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C OU n + o Example Insedton ol reststor +24V G;,,* | "'/ + r OrfDrill R Input terminal(CP) ]l 7 l ( l n p u l i m p e d a n c e ) Lir Approx. 4.7 hA \ I 0v OV ?aSlft'ss lcturtol,s ftm $wilc[ Pmnrulions I Bo sffB m md [sfom lildlilU AWarning 1. Confirm specifications.

Lead wire length symbols: Auto switches marked with are made-to-order specification. 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Auto switches other than those listed above are also available. Refer to page 11-8-9 for details.

min 0.525 L/min 150 L/min 2100 L/min () CO2 0.25 L/min 0.512.5 L/min 125 L/min 250 L/min N2Ar 0.210.5 L/min 1 0.526.3 L/min 152.5 L/min 2105 L/min 2 CO2 0.25.2 L/min 0.513.1 L/min 126.2 L/min 252 L/min N2Ar 010.5 L/min 1 026.3 L/min 052.5 L/min 0105 L/min 2 CO2 05.2 L/min 013.1 L/min 026.2 L/min 052 L/min / 0.01 L/min 0.1 L/min 0.1 L/min 0.1 L/min / 3 09 L / 1 L 0.1 L/Pulse 0.1 L/

A F L=200mm F F L=200mm A L L L L=200mm A MXW8, MXW12, MXW16 MXW8, MXW12, MXW16 MXW8, MXW12, MXW16 0.03 0.03 0.10 MXW12 MXW8 MXW16 MXW12 MXW8 MXW16 0.08 Table deflection quantity mm Table deflection quantity mm Table deflection quantity mm MXW12 MXW8 MXW16 0.02 0.02 0.06 0.04 0.01 0.01 0.02 0 0 0 100 75 50 25 100 20 40 60 75 50 25 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N =

[mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential Ammonium ion [mg/L] 0.1 or less 1.0 or less item Residual chlorine [mg/L] 0.3 or less 0.3 or less Separation carbonic acid [mg/L] 4.0 or less

IDX-OM-W014-C / Series IDU3E-10(-C,K,L,M,R,S,T) IDU3E-20(-C,K,L,M,R,T) IDU4E-10(-C,K,L,M,R,S,T) IDU4E-20(-C,K,L,M,R,T) IDU6E-10(-C,K,L,M,R,S,T) IDU6E-20(-C,K,L,M,R,T) IDU3E-23(-C,K,L,R,T,V) IDU4E-23(-C,K,L,R,T,V) IDU6E-23(-C,K,L,R,T,V) URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC ISO4414 * 1) JIS B8370 *2 ) *1) ISO 4414

A u s t i n , , Boston 'Charlotte : , Chicago :i,Cincinnati ::, cleveland : D a l l a s r Detroit , Indianapolis l\41 Los Angeles [V] Milwaukee Minneapolis lvlontreal ' N a s h v i l l e ' New Jersey ri Phoenix : Portland , Flichmond Fochester San Francisco St. Louis r' Tampa l, Toronto [M] 'r: Vancouver :,, Windsor (lndianapolls) SMC Corpordon olAme Da U.S.A.

Lead wire length symbols: 0.5 m Nil (Example) M9NWV 1 m M (Example) M9NWVM 3 m L (Example) M9NWVL 5 m Z (Example) M9NWVZ D-X 427 A CK1 Series Specifications Bore size (mm) 50 40 63 Fluid Air Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Minimum operating pressure 0.05 MPa Without auto switch: 10C to 70C With auto switch: 10C to 60C Ambient and fluid temperature Piston speed 50

Type Load voltage Wiring (Output) 3 (L) 1 (M) 0.5 (Nil) Auto switch model Band mounting DC AC Applicable load Lead wire length (m) Indicator light Electrical entry 5 (Z) M9B M9BW 5 V 12 V 24 V 2-wire Yes Grommet Solid state auto switch Relay, PLC A93 100 V Yes 12 V 24 V 2-wire Grommet Reed auto switch Note 1) Lead wire length symbols: 0.5 mNil M9BW 1 m M M9BWM 3 m L M9BWL 5 m Z M9BWZ

-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 (Mounting hole) Applicable tubing diameter M I J K L M N O P Model ZH05BS-06-06 ZH05BL-06-06 ZH07BS-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 60 12.8 3.2 26 5.8 2 32 60 12.8 3.2 26 5.8 2 32 75 15.3 4.2 28 7.5

*r-r-r --r| | | a High-speed | | | response time I I I specifications t t l | | t---{ Pressure display unit | | t--fMfi--l | | f--fkof/cm, l I I [s-f b "t| | I-+-fEr_--] | | tsT kp " ] t l t l I I Cable connector type I S I Straiqht tvpe 3 m I I L I Riqht anqle tvpe 3 m I I j N lWithout cable connector I l L-Bracket Model 7 . l00O tvoe v : 2000 tvoe Pressure [rPa 2 kqf/cm, 3 bar 4 PSI kPa

l m H B Bore size (mm) Clevis Knuckle Part No. d Bore size (mm) Part No.

-4 M30.5 0.9 6 LEHZ(J)16(L)K2-6 M40.7 1.4 6 LEHZ(J)20(L)K2-10 M50.8 3.0 8 LEHZ(J)25(L)K2-14 M61 5.0 10 LEHZ32K2-22 M61 5.0 10 LEHZ40K2-30 M81.25 12.0 14 17 - LEHF [Nm] LEHZ(J)10(L)K2-4 M30.5 0.9 LEHZ(J)16(L)K2-6 M30.5 0.9 LEHZ(J)20(L)K2-10 M40.7 1.4 LEHZ(J)25(L)K2-14 M50.8 3.0 LEHZ32K2-22 M50.8 3.0 LEHZ40K2-30 M61 5.0 [Nm] L[mm] LEHZ(J)10(L)K2-4 M40.7 1.4 6 LEHZ(J)16(L)K2-6 M40.7 1.4 6

Connector type A B D M8-3 pins M8-4 pins M12-4 pins CJP Lead wire length S 0.5 (m)(1.64 ft) CJ2 M 1.0 (m)(3.28 ft) Auto Switch Mounting Bracket Part No.

Connector type A B D M8-3 pins M8-4 pins M12-4 pins CJP Lead wire length S 0.5 (m)(1.64 ft) CJ2 M 1.0 (m)(3.28 ft) Auto Switch Mounting Bracket Part No.

11 L 11 L (SOL1) L+ 12 13 L+ 12 NOTE 8 (SOL2) Ex i Barrier 13 L+ (SOL PWR1) (SOL PWR2) TOP SW+ TOP SW BTM SW+ BTM SW Ui (Vmax) Ii (Imax) Pi (Pmax) Li Ci L 14 L 13 NOTE 8 L+ L 14 16 L+ 14 Uo (Voc) Ui (Vmax) Io (Isc) Ii (Imax) Po Pi (Pmax) 15 L 15 16 L+ L+ 16 17 L L+ 18 Notes 1.

min 1 to 20 L/min PA(P) Average discharge pressure 0 to 0.4 MPa 0.2 to 0.5 MPa (for 0 to 60C) Pilot air pressure PAX Air consumption 230 L/min (ANR) or less PB Dry Up to 1 m (inside the pump is dry) Suction lift Wet Up to 4 m (with fluid inside the pump) PAF PAF 80 dB (A) or less (excluding the noise from the quick exhaust and solenoid valve) 80 dB (A) or less (Option: with silencer, AN20

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% VS4 VQ7 EVS Conditions VFN Base mounted Series MB Series CS1 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 Base mounted Series MB Series CS1 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 SGP (Steel