7.5 Symbol Stations 02 18 Symbol Stations 02 08 2 stations 18 stations 2 stations 8 stations SS5J3-60PD2-06D 1 set (Manifold part no.) SJ3160-5CU-C6 2 sets (Single solenoid part no.) SJ3260-5CU-C6 2 sets (Double solenoid part no.) SJ3260-5CZJ-C6 1 set (Double solenoid, with switch part no.) SJ3260-5MZ-C6 1 set (Double solenoid, individual wiring/lead wire length 300 mm part no.)
Symbol Stations 02 18 Symbol Stations 02 08 2 stations 18 stations 2 stations 8 stations SS5J3-60PD2-06D 1 set (Manifold part no.) SJ3160-5CU-C6 2 sets (Single solenoid part no.) SJ3260-5CU-C6 2 sets (Double solenoid part no.) SJ3260-5CZJ-C6 1 set (Double solenoid, with switch part no.) SJ3260-5MZ-C6 1 set (Double solenoid, individual wiring/lead wire length 300 mm part no.)
Terminal blocks Manifold 1 row 1 to 4 stations 2 rows 5 to 8 stations How to Order Manifold VV5Q 08 C6 12 2 D T Option Symbol Option VQ0 VQ1000 (2) Check valve for prevention of back press. B (3) DIN rail mounting D (4) Series/Manifold Special wiring spec.
23.2 Mounting holes 22.2 Die cast hole For manifold gasket positioning 10.8 10.8 2-PE port 2 2 5 1 3 P (54.5) 2-G(PF)1/16 R port Rc(PT)1/8 P port 3 4 5 3 4 5 0 1 0 1 L plug connector (L): VQZ2 2 (R)wLwC4, C6, M5 DIN connector (Y): VQZ2 2 (R)wYwC4, C6, M5 Indicator light 148 <150> 300 (Lead wire length) 67.5 <68.5> Pg.7 32 <35.5> 155.5 MAX.10 71.5 Applicable cord O.D. 3.5 to 7 Indicator
Note Symbol 02 Stations 2 stations Double wiring specifications (1) 09 02 A, B port size (Metric) 9 stations 2 stations Specifications Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 C8 C10 C12 02 03 02F 03F M P, E port Applicable series Specified layout (2) One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8
stations 02 2 stations One-touch fitting for 6 C6 SX3000 (1) One-touch fitting for 6 C6 Double wiring specifications SX3000 (1) Double wiring specifications Mixed M Mixed M 08 8 stations 04 4 stations One-touch fitting for 4 C4 One-touch fitting for 4 C4 02 2 stations 02 2 stations One-touch fitting for 6 C6 One-touch fitting for 8 C8 Mixed M (2) One-touch fitting for 6 C6 One-touch fitting
Note 3) Note 4) 1.10-92 Single Unit How to Order Valve 0 Y 6 1 5 L C6 VQ1 Sub-plate SUP, Cylinder ports Series VQ1000 C3 C4 C6 M5 One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 M5 thread Configuration 2 position single 1 2 2 position double (latching) SY 3 position closed center 3 4 5 Note 1) See Options on p.1.10-91 for inch-size One-touch fittings.
One-touch fitting: SYJ5120-l llG H C4 C6 10 10.6 2-M3 X 0.5 (Mounting screw) 3.5 4 11 2-2.6 15 (Mounting holes) 19.5 58.2 16 3.5 62.3 (GZ, GS: 63.3) [63.3] A B 10.6 2-One-touch fitting (A, B port) Apricable tube C4: T0425 C6: T0604 R1 P C4: (3) C6: (3.2) 32.3 R2 21 5-M5 X 0.8 (Piping port) [ ] for AC Other dimensions are the same as the grommet style
Exhaust center: 4/2 5/3, Pressure center: 1 4/2 Note 2) ( ): Without sub-plate Note 3) For DC voltages.
The PFM is available in four maximum flow rate options 10, 25, 50 and 100 /min, and is suitable for use with air, nitrogen, argon or carbon dioxide. 2-color display flow switch., Sensor and monitor separation, which allows remote monitors centralization., Integrated flow adjustment valve as an option, reducing piping and saving space (unique feature in the market)., Operation indication
size C4 (4 Onetouch fitting) C4 (4 One-touch fitting) A, B port C6 (6 One-touch fitting) M5 x 0.8 Flow Rate Characteristics Flow rate characteristics Port size 1 4/2 (P A/B) 4/2 5/3 (A/B R) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8 1/8 1/8 1/8 1/4 1/4 1/8 0.46 0.62 0.79 0.55 0.59 0.74 0.71 0.55
Stations...3 2 1 Serial unit (D side mounting) SS5Z3-60SRID-05U-C6 . 1 set (manifold part number) SZ3160-5LOZ-C6. 2 sets (single solenoid part number) SZ3260-5LOZ-C6. 3 sets (double solenoid part number) The symbol indicates built-in.
fitting Applicable tubing O.D.: 6 C6 2 stations are needed to mount control unit.
: With One-touch fittings for 6 P, R ports Thread type Single solenoid (24 VDC) Series Stations SX3120-5G-C6 (2 set) Double solenoid (24 VDC) 3 SX3000 5 SX5000 02 Nil 2 stations Rc Blanking plate assembly SY3000-26-9A (1 set) Manifold base G 00F SX3220-5G-C6 (2 set) 7 SX7000 20 00N 20 stations NPT SS5X3-20-05 (5 stations) NPTF 00T Stations3 2 1 Connector assembly for L and M types Refer
Port size 1(P), 3(R) 2(A) 2 stations: 83 Addition per station: 19 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) Rc 1/8 Side/Top VV3QZ15-lll VQZ115 VQZ100 2 to 20 stations 2 stations: 126 Addition per station: 38 C4 (for 4) C6 (for 6) C8 (for 8) Rc 1/8 Rc 1/4 Side VV3QZ25-lll VQZ2l5 VQZ200 2 to 20 stations 1(P) port Rc 3/8 3(R) port Rc 1/4 2 stations: 209 Addition per station: 60 C6 (
2 to 20 stations Valve Rc Rc Rc 1 4 1(P), 3/5(R) port 4(A), 2(B) port 1 8 , C6, C8 1 8 Port size Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size Manifold C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port VV5Z5-20-01 VV5Z5-20-C6 VV5Z5-20-C8 VV5Z5-21-01 VV5Z5-21-C6 VV5Z5-21-C8 1/8 C6 C8 1/8 C6 C8 0.55 0.49 0.51 0.54 0.50 0.50
C VV5QZ 1(P), 3/5(R) 4(A), 2(B) Weight g Rc(PT) C3(3.2) Top 2 Stations: 64 VQZ120 2 VQZ1000 VV5QZ121/8 C4(4) Addition VQZ121 to S E R I E S C6(6) per 20 1 VQZ1000 2 VQZ2000 3 VQZ3000 M5(M5Thread) Station: 18 Stations Rc(PT) C4(4) Top 2 Stations: 86 VQZ220 2 VQZ2000 VV5QZ221/8 C6(6) Addition VQZ221 to 2 Body Ported M A N I F O L D T Y P E M5(M5Thread) per 20 Station: 26 Stations C Connector
fitting for 4) A, B port C6 (One-touch fitting for 6) M5 x 0.8 Flow Characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8 1/8 1/8 1/8 1/4 1/4 1/8 0.46 0.62 0.79 0.55 0.59 0.74 0.71 0.55 0.39 0.33 0.36 0.35 0.35 0.22 0.24 0.29 0.12 0.16 0.21
Blanking plate VVQ1000-10A-1 Individual SUP spacer VVQ1000-P-1-C6 SUP shutoff position: Specify 2 positions. Individual EXH spacer VVQ1000-R-1-C6 EXH shutoff position: Specify 2 positions.
C6: One-touch fitting for 6 VVQZ200-10A-2 VV3QZ22-05C 2.10-13 VQZ100/200/300 Body Ported Dimensions: VQZ100 VV3QZ12C Station (5.5) (35) Grommet (G) (11) 27 2-4.5 Mounting holes n-C3, C4, C6, M5 C3: One-touch fittings for 3.2 C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread (4.5) (7.5) 20 DIN rail clamp screw 5.5 U side n Manual override 5 A 2 A 2 A 2 A 2 4 P=10.5 (L4