AMR3000 to 6000

Rc NPT G Nil N F Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Construction Working principle The compressed air from the air source passes from the IN side through the top of element y and flows inward.

ISG

5 Wiring Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Warning 1. Do not have the internal wiring attached to the connection lever for switch operation. It may malfunction.

ZSP1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS ZSM PF2 IF Data Can be integrated with ZX ejector system.

High Purity Fluoropolymer Needle Valve Series LVN 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Orifice dia. 4.4 8 10 Body class 2 3 4 2 3 4 Port B (OUT) different dia. size Symbol Nil Application Port A & B same size Different diameter tubing can be selected within the same body class. Refer to the applicable tubing table to the left.

TL/TIL

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bundle 100 m 50 Ft. (16 m) 100 Ft. (33 m) 2 m Straight pipe Color Translucent (color of material) Applicable fluid Please refer to the applicable fluid in page 41.

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZFC101-03 5/32" 10 11.5 ZL ZFC101-07 1/4" 20 Inch size ZFC201-07 1/4" 30 ZY 21.5 ZFC201-09 5/16" 50 ZQ Note) Flow rate when initial pressure drop is 3 kPa or less.

ZU

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF ZP ZCU AMJ Misc.

W2M/4M

VDC Pressure Characteristics Pressure Characteristics 1 i 6 _ 102 9 s 3 o t 5 o 1000 2000 3000 4000 5000 F ow rale f/min(ANBI 20 30 40 200 400 600 400 looo Fow rale i/m n(ANF) 1 3 1 102 e7 T3 d 7 3 58 a a a 29 1 5 1 5 o 4 8 1 2 1 6 2 A 2 4 2 8 400 800 1200 1.in 2004 2400 200 400 600 800 1000 Belief flo\i/ i.

Main Body Peripheral Component: Peripheral Components, Input Power Supply: AC Single Phase 100-115V, Position Detection: Absolute, Motor Type: AC servo motor (S6), Controller/driver type: Pulse input type

Main Body Peripheral Component: Peripheral Components, Input Power Supply: AC Single-Phase 200-230V, Position Detection: Absolute, Motor Type: AC servo motor (S6), Controller/driver type: Pulse input type

Main Body Peripheral Component: Peripheral Components, Input Power Supply: AC Single Phase 100-115V, Position Detection: Absolute, Motor Type: AC servo motor (S6), Controller/driver type: CC-Link direct input type

Main Body Peripheral Component: Peripheral Components, Input Power Supply: AC Single-Phase 200-230V, Position Detection: Absolute, Motor Type: AC servo motor (S6), Controller/driver type: CC-Link direct input type

Main Body Peripheral Component: Peripheral Components, Input Power Supply: AC Single Phase 100-115V, Position Detection: Absolute, Motor Type: AC servo motor (S6), Controller/driver type: SSCNET III type

Main Body Peripheral Component: Peripheral Components, Input Power Supply: AC Single-Phase 200-230V, Position Detection: Absolute, Motor Type: AC servo motor (S6), Controller/driver type: SSCNET III type

Table Accuracy: Basic, Size: 10, Max. Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: S (Standard Cable), Actuator Cable Length: 5 (5)

Table Accuracy: Basic, Size: 30, Max. Rotation Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: S (Standard Cable), Actuator Cable Length: 5 (5)

Table Accuracy: H (High Precision), Size: 30, Max. Rotation Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: S (Standard Cable), Actuator Cable Length: 5 (5)

Table Accuracy: Basic, Size: 30, Max. Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: S (Standard Cable), Actuator Cable Length: 5 (5)

Table Accuracy: H (High Precision), Size: 50, Max. Rotation Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: S (Standard Cable), Actuator Cable Length: 5 (5)

Table Accuracy: Basic, Size: 10, Max. Rotation Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: S (Standard Cable), Actuator Cable Length: 5 (5)