10

2 (n = 4, 8, 12, 16) Note 2) 75 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 80 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 85 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 95 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 100 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface) 1 45 50 55 60 70 75 D-A9lV n 45 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 50 + 30 (n 4) 2 (n = 4, 8, 12,

CJ2

4 !

JIS Standard Hydraulic Cylinder

4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) 15 125 140 150 2 (Different surfaces), 1 130 160 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 15 + 55 125 + 55 140 + 55 150 + 55 130 + 55 160 + 55 D-F5NT n (n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) 15 110 125 135 2

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

ZP3

B N S U F GN GS HS 04 06 08 UM A10 U2 6.5 0.9 M-5AU-2 Width across flats 7 U4 8.5 1.8 M-5AU-4 ZP3 T 10 13 16 A12 U2 6.5 0.9 M-5AU-2 U4 8.5 1.8 M-5AU-4 U6 10.5 2.5 M-5AU-6 A 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber, HS: Semiconductive silicone rubber 2 Indicates the minimum hole size of the adapter or vacuum pad Vacuum inlet

MXQ

50 55 62 N 4 4 4 4 6 6 8 8 8 G 22 22 22 22 17 18 37 56 H 46 46 46 56 56 56 59 62 NN 2 2 2 2 3 3 4 4 4 GA 18 18 18 22 48 73 74 96 118 HA 50 50 50 56 48 56 112 118 124 I 16 16 16 16 18 23 25 18 21 J 46 46 46 56 72 100 155 190 215 K 31 41 51 61 71 96 121 146 171 KA 126 183 211 239 NA 4 4 4 4 4 8 8 8 8 M 94 94 94 104 122 155 212 240 268 Z 92.5 92.5 92.5 102.5 120.5 153.5 210.5 238.5 266.5

Cylinder with Lock

n 70 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 75 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 80 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 85 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 90 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 2 (Different surfaces, same surface) 1 45 50 55 60 70 D-A9mV n 45 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 50 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 55 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 60 + 30 (n 4) 2 (n =

7

VXS 8A 1/2 10 10A 1/4 VXB 15A Stainless steel A N.O. 3/8 B Grommet 100 VAC With surge voltage suppressor 1/2 VXE C 110 VAC G H J K 3/8 D 200 VAC 4 10A C37 N.C. VXP 1/2 E 230 VAC 15 15A 3/8 Stainless steel B N.O. F VXR 24 VDC 1/2 G DIN terminal 24 VDC L M 5 20A C37 N.C. VXH With surge voltage suppressor 3/4 20 H 100 VAC C N.O. Stainless steel J 110 VAC VXF 6 25A N.C.

HEC_W-E

Temp. upper/lower 4 Fig.9-3 limit alarm occurrence 9-1 Alarm 9.2 Alarm indication Blink E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig.9-1 Alarm indication in the event ERR14 arises Blink E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig.9-2 Alarm indication in the event ERR14 arises during PB range setting input Light W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E N

Slider Type Ball Screw Drive/11-LEFS Series

For details about fixing method, refer to Wiring/Cables in the Electric Actuators Precautions. o Actuator cable length Nil Without cable 1 1.5 m 3 3 m 5 5 m 8 8 m* LER Nil: Left LEH LEY -X5 !0 Controller/Driver type*1 A 10 m* 11LEFS 11LEFS C 20 m* !

Stroke Reading Cylinder and Counter

Dimensions for auto switch model D-F79W. 662 Stroke Reading Cylinder CE1 Series CE1L Foot type: Bore size Stroke CEP1 LT LE CE1 CE1 LH 3.2 CE2 LB LA 4 x O 4 x LD LX LZ LS + Stroke (Special cap bolt) A + Stroke ML2B LY CE1F Rod side flange type: Bore size Stroke 4 x FD FT FV M FX FL 4 x O A + Stroke FZ (Special cap bolt) FG CE1G Head side flange type: Bore size Stroke 4 x FD FT FV M FL FX

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

: Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) a = 2000 m 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 N9 N11 02N 03N 02T 03T M 1/8" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting 3/8" One-touch fitting 5/16" One-touch fitting 3/8" One-touch fitting NPT 1/4 NPT 3/8 NPTF 1/4 NPTF 3/8 Mixed 3.2 One-touch fitting 4 One-touch

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(A) 2 1 (P) 3 (R) VQZ200/300 Metal seal type Rubber seal type 4 3 2 1 4 3 2 1 N.C. N.C. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) 4 3 2 1 4 3 2 1 N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Parts list Material Part Numbers No.

Tie-rod Type Hydraulic Cylinder

F GA T a M GB V Cushion adjustment screw Air release 4 x J CHK R (max.)

Environment

1 Cable length* [m] !

•

~~~l Wilh n pes (Same surface) 2 (n 2, 4, 6. S .. ) (" =4. S. 12 IS.. ) (n =4. S. 12. 16.. -) D-F59F With 2 pes (DJleren1 sunaces. 145 155 35 ~~~= m ~e~w= rt~'=~ ~).~ ~~'~~I~P' '--+-___ -cc-~_-+_ _~-;c-_~_-,=-~-_ D-F5NTL In 35+ 55 'n 2) 145 +55 ;4> 155+55 In2 4> 2 With n pes.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

4 83 73 5 4 x 30 l Polished round 20 CDP-7A 100 250.065 0.117 4 88 78 5 4 x 36 l Polished round 24 Dd9 m l L * Split pins and flat washers are included.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Q1 = M L2 = L2 + (3 x P) 3. L1 + (3 x P) L2 + (3 x P) 4. L2 = Q2 = M L1 = 5. Q2 = M 6.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M4: L2 = 8 mm Applicable shaft types: S, W, Y L1 L1 = Q1 = M LL LL L2 = Q2 = M Q1 (mm) (mm) Size Size Keyway dimensions 30 50 63 80 100 30 50 63 80 100 Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 2.5 4 5 4 5 6.8 2.5 4 5 (mm) 4 5 6.8 6.8 8.5 10.3 8 LL 3 5 5 5 5 Key groove