PF3A7

Port size Symbol Port size Rated ow range 03 06 12 10 1 14 1 1/2 20 2 Output specification Symbol OUT FUNC2 Applicable monitor unit model CS NPN Analog voltage output3 External input4 PFG300 series DS NPN Analog current output External input4 PFG310 series ES PNP Analog voltage output3 External input4 PFG300 series FS PNP Analog current output External input4 PFG310 series 2 Analog output

Series AR-B 10- 21- Regulator Series ARK-B 10- Regulator with 21- Backflow Function

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 30 40 50 60 25 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N F Thread type e Rc NPT G + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 3) H Note 2) a Without mounting option With bracket

HAA

8 B 3 8 B 1 2 Thermometer for outlet air temp.

Speed Controller: Standard Type Series AS In-line Push Locking Type 1

Retainer prevents an accidental loss of needle AS3500-02 AS3500-03 Model Resin handle AS3500-02-2 AS3500-03-2 Metal handle Specifications 1/4 3/8 Port size 40, 50, 63 Applicable cylinder bore size (mm) 1.5 MPa Proof pressure 1 MPa Max. operating pressure 0.05 MPa Min. operating pressure Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

Speed Controller: Standard Type Series AS In-line Push Locking Type 1

Retainer prevents an accidental loss of needle AS3500-02 AS3500-03 Model Resin handle AS3500-02-2 AS3500-03-2 Metal handle Specifications 1/4 3/8 Port size 40, 50, 63 Applicable cylinder bore size (mm) 1.5 MPa Proof pressure 1 MPa Max. operating pressure 0.05 MPa Min. operating pressure 5 to 60C (No freezing) Ambient and fluid temperature 8 turns Number of needle rotation 130 g (Metallic

Speed Controller: Standard Type In-line Push Locking Type AS Series

Retainer prevents an accidental loss of needle AS3500-02 AS3500-03 Model Resin handle AS3500-02-2 AS3500-03-2 Specifications Metal handle Port size 1/4 3/8 Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1 MPa Min. operating pressure 0.05 MPa Ambient and fluid temperature 5 to 60C (No freezing) Weight 130 g (Metallic handle: 140 g) Flow rate (L/min (ANR)) 810 Free flow Sonic conductance

Speed Controller: Standard Type In-line Push Locking Type AS Series

Retainer prevents an accidental loss of needle AS3500-03 AS3500-02 Model Resin handle AS3500-02-2 AS3500-03-2 Specifications Metal handle Port size 1/4 3/8 Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1 MPa Min. operating pressure 0.05 MPa Ambient and fluid temperature 5 to 60C (No freezing) Weight 130 g (Metallic handle: 140 g) Flow rate (L/min (ANR)) 810 Free flow Sonic conductance

(50%)Karman vortex0.5 to 4 l/min0 to 1 MPa1.5 MPa0 to 90C (with no cavitation)?

Table of Contents

2 1 1 1 1 1 L, H -X 1 X416 20LH, HL 1 1 1 2 1 1 Data L, H, LS, SL, HS, SH L, H X417 LH, HL Note 1) For LS, SL, HS and SH, the stroke adjusting unit is mounted on one side only.

5 Port Solenoid Valve

VVQC1000-P26-1 VVQC1000-P20-1 No.

High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Compact 5-Port Solenoid Valve

(A)4 2(B) (A)4 2(B) 4(A) 2(B) (EA)5 1 3(EB) (EA)5 1 3(EB) (P) (P) 3-position pressure center 5(EA) 3(EB) 1(P) (A)4 2(B) N.O. valve x 2 pcs. 2(B) 4(A) (EA)5 1 3(EB) (P) 3(EB) 5(EA) 1(P) N.C. valve, N.O. valve x 1 pc. of each 2(B) 4(A) 3(EB) 5(EA) 1(P) Component Parts No.

0.4

VQ 0 5 1 1 0 1 VP4 CE-compliant Series VQ 1/2 VQ 1/2 VV5Q11-08C6SV VQ1100-51 VQ1200-51 VQ1300-51 VVQ1000-10A-1 1 setManifold base part no. 2 setsValve part no. (Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 1 setValve part no. (Station 7) 1 setBlanking plate part no.

0.4

VF KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 16 18 20.5 22 16 18 20.5 22 32 35 39 43 32 35 39 43 6 8 10 12 6 8.5 10 11.5 VP4 VQ 1/2 VQ 4/5 Port plug VVQ1000-58A VQC 1/2 VQC 1/2 The plug is used to block the cylinder port.

Electric Actuator with Integrated Guide

1.

Battery-less

1 !

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

P Note 1) U S U S U S U S w AXT100-1-J 20 Note 1) AXT100-1-FU15 AXT100-1-FS e Note 1) Top entry connector for PU, JU while side entry connector for PS, JS.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

P Note 1) U S U S U S U S w AXT100-1-J 20 Note 1) AXT100-1-FU15 AXT100-1-FS e Note 1) Top entry connector for PU, JU while side entry connector for PS, JS.

HRX-OM-X010

of Model Label . 1-7 1.5 Safety Measures . 1-8 1.5.1 Safety Precautions . 1-8 1.5.2 Safety Interlock system . 1-9 1.5.3 Lockout/Tagout . 1-10 1.5.4 Protective equipment . 1-12 1.6 Emergency Measures. 1-13 1.6.1 Emergency off [EMO] switch . 1-13 1.7 Waste Disposal . 1-15 1.7.1 Disposal of refrigerant and compressor oil. 1-15 1.7.2 Circulating fluid disposal. 1-16 1.7.3 System disposal . 1

EXxx-OMY0004

msec 1 1 1 100 msec Bit 5 Bit 4 Bit 3 Value for ON feedback delay time for Zone M 0 0 0 Reserved 0 0 1 Reserved 0 1 0 Reserved 0 1 1 5 sec 1 0 0 1 sec 1 0 1 500 msec 1 1 0 200 msec 1 1 1 100 msec Bit 6 Output feedback for Zone M 0 Disable 1 Enable Bit 7 Reserved 55 No.EX##-OMY0004 Table 10-9 Byte2 Output feedback parameter zone 1 for Safety Mode (Module Passivation/xxx) Bit 2 Bit 1 Bit 0