IDX-OM-W014

1 10% () ( 60cm 1 ) 10% 3 IDU Series 5-1 5 1 IDX-OM-W014 5 () 60cm 1 2 INOUT INOUT () IDU Series 5-1 5 2 IDX-OM-W014 6 6 6-1 IDU3E IDU4E IDU6E 50Hz 0.32 0.52 0.75 3/min (ANR) (1) m 60Hz 0.37 0.57 0.82 MPa 0.7 55 32 10 580 MPa 0.151.0 24085% AC100V (50/60Hz) AC100/100,11010%(4) V AC200V (50/60Hz) AC200/200,22010%(4) AC230V (50Hz) AC23010%(4) AC100V (50/60Hz) 2.4

CL

depth 12 Up to 200 Up to 300 Up to 300 Up to 300 25 Without rod boot With rod boot Bore size (mm) H1 NA P PG PH PL PW S TA TB TC l H ZZ e f h ZZ Stroke range Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 33 38 39 44 55 62 62 70 19.5 24 24 24 16 17 17 17 20 24 24 24 30 30 35 35 38 41 41 41 178 193 196 221 141 151 154 169 35 40 40 50 Up to 200 Up to 300 Up to 300 Up to 300 11 11 11 12 5 6 6 8 11 11 10 10 24

Process Pump

acid (except fuming sulfuric acid) Phosphoric acid Concentration 80% or less PAF3410-X68 New PFA PTFE Note 1, 2) Note 2) Note 1, 2) Note 1, 2) Note 1, 2) 1.

Fluoropolymer Tubing Variations

Note 6) Figures shown in tables are representative values, not guaranteed values. 502 Fluoropolymer Tubing PFA TLM/TILM Series RoHS Max. operating temperature: 260c KQ2 KQB2 KS KX 22 size variations 22 size variations KM Metric size 1/8" to 1 1/4" (9 sizes) 2 to 25 (13 sizes) KF Inch size M Length per roll 10 m, 20 m, 50 m, 100 m 10 m, 20 m, 50 m, 100 m 16 m (50 ft), 33 m (100 ft) Length

MGF

5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 300mm Graph 4 l = 200mm Graph 3 v = 150mm/s or less Graph 7 v = 200mm/s or less Graph 8 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 10 50 40 50 40 MGF63 MGF100 MGF63 Load weight m0 (kg) Load weight m0 (kg) Load

Soft Start-up Valve

Y AV2000-m02-1 to 6D/Y(Z)m-A 30 50 51.5 44 5.5 10 66 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 14 AV3000-m03-1 to 6D/Y(Z)m-A 41 50 53.5 46 5.5 15 70 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 19 AV4000-m04-1 to 6D/Y(Z)m-A 50 60 64 54 8.5 18 90 3.2 39 74 M5 x 0.8 Depth 6.5 4 Width across flats 22 AV5000-m06, 10-1 to 6D/Y(Z)m-A 70 75 70 60 11 16 100 3.2 45 80 56 M6 x 1 Depth

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Selection procedure 1. Look up from the 4Hz switching cycle to find the intersection with SUP=0.3MPa. 2. From the point just found, draw a line to the Y-axis to find the air consumption. The result is approximately 50l/min. 100 50 1 0 2 3 4 5 6 7 Cycle (Hz) Viscosity characteristics (flow rate correction for viscous fluids) Caution 100 1.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

button 100 125 23 RESET (175) AIR SUP (pilot air supply port) 1/4 FLUID IN 1/4, 3/8 FLUID OUT 1/4, 3/8 PROCESS PUMP AIR SUP 110 45 29 FLUID IN FLUID OUT AIR EXH 33 AIR EXH (pilot air exhaust port) 1/4 75 5 120 32.5 45.5 Bottom 15 Series PB1000 Process Pump Built-in Solenoid Valve Type/Air operated Type (External Switching Type) How to Order 1 0 1 01 PB 1 Body size Option/Part no. 1 1/8

HRX-OM-Y098

HRX-OM-Y098 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before Using the Product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

HRX-OM-W060

HRX-OM-W060 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before Using the Product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

ITV

Output deviation (%F.S.) 0.5 0.5 Out VE 40 0 0 Return VY G 60 0.5 0.5 AL 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Input signal (%F.S.)

Tamper Proof and Flat Head Screw

Applicable cylinder bore size (mm) Metric sizes Elbow type Universal type Port size Inch sizes 3.2 4 6 8 10 12 1/8 5/32 3/16 1/4 5/16 3/8 1/2 AS131F-M5 AS121F-M5 6, 10, 16, 20 M5 x 0.8 AS231F-01 AS221F-01 20, 25, 32 R 1/8 AS231F-02 AS221F-02 R 1/4 20, 25, 32, 40 AS331F-02 AS321F-02 R 1/4 40, 50, 63 AS331F-03 AS321F-03 R 3/8 40, 50, 63 AS431F-04 AS421F-04 R 1/2 63, 80, 100 AS121F-U10/32 AS131F-U10

FQ1

3 I.D. 10.8 x 2.4 O-ring JIS B2401-4D-P11 FPM 4 Series FQ1 Dimensions Bracket 32 V-band support 2.3 75 (25) 50 100 (80) 75 70 70 30 50 10 92 7 2-A 10 108 R3.5 R8 127 (60) R25 120 109 Part number A Applicable bore size Rc 1 Rc 3/4 Rc 1/2 BP-13S BP-14S BP-15S 34.5 27.5 22 120 50 AIR VENT 10 G1/4 10 92 7 R3.5 2-Rc P 102 (43) A I N INLET OUTLET B (108) Intermediate holder Note) Installed only

MXH Series Compact Slide

) Displacement (mm) Displacement (mm) 40 50 0.2 0.2 25, 30 40 Stroke Stroke Stroke 15, 20 0.15 0.15 25, 30 5, 10 0.1 0.1 15, 20 5, 10 0.05 0.05 0 0 0 0.17 0.33 0.50 0.67 0.82 0.20 0 0.37 0.57 0.76 0.96 Yaw moment My(Nm) Pitch moment Mp(Nm) 1 N m = 0.7375 ft lb 1 N m = 0.7375 ft lb MXH16 MXH16 0.16 0.3 60 0.14 60 50 0.25 50 Displacement (mm) 0.12 40 0.2 40 0.1 25, 30 25, 30 15, 20 0.15

MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

0 @1 Stopper Resin !1 Replacement Parts Cover !

MRQ

(mm) (mm) 50 75 100 40 10 20 25 30 15 Stroke 5 12.5 15 12.5 Y 20 20 15 15 25 30 17.5 20 20 Q 63.5 58.5 63.5 63.5 61 71 73.5 61 E 61 66 MRQBS32-lCA-A7/A8SMRQ32, #1(#1+(#1/ SET #010)+ #4) 1.5-12 Rotary Cylinder Series MRQ Flange Style/MRQFS32 The dimensions below shows an actuator with a rotation angle of 80 to 100 style.

MHY2/MHW2

light at ON Green light at ON MRHQ Finger fully closed Finger fully open 2 2 4 2 3 MHY2 -10D Auto switch 4 4 7 4 5 Finger fully closed 2 2 4 2 2 MHY2 -16D Finger fully open 3 3 6 3 4 Finger fully closed 2 2 3 2 2 MHY2 -20D Finger fully open 3 3 5 3 3 Finger fully closed 1 MHY2 -25D 1 3 1 2 Finger fully open 2 2 5 2 3 2.8-15 Series MHW2 20, 25, 32, 40, 50 180 Angular Gripper Rack & Pinion

NCA1

8 3/8 1.3 1.06 2.19 5/16-24 1/8 3 2 1/4 1 2.48 3/4 1.75 3/4 2 325 (3.25") 1 3/4-16 1 1/8 3.9 1/2 3 13/16 1 15/16 3/4 1/2 1/2 1/2 7/8 0 1/2 5/8 1.57 1.18 3 3/4 1 1/4 3/8-24 1 11/64 3/8 2.72 2.34 1 1 2.76 4 1/4 400 (4") 1 3/4-16 1 1/8 4.7 1/2 4 1/2 2 1/4 1 1/4 1 1 2.34 2.72 1/2 3 3.32 4 1/4 3/8-24 4 0 1/2 1/2 5/8 1.57 1.18 3/4 1 15/64 1/2 1/2 1/2 7/8 3/8 Bore size (in) SA XA ZA 150 (1.5") 6

NCA1

8 3/8 1.3 1.06 2.19 5/16-24 2 1/4 1 2.48 3/4 1.75 3 1/8 3/4 2 325 (3.25") 1 3/4-16 1 1/8 3.9 1/2 3 13/16 1 15/16 3/4 1/2 1/2 1/2 7/8 0 1/2 5/8 1.57 1.18 3 3/4 1 1/4 3/8-24 3/8 2.72 2.34 1 11/64 1 1 2.76 4 1/4 400 (4") 1 3/4-16 1 1/8 4.7 1/2 4 1/2 2 1/4 1 1/4 1 1 2.34 2.72 1/2 3 3.32 4 1/4 3/8-24 4 0 1/2 1/2 5/8 1.57 1.18 1 3/8 3/4 15/64 1/2 1/2 1/2 7/8 Bore size (in) SA XA ZA 150 (1.5") 6