Modular F.R.L. Units

50C for the products with the digital pressure switch 10 AC10-A Series AC20-B to AC60-B Series Flow Rate Characteristics (Representative values) Condition: Inlet pressure of 0.7 MPa AC10-A M5 x 0.8 AC20-B Rc1/4 AC25-B Rc3/8 0.6 0.6 0.6 Outlet pressure [MPa] Outlet pressure [MPa] Outlet pressure [MPa] 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 500 1000 1500 0 200 400 600 800

33

W: 800 [W] w Derive the heat generation amount from the power supply output.

Compact Vacuum Unit

(30 m/s2) Without sensor/switch With sensor Enclosure Vibration resistance Note 1) 66 ft/s2 (20 m/s2) (With switch) Note) Push-locking type only for the latching type Without sensor/switch With sensor 490 ft/s2 (150 m/s2) Impact resistance Note 2) 330 ft/s2 (100 m/s2) (With switch) Note 1) 10 to 500 Hz for 2 hours in each direction of X, Y and Z (During de-energizing) Note 2) 3 times in

JXCx-OMY0004

Movement Speed Position Acceleration Deceleration Force Value Area 1 Area 2 In pos force speed force mode mm/s (mm) mm/s2 mm/s2 (mm) (mm) (mm) mm/s 0 1 Absolute 100 100.00 1000 1000 50 40 10 100 0 0 5 2 Absolute 50 50.00 1000 1000 0 0 0 100 0 0 0, 1 (E.g.) Flow chart Controller (1) Select/input Step No.1.

Vacuum

Material N N B R S Silicone rubber u urethane rubber F Fluorine rubber GN Conductive NBR (s2-o 16) GS Conductive silicone (s2-o16) Material N N B R s silicone rubber u _ urethane rubber F Ftuorine rubber GN Conductive NBR (o2-o16\ GS Conductive silicone (@2-@'16) Pad type (application: Refer to list O) U Flat type c Ftat with rib D Deep type B Bellows type Pad type U Flat type c _ Flat vYith

Air Catch Sensor Series ISA

without control unit and bracket mounted, Others 30 m/s2, whichever is smaller for 2 hours in X, Y, Z direction each (De-energized) Vibration resistance Impact resistance Without control unit and bracket mounted: 980 m/s2, Others: 150 m/s2 in X, Y and Z direction, 3 times each (De-energized) Nil: Rc 1/8, N type: NPT 1/8, F type: G 1/8 Port size Lead wire (Individual wiring type) 4 cores,

JXCx-OMY0008

Movement Speed Position Acceleration Deceleration Force Value Area 1 Area 2 In pos force speed force mode mm/s (mm) mm/s2 mm/s2 (mm) (mm) (mm) mm/s 0 1 Absolute 100 100.00 1000 1000 50 40 10 100 0 0 5 2 Absolute 50 50.00 1000 1000 0 0 0 100 0 0 0, 1 (E.g.) Flow chart Controller (1) Select Step No.1.

JXCx-OMY0006

Movement Speed Position Acceleration Deceleration Force Value Area 1 Area 2 In pos force speed force mode mm/s mm mm/s2 mm/s2 mm mm mm mm/s 0 1 Absolute 100 50.00 1000 1000 0 0 0 100 0 0 0.1 2 Relative 50 10.00 1000 1000 0 0 0 100 0 0 0.1 (E.g.) Flow chart Controller (1) Select/input Step No.1.

HEC_001W-E

C 10 20 30 800 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. Fig. 5-6 Cooling capacity *The Radiating water flow rate of 1L/min is for reference. Radiating water Temp.20 Ambient Temp.20 Fluid water 1000 Cooling capacity W 5 Radiating water flow rate L/min 800 1 3 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp.

VG342

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Passage symbol 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz External pilot Nil VT N.C. (Normally closed) A N.O.

ALB900

AV Flow rate (m3/min (ANR)) AU Inlet pressure 0.5 MPa AF Inlet pressure 0.4 MPa Piping AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Warning IR If installing an air tank, install it upstream of the bypass oil feed adapter.

ZSE1/ISE1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS ZSM PF2 IF Data Can be integrated with ZM ejector system.

Refrigerated Air Dryers

355 427 IDF240D JIS 10K FF 100 (4B) Flange 770 1550 1640 385 703 730 700 800 355 592 The auto drain is enclosed in the same shipping package as the main body.

High performance type Step Motor Controller (Servo/24 VDC)

reach to the Speed (Unit: mm/s2) The setting to define the pushing operation or the positioning operation.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

reach to the Speed (Unit: mm/s2) The setting to define the pushing operation or the positioning operation.

1.1

SEMI S8 SEMI S8 is a guideline on ergonomics which is more detailed than the ergonomic requirements in Section 14 of SEMI S2. SEMI F47 SEMI F47 is a SEMI standard which stipulates guidelines regarding voltage sag immunity. Semiconductor manufacturers require this standard for temperature control equipment, just like SEMI S2.

Step Motor Controller (Servo / 24 VDC)

to the Speed (Unit: mm/s2) The setting to define the pushing operation or the positioning operation.

DOC1023126

(Unit: mm/s2) to 10 Deceleration 5000 5000 Sets the deceleration to reach the moving speed. (Unit: mm/s2) to 10 Selects the pushing operation or the positioning operation from the set value. For the pushing operation, this value specifies the force to be generated as a percentage of the maximum pushing force. (Unit: %) The maximum pushing force depends on the electric actuator.

MY2

Do not drop, bump or apply excessive impacts (300m/s2 or more for reed switches and 1000m/s2 or more for solid state switches) while handling. Although the body of the switch may not be damaged, the inside of the switch could be damaged and cause a malfunction.

CRB2/CRBU2/CRB1

Static torque calculation Tf = F x L (Nm) Load . g = 9.8m/s2 F: Pressing force (N) : Angular acceleration Load .