Rodless Cylinder for Vacuum Series CYV ø15, ø32

TB W Counter bore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60

tTV2000/3000

0 5 I 0 5 -a o -1 0 50 75 100 5 0 0 1 0 0 0 0 25 50 75 100 Input signal %F S Input signal %F S Relief flow characteristics suppty pressure: o 2MPa Pressure characteristics set pressure:0 05MPa Flow rate characteristics supptv pressure:0 2MPa 1 0 a $ 0 5 s 3 0 0 o o = o 0 0 0 1 0 2 0 Supply pressure lvlPa tlectro-Pneulnatis Series lTv203tr Repeatability Hysteresis Linearity @ 0 5 f, I3 o o

MRQB-OM0002

A 4.4 4.4 5 B C E A D F 4.5 32 5.7 40 4.8 4-4. 4.5 4.6 (POSI LOCK) ISEL(MECHALOCK) NBK(Clamp Lock) 32 PSL-K-12 MA-12-26 CLH-1218 40 PSL-K-14 MA-14-28 CLH-1423 17 4-5. 4.6 4-6. 4.74.7 2 4.7 32 Rc1/8 Rc1/8 M50.8 40 Rc1/8 Rc1/8 M50.8 4.7 , A) , , , B) , ,1.52 18 5. 5. 5. 5. ,, 5-1.

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

Ball bushing O-ring NBR Snap ring Nickel plated Carbon tool steel Rod end nut Nickel plated Steel Mounting nut Steel 12 Series MQM Dimensions Basic type: MQMLB 6 Mounting nut M12 x 1 Rod end nut 2-M5 x 0.8 15 M4 x 0.7 13 4 11 16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 MM A F F S + Stroke H ZZ + Stroke (mm) P Bore

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

AMC520 12 16 55 Note 1) On the type for the AMC220, an R 1/4 fitting can be attached by removing the drain cock.

Plate Cylinder with Lock Series MLU

MLU B 25 30 D F J79W S MDLU With Auto Switch Number of auto switches Built-in magnet 2 pcs. 1 pc.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations

MXH

Solid state switches marked with are produced upon receipt of order. 3-wire (NPN) 2-wire Relay, PLC IC circuit 5 V, 12 V 3-wire (PNP) 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Since there are other

S070

VDC 6 VDC 5 VDC 3 VDC Power consumption Pressure specification Flow rate Power consumption (W) Maximum operating pressure (MPa) 0.1 0.3 0.3 0.5 0.1 0.3 Cv factor Symbol 0.021 0.011 0.021 0.011 0.011 0.006 A B C D E Note) 0.35 0.5 0.1 (With power saving circuit) F Note) Note) An option only applicable to 24 VDC plug lead type. 4-11-12 13 Series S070 3 Port Solenoid Valve Compact Direct

VP300/500/700

Standard Base mounted Universal External pilot Flow Characteristics/Weight Flow characteristics (1) Port size Valve model Weight (kg) Series 2 1 (A P) 1 2 (P A) 3 2 (R A) 2 3 (A R) C [dm3/(sbar)] 3.3 4.0 2.9/2.9 3.1/2.9 6.6 9.1 6.5/7.0 7.9/8.1 12 15 12/12 15/14 Cv 0.86 0.99 0.74/0.76 0.79/0.83 1.6 2.4 1.7/1.8 1.8/1.9 2.9 3.8 2.9/3.1 3.5/3.3 C [dm3/(sbar)] 3.4 3.7 3.3/3.6 4.1/4.1

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

Red 12 E 2 phase stepper motor PD Yellow 11 F 8 5 phase stepper motor For a signal power supply of 24VDC, connect an external resistor R (1.3k 1/2W) in order to hold the current to 15mA or lower.

Fluoropolymer Tubing Variations

(mm) TLM0201 2 x 1 2 1 TLM0302 3 x 2 3 2 TLM0425 4 x 2.5 4 2.5 TLM0403 4 x 3 4 3 TLM0604 6 x 4 6 4 TLM0806 8 x 6 8 6 TLM1075 10 x 7.5 10 7.5 TLM1008 10 x 8 10 8 TLM1209 12 x 9 12 9 TLM1210 12 x 10 12 10 TLM1916 19 x 16 19 16 TLM2522 25 x 22 25 22 TLM1613 16 x 13 16 13 Length per roll Color Translucent Translucent Symbol N N R BU B N N N 10 m Red (Translucent) 20 m Blue (Translucent) Roll

3 Port Solenoid Valve Metal Seal Series VZ200 1

DIN terminal 4-15-12 13 3 Port Solenoid Valve Metal Seal, Body Ported/Base Mounted Series VZ400 Dimensions: Body Ported Grommet: VZ4 2-G H (S)-01 With foot bracket: VZ4 2--01-F 1 2 1 2 2-3.4 mounting hole 2-4.5 mounting hole M5 x 0.8 Pilot EXH V100 Manual override (Non-locking) SY Manual override (Locking type (Tool required)) Manual override (Locking type (Manual)) SYJ 2-3.4 mounting hole

ZQ-OM01401

Q1 5 4 () 1) () Q2 1)+COM (4) 7) (2)1U (3)J1,J2, Q2 (11) (P ) L L 0.3m 0 (M5x0.8) LO L 2 4 3 6 (5) 5 4 2) B (12) (2):1U 2)(3)Q1 8) (3)Q2 Assy N C 3) ) (6) ( D [kPa] (2):3M EA NPN2 9) 8) (PD) EB PNP2 0 to -100 EC NPN1 + S EE PNP1 + C FA NPN2 D FB PNP2 -100 to 100 8)VQ100 Ass yP.41 FC NPN1 + FE PNP1 + (3)Q2 (4)LO 9)(3)J1,J2Q2 P.6 (3)C 4) F 3) ZFC 4

EXxx-OMZ0016

(16 points) 16 0 EX600-DY *B (8 points) 0 8 Digital output unit EX600-DY *E (16 points) 0 16 (EX600 Series) DY EX600-DY *F (16 points) 0 16 EX600-DM *E (8/8 points) 8 8 Digital I/O unit (EX600 Series) DM EX600-DM *F (8/8 points) 8 8 Analog input unit AX EX600-AXA*1 (2 points) 32 0 Analog output unit AY EX600-AYA*1 (2 points) 0 32 Analog I/O unit AM EX600-AMB*1 (2/2 points) 32 32 *1: User

3 Port Solenoid Valve

wire AWG#26) 3.5 27 6 26 23.5 20.5 3 9.5 28.5 3.5 4 Series S070 Dimensions Base mounted with screws S070B-G-M5 Grommet type 16.5 3 7 15 21 2-3.4 Mounting hole 150 (lead wire AWG#26) 22 5 6 22 20.5 3 2 1 11 7 6 5 12 12.3 12 25 M5 0.8 3 (EXH) port M5 0.8 2 (OUT) port M5 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (lead wire AWG#26) 3.5 27 27.5 25 22

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

In that case, loosen the screw with washer o and place a lead wire into the bracket , and then tighten it once again. b The maximum size for the round terminal o is 1.25 mm23.5 and for the Y terminal is 1.25 mm24. c Cable i outside diameter: 6 to 12 mm Note) For the one with outside diameter ranged between 9 to 12 remove the inside parts of the rubber seal u before using. 3.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

-wire (PNP) 12 V 2-wire Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit Grommet 5 V, 12 V 24 V Diagnostic indication (2-color indication) 2-wire 12 V 3-wire (NPN) 3-wire (PNP) IC circuit With timer 5 V, 12 V Lead wire length symbols: 0.5 mNil (Example) E76A 3 mL (Example) E76AL 5 mZ (Example) M5NTZ Solid state switches marked with are produced upon receipt of order.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

AS420 Thread type AS500 AS600 AS800 Nil Rc NPT G N F 1 4 1 2 AS900 Needle Valve/Flow Characteristics Note) The flow characteristics are representative values.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

-wire (PNP) 12 V 2-wire Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit Grommet 5 V, 12 V 24 V Diagnostic indication (2-color indication) 2-wire 12 V 3-wire (NPN) 3-wire (PNP) IC circuit With timer 5 V, 12 V Lead wire length symbols: 0.5 mNil (Example) E76A 3 mL (Example) E76AL 5 mZ (Example) M5NTZ Solid state switches marked with are produced upon receipt of order.