2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

25 6-M5 x 0.8 thread depth 10 (A, B, C common view) 50 3-5 depth 10 +0.02 0 16h9 0 0.043 (A, B, C common view) 2 10 38.5 22 (76) 70 11 25 2 12 0 0.05 5 0 0.03 5 0 0.03 4 Open: 37 Closed: 19 2-M5 x 0.8 thread depth 10 (Thread for mounting attachment) 25 25 7 7 10 10 12-5-16 17 2 Finger Rotary Actuated Air Gripper Series MHR2/MDHR2 With auto switch (Built-in magnet): MDHR2-30R 76 73 B 3-M5

Plate Cylinder with Lock Series MLU

Plate Cylinder with Lock Series MLU 25, 32, 40, 50 How to Order Without Auto Switch B 25 30 D F MLU B 25 30 D F J79W S MDLU With Auto Switch Number of auto switches Built-in magnet 2 pcs. 1 pc.

Support Guide/11-LEFG Series

0 ) depth 3 4 x M5 x 0.8 thread depth 8.5 38 50 3.5 3H9 (+0.025 0 ) depth 3 A (Table traveling distance) L 51 (52) 10 10 58 38 48 38.5 (48) 26 24 n x 4.5 Vacuum port Rc1/8 48 120 F D x 120 (= E) B Dimensions [mm] Dimensions [mm] Model L A B n D E F 11-LEFG25-S-50 180 57 160 4 20 11-LEFG25-S-100 230 107 210 Model L A B n D E F 11-LEFG25-S-450 580 457 560 10 4 480 35 11-LEFG25-S-500 630

PFMC.eng

[H_1] Hysteresis of OUT1 25 50 100 [F 3] [ r ES] Response time [ 1.0] 1 second Mounting screws Caution Knurled part [P_2] Set value of OUT2 [F10] [ SUb] Sub display [ oUt] Set value 500 250 1000 Reset the accumulated flow. (Press the and buttons simultaneously for 1 second or longer).

VXP21/22/23

LQ Thread type Nil T F N For 32A For 40A For 50A 32 40 50 Rc NPTF G NPT Flange LVN Refer to the table (1) given below for availability.

MXH Series Compact Slide

32 7 32 7 6 20 20 11 6 15 NS 15.5 52.5 + Stroke 68 + Stroke 32 4-M5 x 0.8 depth 8 10 + Stroke 15 20 Stroke (mm) LT NS LB J LA 5 20 64 4 10 10 20 10 64 4 15 74 25 20 4 20 74 25 4 20 25 40 84 4 30 30 40 30 84 4 40 20 94 50 20 6 50 104 70 25 6 25 60 70 114 6 30 30 36 Compact Slide MXH Series Auto Switch Specifications Auto Switches/Proper Mounting Position for Stroke End Detection A

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Shock absorber model Applicable bore (mm) CLS ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 RB1412 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 CLQ RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 MLGP Side Support RLQ Side support A MLU ML1C D-X 20Data Side support B A B C D E F G H J Part no.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Shock absorber model Applicable bore (mm) CLS ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 RB1412 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 CLQ RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 MLGP Side Support RLQ Side support A MLU ML1C D-X 20Data Side support B A B C D E F G H J Part no.

MXH

F Mp My MXH6 MXH6 0.2 0.18 0.16 0.14 0.12 0.1 0.08 0.06 0.04 0.02 0 0.14 60 50 60 50 40 0.12 Displacement (mm) Displacement (mm) 40 0.1 25, 30 25, 30 Stroke Stroke Stroke Stroke Stroke 0.08 15, 20 5, 10 15, 20 0.06 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 5

Series KP/KPQ/KPG

16 18.5 M L 8 12 KPQL12-00 KPGL12-00 31.4 7.5 25 50 40 20 20.9 Note 1) D indicates the maximum diameter.

Series KP/KPQ/KPG

16 18.5 M L 8 12 KPQL12-00 KPGL12-00 31.4 7.5 25 50 40 20 20.9 Note 1) D indicates the maximum diameter.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

Weight Material: NBR, Mounting: A [g] qWeight Difference by Mounting Style [g] ZHP63BMNA-C6S 184 ZHP80BMNA-C6S 224 ZHP63UMNA-C6S 167 ZHP80UMNA-C6S 175 B C D E F G H 20 5 14 7 25 1 11 wWeight Difference by Material [g] For the ZHPA-00 (without ejector), weight shown above 12 g.

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

bracket) are included with the above parts. 3 Series VCB Direct Operated 2 Port for Heated Water Dimensions (mm) 1in = 25.4mm Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G1/2 C R R E E B A H 2-P Port size 2-P A 2-M Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical

ML1

Cylinder EA Absorber model EB EC ED EF EY S T EH EI h i TT REA ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 4.5 3 MAX. 16.5 RB1412 120 107 30 25 16 93 73.2 15 38 49 5.5 6 MAX. 20 REC RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 5.5 6 MAX. 25 RHC Side Support MTS CC Side support A Side support B (mm) H G F J E Cylinder D Part No.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS 2 0 F A 1 1 M5 06 G Body size 1 AS 2 0 S F A 1 2 01 06 G Body size 2/3/4 Body size Made to Order Refer to page 678 for details. 2 1/8, 1/4 3 3/8 4 1/2 Push-lock type Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Note) Face seal method is used for the G thread type.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

0.022 (50% reduction) 0.044 25 200 32 0.036 (50% reduction) 0.072 30 450 40 0.027 (50% reduction) 0.053 37 500 MZero table clearance Table Clearance 300 mm Size Displacement due to table clearance [mm] High rigidity guide LEKFS LEFS 25 0 0.079 Amount of displacement from the 300 mm position 32 0 0.068 40 0 0.052 1 Electric Actuator High Rigidity and High Precision Slider Type LEKFS Series

PSxx-OMM0002CN

-2.312.31MPa 10.0-111.0kPa -121.0121.0kPa -29No.PS-OMM0002CN-F [F 5] <> [F 5] 1000 100 [F 5] MPa(ISE)kPa(ZSE)barpsi barpsi 23 [F 0] -30No.PS-OMM0002CN-F [F 7] 5R.D. <> [F 7] [F 7] -31No.PS-OMM0002CN-F [F 8] <> [F 8] [F 8] -32No.PS-OMM0002CN-F OUT1 AP1 (OUT1 AP1 1 AP2) OUT1 OUT1 OUT1 A1L A1H (A1L 1 AP2) OUT2 P_1H_1(n_1H_1)AP2 (OUT2 AP2 1 ) OUT2 OUT2 OUT1 OUT2

HRX-OM-W060

(This wiring is an example.) 13 25 14 1 D sub 25 female pin (socket) type Note: Prepare a cable tie. Fasten the signal cable to the mount on the base with the cable tie.

Compact Manifold Regulator

ARJ AR425 to 935 L 1.25 P=12.5 5.25 7.5 ARX AMR 35 25 ARM ARM 5.5 ARP L Dimension L=12.5 x n+10.5 IR-A 1 23 2 35.5 3 48 4 60.5 5 73 6 85.5 7 98 8 110.5 9 123 10 135.5 Symbol L IR 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 Symbol L IRV 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 Symbol L VEX 31 398 32 410.5 33 423 34

HRX-OM-Y098

(This is a wiring example.) 14 1 13 25 D sub 25 female pin (socket) type Note: Prepare a cable tie. Fasten the signal cable to the mount on the base with the cable tie.