High Vacuum Angle Valve, XL Series

80 160 200 1.3 x 10-10 {1 x 10-9} at ordinary temperatures, excluding gas transmission Leakage Pa m 3/s Internal 1.3 x 10-11 {1 x 10-10} at ordinary temperatures, excluding gas transmission {Torr l/s} External 40 45 60 60 95 105 XLG Operating time ms Note 2) 45 50 85 90 132 150 XLGV Flange type KF (NW), K (DN) KF (NW) Body: Aluminum alloy Bellows: Stainless steel Seal: FKM (fluoro rubber

Vacuum System Peripherals:

5 45 45 45 M5 x 0.8 ZX 1 8 1 4 , , , , 1 4 3 8 1 4 3 8 1 2 ZR 3 4 3 4 , 1 1 ZM Inlet pressure 0.7 MPa, Pressure drop 0.05 MPa ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Modular, Regulator Series AR Flow rate (l/min (ANR)) Set pressure (MPa) Pressure

High Vacuum Angle Valve

Vibration resistance allows for normal operation up to 30 m/s2 (45 to 250 Hz), but continuous vibration may cause a decline in durability. Arrange piping to avoid excessive vibrations or shocks. High temperature type (Model/XLA, XLC, XLD, XLF, XLG; Temperature specifications/H0, H2, H3) 1.

RSQ

QA F Q QB QU QW QW QU Bore size (mm) 29 32 40 50 13 13 16 38 42 50 20 24.5 26 7.5 8 9.5 6 6 8 60.5 68 82 32 to 50 20 O counterbore 6.5 depth 4 9 depth 7 9 depth 7 9 depth 7 11 depth 8 A 59.5 67 68 80.5 82 B 41.5 45 48 52.5 54 D 10 12 20 25 25 E 29 36 45 52 64 F 6 8 7.5 8 8 G 3 4 8 10 10 H 18 22 20 28 28 I 60 69 86 J 4.5 5 7 M 28 36 34 40 50 N 3.5 5.5 5.5 5.5 6.6 P M5 x 0.8 Rc 1/8 Rc

HRX-OM-M090

Fig 9.4-7 Cooling capacity (HRS018-A-20-G) 3) HRS024-A-20-G 3500 3500 Ambient Ambient temperature temperature 3000 3000 Cooling capacity[W] Cooling capacity[W] 25 25 2500 2500 32 32 2000 2000 40 40 45 45 1500 1500 1000 1000 500 500 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Cooling capacity is reduced by 300W if option

PF2A/PF2W

Connector pin numbers 2 1 (43.5) 4 3 A B Output specifications Pin no. 1 2 3 4 Pin description DC (+) NC/Analog output DC () OUT A 42 Pulse output only 62 52 Pulse output + Analog output 72 Flow direction 16-11-23 20 Series PF2W Dimensions: Remote Type Sensor Unit for Water PF2W511-(N)B 148 80 32 70 58 46 45 2-Port size 2 45 4-5.5 36 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

5 Port Air Operated Valve Series SYA3000/5000/7000 1

(Value in the initial stage) Vibration resistance: No malfunction from test with 45 to 2000 Hz one sweep, to axis and right angle direction of main valve, each one time when pilot signal ON and OFF.

Pneumatic Transfer System Series MF

(D) H H J I I G Note 1) G Note 1) J J I G Note 1) Y Y C Y C C E (A) E E (A) (A) B B 45 45 45 B X X X X C C C SMC G Note 1) G Note 1) I G Note 1) I J J F H F J (D) I (D) RG RT RS B 720 819 C 300 303 D 376 449 E R310 R445 F 60 87 G 93 129 B 780 851 C 301 300 D 369 418 E R390 R495 F 60 87 G 93 129 B 730 790 C 302 304 D 424 508 E R350 R440 G 93 129 H 302 327 A 791 916 A 823 906 A 835 934 15

Rotary Table/

High precision type High precision type High precision type High precision type Ta = I (Nm) Basic type Basic type Basic type Basic type I: Inertial moment 1 2 3 7 10 20 30 50 70 100 200 31 41 0.56 41 Refer to page 3. 32 45 0.82 45 . : Angular acceleration Load . 33 48 1.1 48 2 = (rad/s 2) t 2 54 71 1.5 71 : Rotation angle (rad) 86 74 107 2.9 78 74 2.4 78 t: Rotation time (s) 166 137 197

Speed Controller with Indicator

Rz 12.5 45 Female thread size Chamfered dimension D (Recommended value) M5 5.1 to 5.4 10-32UNF 5.0 to 5.3 2. Use G external threads with G internal threads. D For Uni Thread 45 Tightening method 1.

Rotary Actuator/Vane Type

Single vane Double vane 90, 100D 270S 180S 90S 1) e ot e g 1 n N 8 a 0 4 e g r + 2 n 7 a 4 n + 0 r + o n 0 5 0 4 N 0 ti o 0 9 ot a N ti 0 e t a e ot 0 1) o g t 1 e n e o R ) a 1 0 ot R r ) N 1 n o e 4 ti 0 + a g 0 t o n 9 R ra e n g n io ra (90) (90) at n io Chamfer ot Plate Plate Plate at R ot R Plate (45) Chamfer Chamfer Note 2) Chamfer (45) B port A port B port A port B port A port

MQQ

, 60 RHC Mounting style 10 15, 30, 45, 60, 75, 100 16 15, 30, 45, 60, 75, 100 Basic style Foot style Rod side flange style Head side flange style (Except 6) Single clevis style (Non-integrated type) Double clevis style Note 1) Bore size: 20, 25 mm only Mounting brackets are shipped together, (but not assembled).

MQQ

, 60 RHC Mounting style 10 15, 30, 45, 60, 75, 100 16 15, 30, 45, 60, 75, 100 Basic style Foot style Rod side flange style Head side flange style (Except 6) Single clevis style (Non-integrated type) Double clevis style Note 1) Bore size: 20, 25 mm only Mounting brackets are shipped together, (but not assembled).

MQQ

, 60 6 Mounting 15, 30, 45, 60, 75, 100 10 15, 30, 45, 60, 75, 100 16 Standard type Foot type Front flange type Rear flange type (except 6) Single clevis type (non-integrated type) Double clevis type B L F G C Note) 15, 30, 45, 60, 75, 100 20 15, 30, 45, 60, 75, 100 25 Strokes are available in 1mm increments by installing spacers in standard stroke cylinders.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

-10-FG-D-M0 EVS7-10-F G-D-M0 H J I 232 232 124 124 45 (12 port) 45 (14 port) 45 (12 port) 45 (14 port) 22 (4 port) 22 (2 port) 22 (4 port) 22 (2 port) 2 12 14 4 14 4 2 12 50 80 95 SMC SMC A B SMC 50 80 SMC B A 95 Manual override 5 1 3 Manual override 2-8.5 mounting hole 8 5 1 3 71 65 8 2-8.5 mounting hole 65 71 Indicator light 84 79 Indicator light 84 79 M12 connector M12 connector 150.5

Brake mechanism added

(n 4) 2 (n = 4, 8, 12, 16) Note 2) 105 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note 2) (n = 2, 4, 6, 8) Note 1) 20 + 45 (n 2) 2 95 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note 2) Note 1) When n is an odd number, an even number that is one larger than this odd number is used for the calculation.

Fluoropolymer Piping Equipment

LQ1B62-M 19 15 LQ1B63-M 25 1" 35 22.5 21.2 8 39.5 18 36 36 69.5 45 49 LQ1B64-M 19 15 LQ1B66-M 25 1/2" 37 10 10 Note) Products marked are produced upon receipt of order.

Series PF2W Digital Flow Switch For Water

Note2) Fixed units: Instantaneous flow rate: L/min Accumulated flow: L 0 3 Output specifications NPN open collector 2 outputs PNP open collector 2 outputs 0 1 Specifications PF2W300/301 Model PF2W330/331 Flow rate measurement range Note 1) 0.35 to 4.5 L/min 1.7 to 17.0 L/min 3.5 to 45 L/min 7 to 110 L/min Set flow rate range Note 1) 0.35 to 4.5 L/min 1.7 to 17.0 L/min 3.5 to 45 L/min 7 to

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 2 x P (Rc, NPT, G) H2 Width across flats B2 2 x NN G Relief port M5 x 0.8 G H1 Width across flats B1 Standard port I Relief port 2 x Eh8 D MM AL A F K NA N N H S + Stroke F ZZ + Stroke (mm) ZZ S P N I E D A 12.5 11 10 10 13 F Bore size Stroke range AL K MM NA NN G H2 41 32 32 26 B2 H H1 22 17 17 13 B1 0 6 6 5 8 8 8 50 45 45 41 200 to 1000 150

Compact Cylinder

Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 5, 10, 15, 20, 25, 30 20, 25, 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 50, 63, 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50 Intermediate strokes are available as a special order.