XLA Series

H 5 Initial power/ Power 100 VAC 800/180 1200/300 1600/400 200 VAC 3200/180 4800/300 6400/400 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for the size 16 models.

XLA- ∗ -F7NJ ∗ - ∗ Series

H 5 Initial power/ Power consumption (W) 100 VAC 800/180 1200/300 1600/400 200 VAC 3200/180 4800/300 6400/400 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for the size 16 models. 200V The heaters are PTC thermistor type design.

HRX-OM-M005

Table 8-9 Compliance EMC Directive 2004/108/EC Low Voltage Directive 2006/95/EC Machinery Directive 2006/42/EC CE Marking Overvoltage Category Category 2 (IEC60664-1) Pollution Degree Degree 2 (IEC60664-1) SEMI S2-0706S8-0308F47-0706 HRZD Series 8.7 Compliance 8-19 HRX-OM-M005 Chapter 8 Appendix Serial No.

XLF Series

H 5 Initial power/ Power consumption (W) 100 VAC 800/180 1200/300 1600/400 200 VAC 3200/180 4800/300 6400/400 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for the size 16 models. 200V The heaters are PTC thermistor type design.

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Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

Example) For setting the gripping force to be at least 20 times the work weight; Required gripping force = 0.05 kg x 20 x 9.8 m/s2 = 10 N min.

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

Built-in magnet for auto-switches CV MVGQ Maximum Driving Speed of Cylinders 1000 1000 900 900 Cylinder speed (mm/s) Cylinder speed (mm/s) 800 800 Load factor: 10% Load factor: 50% 700 700 600 600 500 500 400 400 300 300 200 200 100 100 0 12 16 20 25 32 40 50 63 80 100 0 SYJ3000 VZ3000 VZ5000 VF3000 Bore size (mm) Series Variations Bore size (mm) Standard stroke (mm) Applicable valve series

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

Example) For setting the gripping force to be at least 20 times the work weight; Required gripping force = 0.05 kg x 20 x 9.8 m/s2 = 10 N min.

MHY2/MHW2

(PAT.PEND) Over length Lmm Holding mement Weight g Bore size mm Model Nm L 300 20 0.30 MHW2-20D 68 510 25 MHW2-25D 0.73 78 905 32 MHW2-32D 1.61 93.5 2135 40 MHW2-40D 3.70 117.5 5100 50 MHW2-50D 8.27 154 At the pressure of 0.5MPa Auto switch mounting at 4 locations MHZ2 MHZJ2 Two finger styles available.

VT307

VS Surge voltage suppressor mounting part VFN Surge voltage suppressor Electrical entry JIS Symbol G Grommet, 300 mm lead wire H Grommet, 600 mm lead wire D DIN terminal E Grommet terminal T Conduit terminal Manifold Applicable manifold type Accessory Function plate (DXT152-14-1A) Note) Mounting screw (NXT013-3) Model VO307 Common or individual exhaust Note) It is not applied to Continuous

Vacuum Module Series ZX

ZX 36 A VJ10 1.8 (Mounting hole) ZR Rated voltage Lead wire length Symbol Rated voltage Lead wire color Symbol L mm ZM Nil 6 10 15 20 25 30 1 300 100 VAC 50/60 Hz 110 VAC 50/60 Hz (115 VAC 60 Hz) Blue (2 pcs.) 600 3 Gray (2 pcs.)

180° Angular Style Air Gripper Series MHY2/MHW2

Example) For setting the gripping force to be at least 20 times the work weight; Required gripping force = 0.05 kg x 20 x 9.8 m/s2 = 10 N min.

VCA

Note 2) Vibration resistance Conditions when tested with one sweep of 10 to 300 Hz in the axial direction and at a right angle to the armature, in both energized and deenergized states. No malfunction occured when tested.

ZX

ZX 36 A VJ10 ZR Rated voltage Lead wire length ZM (Mounting hole) Symbol L (mm) Symbol Rated voltage Lead wire color Nil 6 10 15 20 25 30 1 300 100 VAC 50/60 Hz 110 VAC 50/60 Hz (115 VAC 60 Hz) Blue (2 pcs.)

4

Non-locking push type Unrestricted 150/50 m/s2 Make sure that dust and/or other foreign materials do not enter the valve from the unused port (e.g. exhaust port).

ChemicalThermo-con

(0.35MPa) With leakage detection function Operating temperature range:50 to 140F (10 to 60C) Temperature stability: 0.18F (0.1C) Cooling capacity (with water): 300W, 500W, 750W International standards: SEMI Standard S2-0706, F47-0706 Environment friendly: RoHS 171 Allows direct control of chemical temperature. Allows direct control of chemical temperature.

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

valve Air/Inert gas 0.7 MPa 0 MPa/101.2 kPa ON: 4 ms 1, OFF: 2 ms 1 10 to 50C Note 2) Valve specifications Electrical specification Minimum operating pressure / Vacuum Response time Note 1) L plug connector Base mounted L plug connector Body ported Ambient and fluid temperature Lubrication Manual override Impact / Vibration resistance Note 3) Not required Non-locking push type 150/30 m/s2

Low Profile 2/3-Port Solenoid Valve

[Inrush] Rated voltage [Holding] 1 2 35% (SX090) 42% (SX9 ) of rated voltage 0 V 100 10 ms T1 (ON) (2 s or more) T2 (OFF) Energized condition -8- Dimensions 2-port SX91/Normally closed SX92/Universal 10 Base hole dimension 4.5 0.05 2 x M2 x 0.4 Thread depth: 6 or more 9.8 0.3 7.4 38.1 (Lead wire AWG#26) 300 5 5 10 3.4 +0.05 0 2 x 3 (Port hole dimension) (4.5 0.05) 10.3 8.4 8.3 8.9 C0.2 or

High Vacuum L Type Valve

H 5 Initial power/ Power 100 VAC 800/180 1200/300 1600/400 200 VAC 3200/180 4800/300 6400/400 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for the size 16 models.

XLG Series

H 5 Initial power/ Power consumption (W) 100 VAC 800/180 1200/300 1600/400 200 VAC 3200/180 4800/300 6400/400 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for the size 16 models. The heaters are PTC thermistor type design.

180

Example) For setting the gripping force to be at least 20 times the work weight; Required gripping force = 0.05 kg x 20 x 9.8 m/s2 = 10 N min.