Process Valve

Port 12 (P1) Port 10 (P2) Working Principle (Vacuum pilot type is excluded) 1 4 1 4 VNB0 , 1 (N.C.) When the pilot solenoid valve u is not energized (or when air is exhausted from the port P1 of the air operated type), the valve element r linked to the piston t is closed by the return spring y.

212

Applicable model LVR20 LVR40 LVR50 03 3 x 2 LVR20 LVR40 LVR50 03 1/8" x 0.086" 04 4 x 3 05 3/16" x 1/8" 06 6 x 4 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 12 12 x 10 13 1/2" x 3/8" 19 19 x 16 19 3/4" x 5/8" LQ3 Metric size Inch size Symbol Applicable tubing size Applicable model Symbol Applicable tubing O.D.

VKF300

O.D. 4 to 6.5 78.5 Max .10 71.5 71 Light (DZtype only) 67.5 59 32 17 2 2-4.5 (mounting holes) P 19 35 P Pg.7 2-Rc(PT) 1/8 (ports P) A A A 11 20 26 49 Approx. 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152

Air preparation filter

Specifications 3-1.AFF Series Model AFF70D AFF80D AFF90D Port size 1, 1 1/2 1 1/2 1 1/2, 2 Weight 3.4kg 4.7kg 5.0kg Fluid Compressed air Inlet air pressure range 0.1 to 1.0MPa (1.6MPa) Note1) Scope Operating fluid temperature -5 to 60OC (No freezing) Ambient temperature -5 to 60OC (No freezing) Proof pressure 1.5MPa (2.4MPa) Note1) Air flow capacity m3/min(ANR) Note2) 7.0 11.0 14.5 Rated

25

is clear water (viscosity of 1 mPas, specific gravity of 1.0) and solenoid valve cycle is 5 Hz.> When the total pump head is required instead of the discharge pressure, a discharge pressure of 0.1 MPa corresponds to a total pump head of 10 m. Selection procedure 1.

A_HEC-OM-J017

Symbol Terminating resistance FG FG FG Connector Connector Connector shell shell shell 2201/2W + + + 1 1 1 2 2 2 5 SG 5 SG 5 SG Figure1-1 Communication Connection (RS-485) Host Computer Thermo-con RS-232C RS-232C Symbol Pin No.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 1/8" O.D. 5/32" 5/16" 5/32" 1/4" Meter-out type Meter-in type Inch size 3/16" 5/16" 3/8"

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

x 0.8 M6 x 1.0 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note 1) Threaded through hole is used for the standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm stroke.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note 1) Threaded through hole is used for the standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm stroke.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

2 stations: 126 Addition per station: 38 N3T (5/32) N7T (1/4) N9T (5/16) 1/8 NPTF 1/4 NPTF Side VV3QZ25VQZ2 5 VQZ200 2 to 20 stations N7T (1/4) N9T (5/16) N11T (3/8) 1/4 NPTF 1(P)Port 3/8 NPTF 3(R)Port 1/4 NPTF 2 stations: 209 Addition per station: 60 Side VV3QZ35VQZ3 5 VQZ300 2 to 20 stations Note) Threaded port type.

Air Cylinder Series MB

1.5 0 40 12 11 7 4.5 0 0.5 3.5 4 0.5 9.5 8.5 4.5 2 1 1.5 0 50 12.5 11.5 7.5 5 0 1 4 4.5 1 10 9 5 2.5 1.5 2 0 63 12.5 11.5 7.5 5 0 1 4 4.5 1 10 9 5 2.5 1.5 2 0 80 15.5 14.5 10.5 8 2.5 4 7 7.5 4 14 13 9 6.5 5.5 6 2.5 100 15.5 14.5 10.5 8 2.5 4 7 7.5 4 14 13 9 6.5 5.5 6 2.5 125 17.5 16.5 12.5 10 6 6 9 9.5 6 17.5 16.5 12.5 10 9 9.5 6 Types without air cushion have different values for auto switch

Series CE1

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No. No.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

l \ l l / v \ d l / t , . 1 , \ 1 b d t / . , , . , \ 1 6 -;i;-5*1-rTNVZ3420 NVZ3440 ^^n+irrr. umiint^ 4r&.q+\rh *"s* NVZs120-OM-M5 NVZ3540 Wry NVZ3140-OM-017 NVZ352O Model Body type )a of aqtuation ry:,:' sl:c i 2 position Single N\23120-OO-n5 o.2 0.17 Double Nvzlt220-OO-r5 o.2 0.26 (120) 3 position Closed center N\rz3it20-OO-[|5 0.18 0.43 (195) 10-32 Nom.

Slide Tables MX Series

Caution 1.Do not use in atmosphere where the actuator is in direct contact with liquid such as cutting oil. 1.

MGP-OM0242Q

Refer to How to Order for the standard model numbers. 12, 16 1 to 249 Applicable stroke 20, 25, 32 1 to 399 mm) 40 to63 5 to 395 Part no.: 12-MGPL20-39Z A spacer 1 mm in width is installed in the 12-MGPL20-40Z. C dimension is 77 mm. Example 6 6. Precautions on Selection 1) Confirm the specifications.

1

6 1/8 1/4 3/8 Internal External Female thread (Rc, NPT) XSA1 1 x 106 1.3 x 109 1.3 x 1011 XSA2 XSA3 Face seal fitting Compression fitting Female thread (Rc, NPT) 1 Normal Close High Vacuum Solenoid Valve XSA Series *1 *1 Excluding grommet/AC How to Order Face seal fitting Compression fitting XSA 2 1 1 2 S 5 G Face seal fitting Compression fitting 1 1 1 P 5 G XSA 2 Female thread type Female

MRHQ

Confirm that this value is less than 1/20 of the effective torque.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

4 @1 w !8 w !8 w @1 !4 !3 @1 !4 !3 !8 q !6 !5 y e o r !0 !6 !5 y e o i r q !9 r u e y o i !0 i t !2 q !1 @0 !7 t !2 u !1 !7 !0 t !2 !7 !1 !5 !6 Component Parts Description Note Description No. Material Material Note No.

Speed Controller with

Applicable tube Inch Size Tube size 5/32" 1/4" 5/16" 3/8" 1/2" 01 03 07 09 11 13 Applicable series 1/8" TMH-01J TMH-03J TMH-07J AS1002F AS2002F AS2052F AS3002F AS4002F TMH-07 TMH-09 TMH-10 TMH-13 Dimensions Model Metric size Inch size D2 D1 H1 H2 H3 H4 H5 L1 L2 L3 Symbol TMH-01J TMH-03J TMH-23J TMH-04J TMH-06J 1/8J 4 5/32J 6J 1/4J 6 1/4 8 5/16 10 12 1/2 8.5 9.4 11.7 12.1 13.1 13.5 15.5 18.8

Single Axis Electric Actuator Serriies LJ1S Slider Guide

2 3 4 5 Transfer load m (kg) 30 L2 20 L2 (mm) Mer m Rolling Yawing 10 L2 0 1 2 3 4 5 Mer Transfer load m (kg) m 30 a = 1000 a = 500 20 L3 (mm) a = 2000 L3 10 m Mey a 0 1 2 3 4 5 Transfer load m (kg) Refer to page 145 for deflection data. 88 Standard Motor/Horizontal Mount Specification Series LJ1S10 Dimensions/LJ1S101SC Scale: 15% 10 6 Work piece mounting reference plane 80 5H10 depth 8