5 Port Solenoid Valve, Series VQC

5 Port Solenoid Valve Series VQC Lateral Plug-In Manifold Style Wide Range of Electrical Entries Manifold Options Conforming to 1P67 NEW CONCEPT Connector Type Manifold Series VQC1000/2000/4000 Outstanding response times and long life Conforming to IP67 for protection from dust and moisture (Metal seal: Single type with light and surge suppressor) VQC1100: 10ms 2ms; 200 million cycles VQC2100

Flow Control Equipment

Male thread Suitable screw torque (Nm) Hexagonal width (mm) Adjustable spanner nominal (mm) 1/4 4.5 M3 M5 10/32-UNF 100 1/6 8 150 7 to 9 14 1/8 200 12 to 14 17 1/4 200 22 to 24 21 3/8 200 28 to 30 24 1/2 1Nm=10.2kgf/cm Tightening torque for lock nuts Caution qSuitable screw torque for a hexagon lock nut is shown in the table below.

MGF

5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 300mm Graph 4 l = 200mm Graph 3 v = 150mm/s or less Graph 7 v = 200mm/s or less Graph 8 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 10 50 40 50 40 MGF63 MGF100 MGF63 Load weight m0 (kg) Load weight m0 (kg) Load

PSE530/200

SET Proceed to the auto shift mode. 16-3-15 15 Series PSE530/200 Operation 3: Special Setting 3 Auto shift Refer to C Auto shift function on page 16-3-17 for details.

VT325

(Values at the initial period) VT325-C VT325-G JIS Symbol Solenoid Specifications Grommet, Conduit, DIN terminal, Conduit terminal 100, 200 VAC, 50/60 Hz, 24 VDC 15 to +10% of rated voltage 75 VA 60 VA 27 VA 17 VA 12 W Electrical entry Coil rated voltage Allowable voltage fluctuation 50 Hz 60 Hz 50 Hz 60 Hz Inrush AC Apparent power (3) Holding DC Power consumption (3) Note 3) At rated voltage

Precision Cylinder Series MTS

8 @1 r @4 w 12 to 40 @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w Rod cross section for 12, 16, 20, and 25 Rod cross section for 32 and 40 With end lock 12 to 40 y !7 !6 q !0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Parts list No. 1 2 3 4 5 No. Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Description Qty. Note Material Qty.

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

L TX TV TK Round type/CJ-CR MM TDH10 A TY TT C0.5 TW RR L N Material: SUS304 W Part no.

REFRIGERATION AIR DRYERS, AIR COOLING SYSTEM, Series PDE

9.7 / 7.1 / 11.5 / 325 275 200 Nominal electric absorption [A / W] 2.2 / 170 2.7 / 210 3.3 / 250 4.3 / 330 5.9 / 450 6.1 / 470 Max. electric absorbtion [A / W] 2.9 / 220 3.4 / 260 4.3 / 330 5.6 / 430 7.8 / 600 8.0 / 620 Fan electric absorption [A / W] 0.30 / 27 0.54 / 40 Acoustic pressure level at 1 mt [dbA] < 70 Weight [lb / Kg] 75 / 34 82 / 37 86 / 39 90 / 41 95 / 43 99 / 45 Correction

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

(Initial value) Solenoid Specifications Note 3) The weight W is the value for the manifold only. To obtain the weight with solenoid valves, add the solenoid valve weights for the required number of stations. Refer to the separate catalog ES11-75B regarding DIN rail weight.

EXxx-OMZ0016

Problem 3 Red ON OFF Red Flashing W-SS W-SS LED flashes red or orange or is off Problem 4 Orange Flashing OFF Green Flashing Red Flashing Red ON W-NS W-NS LED does not turn on green. Problem 5 Red Green Alternate Flashing OFF Red Flashing W-MS W-MS LED does not turn on green.

Slit Valve

The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Air Cooled Aftercooler Series HAA 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 to 50 Indoor Three phases 200 VAC (50/60 Hz) Three phases 200 VAC (50/60 Hz) Single phase 100 VAC (50/60 Hz) Single phase 200 VAC (50/60 Hz) Single phase 100 VAC (50/60 Hz) Three phases 200 VAC (50/60 Hz) Power source 90 130 0.4 0.45 1.44 1.4 50 60

IIIIIIIIII

K = WITH ADJUSTING KNOB W/S = WITH 1/4" SHAFT W/0S = FLUSH SHAFT Back to Top .

Modular Type Filter Regulator Series AW

w w t t t q q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

RSQ

1 w o @0 !7 i !9 !

High Purity Fluoropolymer

Rotate the lever assembly w to align the holes on the lever assembly w and the base e. Insert the lever pin q into the holes to fix the lever assembly w. 1 y Tubing !1 Holder assembly replacement screw i Holder assembly r Insert pin assembly u Fitting nut Place the insert bushing t on the insert pin assembly r. t Insert bushing 2 !

MQQ

W Mounting orientation: Horizontal Operating pressure: 0.5 MPa Allowable Lateral Load at Rod End Standard Type: MQQTB Anti-lateral Load Type: MQQLB/Built-in Ball Bushing Type 60 5 50 4 Maximum allowable lateral load W (N) Maximum allowable lateral load W (N) 28 40 3 28 25 30 25 2 20 20 20 16 16 1 10 10 10 30 60 75 100 30 60 75 100 Stroke (mm) Stroke (mm) Note 1) The allowable lateral load

MQQ

3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

Modular Type Air Filter Series AF

1 Drain q r e w t i u y o !0 !

ZR

to 0.45 W.