ1L41-F LQ1L36-F LQ1L35-F LQ1L34-F LQ1L33-F LQ1L32-F LQ1L31-F LQ1L24-F LQ1L23-F LQ1L22-F LQ1L21-F 18.5 19.5 1/8" 16.5 14 15 27 (L2) 21.5 22.5 M 1/4" 10 1/4 21.5 6 8 1/4" 23 23 (E) 17 20 H 35 10 (L1) 25 6 8 Class 2 to 5 3/8" 25 12 10 12 25 3/8" 29 H 28 21 24 45 29.5 1/2"

MXQ

Bore size/Stroke (mm) 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Standard type With buffer With end lock Axial piping type With buffer and end lock With buffer, Axial piping type Nil F R (2) P FR (2) Adjuster option FP Nil

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

387.5 365.5 19.5 19 423 412.5 381.5 24 20 435.5 425 397.5 22.5 L1 L2 L3 L4 255 Flat Ribbon Cable Connector 10-SV Dimensions: Series 10-SV1000 for Flat Ribbon Cable 1 2 P PG PH U D B C3, N1 C4, N3 C6, N7 (R) (-D) Stations Tie-rod base manifold: 10-SS5V1-10 D Directional Control Valves Air Grippers Modular F.

CM2

One-touch Fittings Bore size (mm) Bore size (mm) ZZ Z TZ TY TX TT TD Q P WB N1 G WA Bore size (mm) In the case of with rod boot, refer to basic style on page 6-4-31 and f dimension on page 6-4-13. 20 20 20 144 36 52 32 32 10 8 6 8.5 8 13 17.5 21.5 25 25 25 152 40 60 40 40 10 9 6 8 13 17.5 10.5 24.5 32 32 32 154 40 60 40 40 10 9 6 8 13 17.5 11.5 27 40 40 40 188 44.5 77 53 53 11 10 8 11 16

MY1

MY1B10 (mm) FC Applicable bore size E EA EB EC EY h TT F FB FH FW S T W a Shock absorber model MY1B10 10 5 28 5.5 29.8 8 1.8 40.8 5 5 (Max. 10) 35 RB0805 3.5 MY1B20 RB2015 RB2015 RB1412 RB1007 7 12 20 20 25 31 10 10 12 15 49 57 74 82 6.5 8.5 11.5 12 47.5 57.5 73 87 60 70 90 100 8 8 6 6 33 12 46 13 17 22 22 3.5 4.5 5.5 5.5 46.7 67.3 73.2 73.2 15 15 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (

VFS

Cannot be used as a single unit. 3-8-9 10 Series VFS1000 How to Order VFS1 1 20 01 1 G Symbol Option 2 position single F: With foot bracket Thread type 1 Nil N Rc NPT NPTF G Port size 01 Rc 1 8 T 2 position double F Option 2 Mountable only for VFS1120.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body Material Aluminum Body Material Brass A A 2 x J 4 x J A A 2 x J 4 x J B C F B B C F B 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 C F C D E D E F D E D E Body Material: Aluminum [mm] Body Material: Brass [mm] Size Port size A B C D E F J 20 1/8, 1/4 11 36 6 34 46 1.5 5.3 30 1/4, 3/8 13 46 7 40 56 1.5 Size Port size A B C D E F J 20 1/8 52 24 9 36 64 1.5 6 20, 30 1/4, 3/8

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

10 to 16 20 to 50 Pad dia.

Stability of suction position,

CL 2 5 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50BM ZP3E-125BM ZP3 12 30 S, F S, F 25 Displacement [mm] Displacement [mm] ZP3E ZP3E 20 8 N N ZP2 15 U U 10 4 ZP2V CL CL 5 ZP 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZPT ZPR ZP3E-63BM XT661 16 N, S, F Displacement [mm]

Modular F.R.L. Unit

plate, Pressure gauge display units: PSI, F Applicable models AL30 to 60 AL30 to 60 AL30 to 60 AL10 to 60 AL10 to 60 AL10 to 60 AL30 to 60 AL20 AL10 to 60 AL30 to 60 AL10 to 60 10 20 30 40 50 60 M5 1/8 3/8 1/2 3/4 1 Thread type AL20 Port size Metric thread (M5) Rc NPT G Symbol Nil Nil M5 01 02 03 04 06 10 M5 x 0.8 1/8 1/4 3/8 1/2 3/4 1 Note) N F Accessory When more than one specification

AC

Coef. for compensation 20 10 0 10 30 40 50 60 Air temp.

MHZ

the workpiece will not drop are F F mg 2 x F > mg Number of fingers Gripping force at least 10 to 20 times the workpiece weight The 10 to 20 times or more of the workpiece weight recommended by SMC is calculated with a safety margin of a = 4, which allows for impacts that occur during normal transportation, etc. and therefore, When = 0.2 When = 0.1 mg F > 2 x mg F = x 4 2 x 0.2 mg F =