CRBU

Weight (g) CRBU2W10 CRBU2W15 CRBU2W20 CRBU2W30 90 CRBU2W40 90 Vane type Model (size) 180 180 270 180 270 270 90 270 90 180 270 90 180 Rotating angle Single vane Double vane 469 47.1 47.5 258 255 491 480 47 73 72 72 143 142 140 263 Body of rotary actuator Auto switch unit + 2 switches 30 60 46.5 50 30 Angle adjuster 30 150 203 47 90 90 90 100 90 100 100 100 90 100 90 Rotating angle 158 308

Electric Actuator / Slider Type 《 AC Servo Motor 》

by user PLC (CC-Link master unit) Power supply DC24V Battery LE-MR-J3BAT (accessory) Encoder cable Standard Robot Absolute Encoder (SSCNET III) option USB cable LEC-MR-J3USB Setup software Driver Main circuit power connector (accessory) Prepared by user (MR Configurator2TM) LEC-MRC2 Power supply 1-phase 100 to 120VAC (50/60Hz) 200 to 230VAC (50/60Hz) 3-phase 200 to 230VAC (50/60Hz) option

53

Item Unit Standard value Influence 10 s Corrosion Scale generation 5 s pH (at 25C) 6.0 to 8.0 v v Electric conductivity (25C) [S/cm] 100* to 300* v v Chloride ion (Cl) [mg/L] 50 or less v Sulfuric acid ion (SO42) [mg/L] 50 or less v 2 s Min. 1 s Standard item 0.5 s 0.2 s Acid consumption amount (at pH4.8) [mg/L] 50 or less v Total hardness [mg/L] 70 or less v Calcium hardness (CaCO3) [mg

Vacuum Module Series ZX

ZX 36 A VJ10 1.8 (Mounting hole) ZR Rated voltage Lead wire length Symbol Rated voltage Lead wire color Symbol L mm ZM Nil 6 10 15 20 25 30 1 300 100 VAC 50/60 Hz 110 VAC 50/60 Hz (115 VAC 60 Hz) Blue (2 pcs.) 600 3 Gray (2 pcs.)

CLK1

D-G5NTL 75 + 50 (n-2) 15 75 30.5 38 43 50 A B 0 (1) 0.5 2 2 D-A3 D-G3, D-K3 100 + 100 (n-2) 35 + 30 (n-2) 35 100 D-B5, D-B6 33.5 23.5 25 25 Approx. Hs 25.5 (28.5) 38 43.5 50.5 D-A4 35 + 30 (n-2) 50 + 50 (n-2) 35 55 A B 0 2 3.5 3.5 D-G5NTL 27 25 26.5 26.5 Approx. Hs 33.5 38 43.5 50.5 A B 0 1.5 1.5 D-A3 D-G3, D-K3 23 24.5 24.5 Approx.

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Note) Air flow capacity (scfm [ANR]) Applicable air compressor (kW) 50 Hz Model Power supply voltage (Frequency) Port size 60 Hz IDF1E 3.53 4.24 0.75 Single-phase 100 VAC (50 Hz) Single-phase 100/110 VAC (60 Hz) IDF2E 7.06 8.30 1.5 Rc3/8 IDF3E 11.3 13.1 2.2 IDF4E 18.4 20.1 3.7 Rc1/2 Single-phase 100/200 VAC (50 Hz) IDF6E 26.5 29.0 5.5 Single-phase 100/110 VAC, 200/220 VAC (60 Hz) IDF8E 43.1

Clamp Cylinder with Lock Series CLK1

D-G5NTL 75 + 50 (n-2) 15 75 30.5 38 43 50 A B 0 (1) 0.5 2 2 D-A3 D-G3, D-K3 100 + 100 (n-2) 35 + 30 (n-2) 35 100 D-B5, D-B6 33.5 23.5 25 25 Approx. Hs 25.5 (28.5) 38 43.5 50.5 D-A4 35 + 30 (n-2) 50 + 50 (n-2) 35 55 A B 0 2 3.5 3.5 D-G5NTL 27 25 26.5 26.5 Approx. Hs 33.5 38 43.5 50.5 A B 0 1.5 1.5 D-A3 D-G3, D-K3 23 24.5 24.5 Approx.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Double acting single rod only 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30 12, 16 5, 10, 15, 20, 25, 30 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches Mounting Bracket Part No.

Low Profile Guide Type

/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY3B CY3R CY1F25 CY1F25 CY1F25 CY1F25 CY1S 10 10 10 10 CY1L CY1H CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 CY1F CY1F 3 3 3 3 CYP CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 D0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 -X Piston speed

MXH

Vertical Horizontal l : Load eccentricity m Mounting orientation m L L Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Up to 300 Up to 100 Up to 500 Up to 100 Up to 300 Up to 500 Maximum speed (mm/s) (2) 50 (7) 100 (5) 50 (4) 100 (8) 200 (9) 100 (11) 50 (10) (1)

Fluoropolymer Tubing Variations

Note 6) Figures shown in tables are representative values, not guaranteed values. 502 Fluoropolymer Tubing PFA TLM/TILM Series RoHS Max. operating temperature: 260c KQ2 KQB2 KS KX 22 size variations 22 size variations KM Metric size 1/8" to 1 1/4" (9 sizes) 2 to 25 (13 sizes) KF Inch size M Length per roll 10 m, 20 m, 50 m, 100 m 10 m, 20 m, 50 m, 100 m 16 m (50 ft), 33 m (100 ft) Length

Series PF2W Digital Flow Switch For Water

Sensor 1 L/min 5 L/min 10 L/min 20 L/min 50 L/min 100 L/min 200 L/min 500 L/min Flow rate range 1 L/min 10 L/min PF2A510 0.5 L/min 10.5 L/min 5 L/min 50 L/min PF2A550 52.5 L/min 2.5 L/min 10 L/min 100 L/min PF2A511 105 L/min 5 L/min 20 L/min 200 L/min 210 L/min 10 L/min PF2A521 50 L/min 500 L/min 525 L/min 25 L/min PF2A551 Sensor Flow rate range Static Electricity

A_HEC-OM-K001

Table4-1 Quality standard for facility water (tap water) Item Standard value pH25oC 6.5 to 8.2 Electric conductivity (25oC) (s/cm) 100 to 800 Chloride ion (mgCl-/L) 200 or less Sulfate ion (mgSO42-/L) 200 or less Acid consumption (pH4.8) (mgCaCO3/L) 100 or less Total hardness (mgCaCO3/L) 200 or less Calcium hardness (mgCaCO3/L) 150 or less Quality item Ion silica (mgSiO2/L) 50 or less Iron

HRX-OM-X010

Table 7-1 Water Quality Standards for Fresh Water (Tap Water) Substance Facility water Circulating water spec. spec. pH (25 deg C) 6.5 to 8.2 6.0 to 8.0 Electrical conductivity (25 deg C) (s/cm) *Circulating fluid 1 to 500 100 to 800 0.5 to 300 Chloride ion (mgCl-/L) Max. 200 Max.50 Sulfate ion (mgSO42-/L) Max.200 Max.50 Acid consumption (pH4.8) (mgCaCO3/L) Max.100 Max.50 Total hardness (

Stopper Cylinder

Roller Type/Round Bar Type/ Chamfered Type Graph (1) Lever Type (With shock absorber) Friction coefficient = 0 Graph (2) Lever Type (With shock absorber) Friction coefficient = 0.1 Graph (3) 100 200 200 50 130 130 50 50 100 100 50 40 40 40 40 Example 1 30 40 50 40 50 Weight of transferred object m (kg) Weight of transferred object m (kg) Weight of transferred object m (kg) 20 30 30 Example

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

S 6 50, 100, 150, 200 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com "n" pcs. n 8 50, 100, 150, 200, 250, 300 12 50, 100, 150, 200, 250, 300, 350, 400 Auto switch type Nil Without auto switch Adjuster option Nil Rubber stopper B Shock absorber Metal stopper One

SMC Pneumatic Clean Series

, 75, 100, 125, 150 Relief type Vacuum suction type 1/8 25, 50, 75,100, 125, 150, 200 1/4 Not available 25, 50, 75, 100, 125, 150, 200, 250, 300 Non-lube Double acting, single rod Available Available 25, 50, 75, 100, 125, 150 1/8 25,50,75,100,125,150,200 1/4 25,50,75,100,125,150,200,250,300 Specifications Suction flow rate of vacuum suction type (Reference values) Bore size (mm) Item 20/25

Compact

Model N E F LXFHSB _ 25 1 5 1 160 138 60 30 (50) LXFHSB _ 50 176 145 90 60 (50) LXFHSB _. 75 6 201 210 188 90 60 100 LXFHsB _ 100 6 226 235 213 90 60 100 tlsclriD lclltolo 0inffsifls .

Rotary Cylinder Series MRQ

Graph (2) Cylinder Output on the Retracting Side (Double acting) 1500 150 Tube bore size [mm] 1000 100 40 Side load Balance weight 400 500 40 50 32 200 250 300 20 25 30 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 150 15 Allowable Side Load on the Piston End (Nm) 100 10 Stroke of linear part Size 40 40 50 4 5 100 75 50 40 30 25 20 15 10 5 32 32 40 9 10 11 12 12 13 13 13

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IKA DIE 1 V (mrn) (rom) 100 115 32 ! 71 43 19 14 190 230 15 M14x1.5,15 13 0125 Up to 1000 50 47 143 145 17 15 27 171 27 . t3 128 20 212 112 255 '15 'UpJo.1 QOO 50 47 157 1060 32 19 15 43 M14n.. ?