Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41 13-/22-MXS6-10 13-/22-MXS6-20 13-/22-MXS6-30 13-/22-MXS6-40 13-/22-MXS6-50 780 MXS 1322Air Slide Table Dimensions: MXS6 13221322Axial piping (6): MXS6-P 26.3 Max. 5.6 Operating port 2 x M3 x 0.5 12 5.5 11.5 8 Other dimensions are the same as those of basic type. 781 MXS 1322Air Slide Table Dimensions: MXS6L / Symmetric Type 1322Air

HEC_W-E

-5-3 FIG. 5-4 DISPLAY -5-4 FIG. 5-5 RESERVOIR CAP -5-4 FIG. 6-1 COOLING CAPACITY OF HEC006 -6-3 FIG. 6-2 HEATING CAPACITY OF HEC006 -6-3 FIG. 6-3 PUMP CAPACITY OF HEC006 -6-4 FIG. 6-4 PRESSURE LOSS OF HEC006 -6-4 FIG. 6-5 COOLING CAPACITY OF HEC012 -6-5 FIG. 6-6 HEATING CAPACITY OF HEC012 -6-5 FIG. 6-7 PUMP CAPACITY OF HEC012 -6-6 FIG. 6-8 PRESSURE LOSS OF HEC012 -6-6 FIG. 9-1 ALARM INDICATION

Programless controller Step motor (servo 24 VDC)

JXC-OMU0029-A 6.

Cylinder with Lock

y @8 #6 e t u i !

CL

6 !7 !8 !

HRX-OM-W038

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-W038 Contents 6.3 Option T [High-pressure pump] . 6-2 6.3.1 Option T [High-pressure pump] . 6-2 6.4 Optional Accessories [Electric resistivity /conductivity

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Use the manifold specification sheet to specify. 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 SI unit output no. SI unit output no.

Slider Type Ball Screw Drive/11-LEFS Series

[mm] Dimensions Model L A B n D E Without lock With lock 11-LEFS32l-50l 332 384 56 180 4 11-LEFS32l-100l 382 434 106 230 4 11-LEFS32l-150l 432 484 156 280 4 11-LEFS32l-200l 482 534 206 330 6 2 300 11-LEFS32l-250l 532 584 256 380 6 2 300 11-LEFS32l-300l 582 634 306 430 6 2 300 11-LEFS32l-350l 632 684 356 480 8 3 450 11-LEFS32l-400l 682 734 406 530 8 3 450 11-LEFS32l-450l 732 784 456

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

1u @7 @6 q!7 $1 y#6 #5 @0 $3 @5 @4 @9 #3 #7 @1 @3 #2!6 #0!4!3 !2 !9 #9 #8!5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

45 50 5 6 6 8 8 8 8 10 21 25 25 27 149 153 155 191 The bracket is shipped together.

Micro Mechanical Valve Series VM1000

Panel mounting hole T.T. 23 16.5 1.5 1.5 3 18.5 Max. 6 M5 x 0.8 (Pilot exhaust port) PE EXH.1 SUP.

CQS

4 6 6 4 21 Bore size (mm) 20 6 6 1.5 (1) 3.5 3.5 22.5 10 7.5 2.5 10 7.5 24.5 25 7 7 3.5 (1) 5.5 5.5 24.5 11 9.5 0.5 11 9.5 26.5 ( ): Denotes the values of D-A93.

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

) M-5-4-P01 Cap nut C3604 (With electroless nickel plated) M-01H-6, M-5H-6 M-5HL-6, M-5HLH-6 M-5-6-P01 200

ITV

74 64 2 x 6 ERR PWR 38 27 15 ERR PWR 2 x 3.5 Mounting hole 4 x 3.5 Mounting hole L-bracket (Option) Flat bracket (Option) M8 x 1 Cable connection thread 15 6 50 82 73 Breathing hole Note) 3.7 3.7 (M3 x 0.5) 1 VACz OUT port (4, 5/32) VAC port (4, 5/32) 13.7 OUTx 13.7 3 5 ATMc 2 5 ATM port (4, 5/32) 3 6 7 3.5 L-bracket (Option) Flat bracket (Option) 19 Port Location No.

Slider Type/Ball Bushing Bearing

Technical Data 1519 A CY1L Series Auto Switch Mounting Proper Auto Switch Mounting Position (Detection at stroke end) Operating Range (mm) Bore size Auto switch model 6 10 15 20 25 32 40 D-A7 /A8 D-F7 /J7 6 6 6 6 6 6 6 3 3 4 3 3 3 3.5 D-F79F 4.5 4.5 4.5 4.5 4.5 4.5 4.5 Since this is a guideline including hysteresis, not meant to be guaranteed.

JXCx-OMT0062

Brown 2 A B-1 Red 1 A A-1 Cable length (L) Orange 6 B B-2 Yellow 5 B A-2 1.5m 1 Green 3 COM-A/COM B-3 Blue 4 COM-B/ A-3 3m 3 Shield Cable color Terminal no. 5m 5 Vcc B-4 Brown 12 GND A-4 Black 13 A B-5 Red 7 Actuator cable type A A-5 Black 6 B B-6 Orange 9 Nil Robotic type cable B A-6 Black 8 3 S Standard cable signal Terminal no.

Compact Type

8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Parts List: Standard Piping No. Description Material No.

Flow Control Equipment

8 10 12 12 10 6 8 10 Tube O.D.

SYJ300/500/700

S070 32 24 15 17 9 1/8 (P, R port) 42 VQ VKF VQZ L plug connector (L): SYJ54-L-01 M plug connector (M): SYJ54-M-01 DIN terminal (D): SYJ54-D-01 M8 connector (WO): SYJ54-WO-01 VZ VS VFN Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 82.4 74.9 MAX. 10 74.6 49.6 [56.6] 63.6 34.2 48.5 54.1 M8 x 1 36.6 Approx. 300 (Lead wire length) 60.7 [67.7] Pg7 6 6 6 6 65.5 [67.7] 55.7 [57.9