Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

mm Note 1) D Model L Applicable tubing O.D. mm Weight g M 2-Applicable tubing TPH TPS 37.4 18 4 4 4 10.4 KPH04-00 4 L L2 L1 D D 39.6 19.5 10 10 6 12.8 KPH06-00 6 M M L 44.4 21.5 26 18 10 15.2 KPH08-00 8 48.6 24 41 29 15 18.5 KPH10-00 10 50.6 25 58 46 18 20.9 KPH12-00 12 Note 1) D indicates the maximum diameter.

5 Port Solenoid Valve SY Series

) (66) 47.6 (5.5) (49.5) (42.5) 31.5 [38.5] 24.5 + 16.1 (P port) 1/4 2 18 0.9 (23.9) EA P EB For manifold gasket positioning 22.2 die-cast hole (EA, EB port) 1/8 36 L plug connector (L): M plug connector (M): DIN terminal (D): M8 connector (W0): 3 4 5 3 4 5 3 4 5 3 4 5 SY7 20-L(-F2) C8, N9 C10, N11 SY7 20-D(-F2) C8, N9 C10, N11 SY7 20-W0(-F2) C8, N9 C10, N11 SY7 20-M(-F2) C8, N9 C10, N11

ZX

Ordering example) Lead wire length 5A 10 ZS ZCU Lead wire length (For DC) Nil 6 10 15 20 25 30 0.3 m (Standard) 4A 20 VJ10 6 AMJ 0.6 m 1 m 1.5 m 2 m 2.5 m 3 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire connector part numbers. Nil 30 50 0.6 m 3 m 5 m (For 100 VAC) 1A 36 VJ10 6 Misc. ZX1051-K15LOZ-EC 1 pc.

44

I.D. 3 x Applicable tubing 1/8" (3.18) 0.086" (2.18) KFG2T0122-00 11 1.1 7 8 13.3 5 1.5 d H2 H2 H2 H1 0.098" (2.5) 5/32" (4) KFG2T0325-00 11 1.6 7 8 13.3 5 1.8 M 1/4" (6.35) 5/32" (3.95) d KFG2T0704-00 26 6 10 12 16.5 6 3.3 L 5/16" (8) 0.236" (6) KFG2T0906-00 39 17 12 14 18.7 6.6 5.3 M L M L 3/8" (9.53) 1/4" (6.35) KFG2T1163-00 70 19 15 17 22.2 7.6 5.6 1/2" (12.7) 3/8" (9.53) KFG2T1395-00

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

) M plug connector (M) 1 (P) 3 (R2) VQZ1000 M plug connector (M) 0.2 0.35 (A) 4 1 (P) 5 (R) DIN connector (Y) DIN connector (YZ) VQZ2000 N.C.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

valve A 78 [mm] Model A PF2M705/710/725/750W-m(-L) 91.2 PF2M711/721W-m(-L) 93 29.9 28 38.5 3 Panel thickness 1 to 3.2 Panel Fitting Dimensions 94 or more1 24 +0.5 0 74 +0.5 0 34 or more 4 x R3 or less 4 x R3 or less 4 x R3 or less Panel thickness 1 to 3.2 mm 1 This is the minimum value when the rear ported type is selected for the piping entry direction.

CE

0 u @8 @4 !2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

Aluminum High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

Shock Absorbers and Rate Controls

1.44 6 (1R)0ttlt2.0lllx2 8.90 9,55 2.88 M64x2 0.75 2.00 2.25 5.50 2.7 5 1.89 2.00 0l2.0lllx4 12. 13.55 2.88 M 6 4 x 2 0.7 5 2.00 2.25 /.50 3.i5 3.00 0tM2.0lilx6 17.97 18.62 2.88 M 6 4 x 2 0.75 2.38 2.38 9.50 4.75 I.89 3.00 0ult3.0tttx2 9.66 10.43 3.88 M 8 5 x ? 0.88 2.7 5 3.00 2.71 2.25 1.02 0 l3.0lrtx3.5 12.12 t3.49 3.88 l!

CE

Local Area: (800) 258-9200-www.stevenengineering.com 4-FD RHC MK(2) FT FV M RS Q G FX FL RS H A 4-O (Special cap bolt) A + Stroke FZ FG RZQ Head side flange style: MI W S CE1G Bore size Stroke 4-FD CEP1 CE1 FT FV M CE2 FL FX ML2B A + Stroke 4-O (Special cap bolt) FZ FG C J G5-S Double clevis style: CE1D Bore size Stroke CV MVGQ 4-O CC CX +0.4 +0.2 CZ 0.1 0.3 RB J CD hole H10 Shaft d9 CU T

Rotary Actuator

CRB1 L1 L1 = L1 = L1 Q1 = M Q1 = M L1 = L1 MSU Q1 = M Q1 = M W1 = CRJ L1 = Q1 CRA1 CRA1 Q1 Q1 Q1 L1 K axis T axis J axis X axis CRQ2 X = [mm] [mm] L3 = L1 = Size Thread 30 50 63 80 100 M3 x 0.5 2.5 M5 x 0.8 4 4 M6 x 1 5 5 M8 x 1.25 6.8 6.8 6.8 M10 x 1.5 8.5 8.5 M12 x 1.75 10.3 10.3 Rc1/8 8 8 Rc1/4 11 Size Thread 30 50 63 80 100 M3 x 0.5 2.5 M5 x 0.8 4 4 M6 x 1 5 5 M8 x 1.25

10

2 (n = 4, 8, 12, 16) Note 2) 75 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 80 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 85 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 95 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 100 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface) 1 45 50 55 60 70 75 D-A9lV n 45 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 50 + 30 (n 4) 2 (n = 4, 8, 12,

CJ2

4 !

JIS Standard Hydraulic Cylinder

4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) 15 125 140 150 2 (Different surfaces), 1 130 160 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 15 + 55 125 + 55 140 + 55 150 + 55 130 + 55 160 + 55 D-F5NT n (n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) 15 110 125 135 2

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

ZP3

B N S U F GN GS HS 04 06 08 UM A10 U2 6.5 0.9 M-5AU-2 Width across flats 7 U4 8.5 1.8 M-5AU-4 ZP3 T 10 13 16 A12 U2 6.5 0.9 M-5AU-2 U4 8.5 1.8 M-5AU-4 U6 10.5 2.5 M-5AU-6 A 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber, HS: Semiconductive silicone rubber 2 Indicates the minimum hole size of the adapter or vacuum pad Vacuum inlet

MXQ

50 55 62 N 4 4 4 4 6 6 8 8 8 G 22 22 22 22 17 18 37 56 H 46 46 46 56 56 56 59 62 NN 2 2 2 2 3 3 4 4 4 GA 18 18 18 22 48 73 74 96 118 HA 50 50 50 56 48 56 112 118 124 I 16 16 16 16 18 23 25 18 21 J 46 46 46 56 72 100 155 190 215 K 31 41 51 61 71 96 121 146 171 KA 126 183 211 239 NA 4 4 4 4 4 8 8 8 8 M 94 94 94 104 122 155 212 240 268 Z 92.5 92.5 92.5 102.5 120.5 153.5 210.5 238.5 266.5

Cylinder with Lock

n 70 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 75 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 80 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 85 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 90 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 2 (Different surfaces, same surface) 1 45 50 55 60 70 D-A9mV n 45 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 50 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 55 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 60 + 30 (n 4) 2 (n =

7

VXS 8A 1/2 10 10A 1/4 VXB 15A Stainless steel A N.O. 3/8 B Grommet 100 VAC With surge voltage suppressor 1/2 VXE C 110 VAC G H J K 3/8 D 200 VAC 4 10A C37 N.C. VXP 1/2 E 230 VAC 15 15A 3/8 Stainless steel B N.O. F VXR 24 VDC 1/2 G DIN terminal 24 VDC L M 5 20A C37 N.C. VXH With surge voltage suppressor 3/4 20 H 100 VAC C N.O. Stainless steel J 110 VAC VXF 6 25A N.C.

HEC_W-E

Temp. upper/lower 4 Fig.9-3 limit alarm occurrence 9-1 Alarm 9.2 Alarm indication Blink E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig.9-1 Alarm indication in the event ERR14 arises Blink E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig.9-2 Alarm indication in the event ERR14 arises during PB range setting input Light W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E N