Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

External Grip Internal Grip MHK2-12D MHK2-12D 25 20 Pressure 0.6 MPa Pressure 0.6 MPa Gripping force (N) Gripping force (N) 20 15 0.5 MPa 0.5 MPa 15 0.4 MPa 10 0.4 MPa 10 0.3 MPa F F 0.3 MPa 5 5 0.2 MPa 0.2 MPa 0 0 10 20 30 40 50 10 20 30 40 50 Gripping point L (mm) Gripping point L (mm) External grip Series MHK2 Internal grip Series MHK2 MHK2-16D MHK2-16D 50 50 Pressure 0.6 MPa Pressure

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

] L5 [mm] L5 [mm] 600 600 600 m Wall L5 Y 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 5 10 15 20 25 30 35 0 10 20 30 40 50 60 70 Work load [kg] Work load [kg] Work load [kg] 7 Model

CNG

st or more 15 to 49 st 50 st or more 15 to 49 st 10 st or more 50 st or more D-H7/H7W D-H7BAL/H7NF 10 st or more 15 to 59 st 60 st or more 15 to 59 st 10 st or more 60 st or more D-C73C/C80C/H7C 10 st or more 15 to 64 st 15 to 74 st 65 st or more 15 to 64 st 15 to 74 st 10 st or more 65 st or more D-B5/B64/G5NTL 10 st or more 15 st or more 75 st or more 75 st or more 10 st or more 75 st

7.5

Z type 24 VDC: 7% to +10% 12 VDC: 4% to +10% T type 24 VDC: 5% to +10% 12 VDC: 6% to +10% Serial wiring: EX180 Response Time Type of actuation Response time ms (at 0.5 MPa) SJ2000 SJ3000 2 position single 2 position double 3 position 4 position dual 3 port valve 16 or less 10 or less 34 or less 30 or less 16 or less 10 or less 22 or less 30 or less Gateway system Serial transmission system

Digital Flow Switch

[Monitor unit: IP40] IP40 IP40 IP40 IP65 Dry air, N2, Ar, CO2 Fluid Air, N2 Air, N2 Dry air, N2 Dry air, N2 Dry air, N2 Setting Digital Digital Digital Digital Digital Digital Rated flow range 1 to 10 L/min 5 to 50 L/min 10 to 100 L/min 20 to 200 L/min 50 to 500 L/min 0.2 to 10 L/min 0.5 to 25 L/min 1 to 50 L/min 2 to 100 L/min 30 to 3000 L/min 60 to 6000 L/min 120 to 12000 L/min 0 to 0.5

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

17 140 14.5 10 17 160 13 10 17 180 14 10 17 200 14.5 10 17 D-Z7/Z80 D-A3/A44/A5/A6 D-A59W D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-F5/J5/F5W/J59W D-F5BAL/F5NTL/F59F D-G39/K39 12 13 7 7.5 8 6 6 7 7 7 6 6 5 5.5 5 11 11 10 10 10 Since this is a guideline including hysteresis, not meant to be guaranteed.

3

PF3W711/511-;10 p10 (at 100 L /min) PF3W711/511-;06 PF3W721/521-;14 p8 (at 50 L /min) (at 250 L /min) p6 p4 PF3W721/521-;12 PF3W711/511-;10 (at 50 L /min) p2 (at 250 L /min) p0 0 2 4 6 8 10 0 2 4 6 8 10 Straight piping length [cm] Straight piping length [cm] No data for 4 cm, or for under 5 cm, as these cannot be used due to piping dimensions. 5 Digital Flow Switch for Water Series PF3W 3

Digital Flow Switch (Integrated display type) ( compatible)

^-2 1: 10^-1 2: 10^0 3: 10^1 4: 10^2 5: 10^3 6: 10^4 7: 10^5 8: 10^6 AC_E_L (Setting L of the accumulated flow value conversion factor) Setting of the accumuated flow value conversion factor Unit specification (Unit): When "L" is selected. 1071 0x042F 0 R/W U8 2 Y 0: 10^-2 1: 10^-1 2: 10^0 3: 10^1 4: 10^2 5: 10^3 6: 10^4 7: 10^5 8: 10^6 Accumulated value setting AC_E_G (Setting G of the accumulated

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

MHR2-10/MDHR2-10 MHR2-20/MDHR2-20 50 60 Overhang distance H (mm) Overhang distance H (mm) Overhang distance H (mm) Overhang distance H (mm) 50 40 Pressure Pressure Pressure 40 External grip 30 0.2 MPa 0.2 MPa 30 0.3 MPa 0.3 MPa 0.4 MPa 20 0.4 MPa 20 0.5 MPa 0.5 MPa 0.6 MPa 10 0.6 MPa 10 0 10 20 30 40 50 0 10 20 30 40 50 60 Gripping point L (mm) Gripping point L (mm) MHR2-15/MDHR2-15 MHR2-

3 Port Solenoid Valve Metal Seal Series VZ200 1

10 With light/surge voltage suppressor (Lead wire length) 3-Rc1/8, 1/4 M5 x 0.8 Max.10 98 (Pilot EXH) M5 x 0.8 (Pilot EXH) 4-15-14 15 Series VZ400 Manifold Specifications Manifold Variations: VV3Z4 Model VV3Z4-50-061V100 Single base, B mount Common SUP/EXH type Max. 20 stations Manifold type Passage Valve stations SY VV3Z4-S50 Common exhaust VV3Z4-20 VV3Z4-30 VV3Z4-50 Manifold base model

MHK2

MHKL2-16D MHS 50 50 MHC 40 40 Gripping force (N) Gripping force (N) Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa MHT 30 30 0.5 MPa 0.5 MPa L L 0.4 MPa MHY 0.4 MPa 0.3 MPa 20 20 0.3 MPa MHW 10 10 0.2 MPa 0.2 MPa 0 0 MRHQ 10 20 30 40 50 60 10 20 30 40 50 60 Gripping point L (mm) Gripping point L (mm) Misc.

MHK2

10 MHW 0.3 MPa 0 0 MRHQ 10 20 30 40 50 10 20 30 40 50 60 60 Gripping point L (mm) Gripping point L (mm) Misc.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Nil Standard A Both ends adjuster P Note) Axial piping CS Extension

Auto Switch Guide

Auto Switch Internal Circuit D-Y59A, D-Y69A Weight DC (+) Brown (g) Main circuit of switch Main circuit of switch Main circuit of switch D-Y59B D-Y69B D-Y59A D-Y69A D-Y7P(V) Auto switch model OUT Black 0.5 9 10 10 Lead wire length (m) 3 50 53 53 5 83 87 87 DC () Blue D-Y7P, D-Y7PV Dimensions DC (+) Brown D-Y59A, D-Y7P, D-Y59B D-Y69A, D-Y7PV, D-Y69B Mounting screw M2.5 x 4l Slotted set screw

Series AP500

0.34 40 0.28 30 0.21 20 0.14 0 10 0.00 0.07 0 50 100 150 200 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Hydraulic Cylinders

Standard Strokes Bore sizes (mm) Standard strokes (mm) 20, 25 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 32 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75 40, 50, 63, 80, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Made to Order Hydraulic Fluid Compatibility Manufacture of Intermediate Stroke Cylinders Pages 10 to 12 Intermediate strokes in 5mm increments can be manufactured by installing spacers

Short Stroke Electric Actuator Series LX

D 4 4 6 6 E 60 90 90 90 F 30 60 60 60 G (50) (50) 100 100 Model LXFH5BC-25 LXFH5BC-50 LXFH5BC-75 LXFH5BC-100 Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 2kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 50 10 1 100 50 10 1 10 10 10.1 5.1 1.1 0.2 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s

VZ5000

Not available for GZ, HZ and DOZ 3-3-67 Series VZ5000 Specifications Applicable for cylinder actuation (up to 50). Compact size (Width: 18 mm) Low power consumption: 1.8 W DC Fluid Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 10 to 50C (No freezing. Refer to page 3-13-4.) 20 or less 50 or less 10 3 Refer to the table below.

Rotary Actuator/Vane Style Series CRB1

Series Model CDRB2BW 10 CDRB2BW 15 CDRB2BW 20 CDRB2BW 30 CDRB2BW 40 CDRBU2W 10 CDRBU2W 15 CDRBU2W 20 CDRBU2W 30 CDRBU2W 40 CDRB1BW 50 CDRB1BW 63 CDRB1BW 80 CDRB1BW100 Vane type Unit part no.

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

Minimum Stroke for Auto Switch Mounting (mm) 12 16 20 25 32 40 50 63 80 100 Auto switch model No. of auto switches mounted 1 pc. 10 5 D-A9 2 pcs. 15 10 D-A9V D-M9V 1 pc. 5 2 pcs. 10 1 pc. 15 10 5 D-M9 2 pcs. 15 10 1 pc. 15 10 D-M9W 2 pcs. 15 10 1 pc. 10 D-M9WV 2 pcs. 10 D-Z7 D-Z80 1 pc. 10 5 2 pcs. 15 10 D-Y59 D-Y7P 1 pc. 5 10 2 pcs. 15 10 D-Y69 D-Y7PV 1 pc. 5 2 pcs. 5 D-Y7W D-Y7WV 1 pc.