SMC Corporation of America
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SetPoint1 bit(16) 16 bit 3 Y 3 1 R/W 0x4000 BDC3 2 R/W SetPoint2 bit(0) 16 bit 3 Y 3 (16384) Logic bit(24) 8 bit 0 Y 4 1 R/W 0x4001 2 R/W Mode bit(16) 8 bit 0 Y 5 BDC3 (16385) 3 R/W Hysteresis bit(0) 16 bit 10 Y 1 to 400 SetPoint1 bit(16) 16 bit 3 Y 3 1 R/W 0x4002 BDC4 2 R/W SetPoint2 bit(0) 16 bit 3 Y 3 (16386) Logic bit(24) 8 bit 0 Y 4 1 R/W 0x4003 2 R/W Mode bit(16) 8 bit 0 Y 5 BDC4 (

M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm J D side G1/4 port part Tightening torque: 10 1 Nm K G e w q Note) H r q w e Note) e w q Note) F q w E C A U side B D M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm Block Assembly C: 2 port valve manifold block assembly Manifold block assembly for gate valve D: 3 port valve manifold block assembly

Symbol B W BU N Color Black White Blue Translucent 3. The minimum bending radius indicates the value, at which the tubing gets bended at the temperature of 20C.

200 W 400 W 100 W 200 W 400 W Type AC servo motor (S2) AC servo motor (S3) AC servo motor (S4) AC servo motor (S6) AC servo motor (S7) AC servo motor (S8) C S1 S3 S41 SSCNET III type (For absolute encoder) Incremental S S5 S7 S81 Power supply voltage Absolute 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz 1 Not applicable for Series LEY Dimensions LECSAm 40 135 2 x 6 Mounting hole

M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm J D side G1/4 port part Tightening torque: 10 1 Nm K G e w q Note) H r q w e Note) e w q Note) F q w E C A U side B D M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm Block Assembly C: 2 port valve manifold block assembly Manifold block assembly for gate valve D: 3 port valve manifold block assembly

Indicated contents A R W R a n g e Sets integral operation range of PID control. If this value is set less than PB range, the set temperature cant be achieved. Therefore set it above PB range. M O D E < 1 . 1 C Function <5> I constant setting: Mode indication I Constant Default value: 150 sec. Setting range 1 to 999 sec.

r w e e VXF26C<w w r r e q e q VXF26D<w r w e q e q Component Parts Component Parts No.

ZSM 18 NPN Open Collector 1 output w/ analog output, 3 revolution adjustment Lead wire length PFl 0.6m 19 NPN Open Collector 1 output w/ analog output, 200 revolution adjustment 3m 30 IFl 55 PNP Open Collector 1 output w/o analog output, 200 revolution adjustment 5m 50 ZSE1/ISE1 Specifications ZSE1 101kPa to 0 ISE1L 0 to 100kPa ISE1 0 to 1MPa Model Operating pressure range 200kPa 1MPa Max

1 e w w y y q q !2 !2 IN OUT IN OUT u r t i u r t i Component Parts Material AWG20K AWG30K AWG40K Note No. Description Body 1 ZDC ADC Platinum silver Bonnet 2 PBT Black Handle 3 POM Black Replacement Parts Part no. AWG20K No.

(kg) Fig. (2) Overhang: Ln (mm), Correction Values for Moment Center Distance: An (mm) Pitch moment Yaw moment Roll moment W My Mr Mp W W W L3 A5 L1 A1 Adjusting bolt Static moment L2 A3 W MX Mp Mr My MTS W W W MY L1 A2 L3 A5 W L2 A4 CY Mey Note) No need to consider this load factor in the case of using perpendicularly in a vertical position.

If W-AREA1 >W-AREA2, the "Parameter ALM" alarm will be Basic parameter "Stroke (-)" W-AREA1 W-AREA1 "Stroke (+)" Basic parameter "Stroke (-)" W-AREA2 W-AREA2 activated. However if W-AREA1= W-AREA2 = 0, WAREA will be OFF and no alarm will be generated.

If W-AREA1 >W-AREA2, the "Parameter ALM" alarm will be Basic parameter "Stroke (-)" W-AREA1 W-AREA1 "Stroke (+)" Basic parameter "Stroke (-)" W-AREA2 W-AREA2 activated. However if W-AREA1= W-AREA2 = 0, WAREA will be OFF and no alarm will be generated.

,E,E1,E2,E3,E4,G,M)-(1,2,3,6,8,J,N,R,W,Z,ZA)-D AC40B,C,D -(F,N)02~(F,N)04(C,D,E,E1,E2,E3,E4,G,M)-(1,2,6,8,J,N,R,W,Z,ZA)-D AC40(A)-(F,N)06(C,D,E,E1,E2,E3,E4,G,M)-(1,2,3,6,8,J,N,R,W,Z,ZA)-D AC40B,C,D-(F,N)06(C,D,E,E1,E2,E3,E4,G,M)-(1,2,6,8,J,N,R,W,Z,ZA)-D AC50(A)-(F,N)06(F,N)10(C,D,E,E1,E2,E3,E4,G,M)-(1,2,3,6,8,J,N,R,W,Z,ZA)-D AC50B-(F,N)06(F,N)10 (C,D,E,E1,E2,E3,E4,G,M)-(1,2,6,8,J,N,R,W,Z,

moment Static moment L2 A3 W MXH Mp Mr My MXU W W W MXS L1 A2 L3 A6 W L2 A4 MXQ Mey Note) No need to consider this load factor in the case of using perpendicularly in a vertical position.

specification 2: AC200-220V Cooling method W: Water-cooled Cooling capacity 006: 600W 012: 1200W 4.2 Manufacturing years method of display SERIAL No.

A 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 ALBA90-10 ALBA90-20 1.17-24

LEF How to Order LEJ 11 Vacuum type LEJS 11 40 S2 A 500 H LEL Clean series q w e r y u i o !0 !