IZx-OMX0087

Performance Performance data shown in this chapter is based on an electrified plate (dimensions: 150 x 150 mm, electrostatic capacity: 20pF) defined by ANSI standard (ANSI/ESD STM3.1-2015). Use this data as a guideline for selection, as the performance data may vary depending on the material and size of the workpiece. 5-1.

High Vacuum L Type Valve

H 4 S y m b o l Initial power/ Power 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 consumption (W) Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

IR1000/2000/3000

For IRV2000, IRV3000 Zero position Heaven Zero position Ground Fig. (2) Fig. (1) 14-5-16 16 Vacuum Regulator Series IRV1000/2000/3000 Standard Specifications F.R.L.

Booster Regulator Series VBA1110 to 4200 1

Rc1/4 OUT port (Option) Rc1/4 EXH port: 1 position 4-5.5 mounting hole Handle Operated Type VBA2100-03, VBA4100-04 Pressure gauge (Option) IN port OUT port 4-12 mounting hole E D Silencer (Option) EXH port: 1 position EXH port: 1 position D 73 116 O 39 56 A 300 404 B 170 207.5 C 53 96 E 118 150 F 98 130 G 46 62.8 H 43 62 I 60.5 90 J 18 17 K 15 15 L N Rc 1/16 Rc 1/8 M 31 40 Model Port size

VCW

VN L3 LVC D side U side Stations 1 2 3 4 5 n LVA LVH LVD LVQ 21 LQ 16 H H P = J (Pitch) OUT port n-1/4 2 5.5 LVN n-1/8 : Thread type TI/ TIL L Dimension (mm) PA n (stations) Dimensions Model PAX 2 3 4 5 6 7 8 9 10 L1 69 103.5 138 172.5 207 241.5 276 310.5 345 L2 VV2CW2 PB 81 115.5 150 184.5 219 253.5 288 322.5 357 L3 93 127.5 162 196.5 231 265.5 300 334.5 369 L1 77 115.5 154 192.5 231 269.5

ZR

Vacuum Pressure Switch: ZSE2-0R-15 ZSE2-0R-15 ZSE2-0R-15L ZSE2-0R-15C ZSE2-0R-15CL ZSE2-0R-15CN Indicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer H L SET L SET H 15 15 9 9 2-M2.5 Mounting thread 2-M2.5 Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port 3.3

-- NCM seies

s o.50 o.8e4 o93 0.75 0.18 %-18 0.50 0.95 2.94 106 (1 0.312 %-24 0.50 o.624 0.25 1.12 o.12 0.88 0.88 0.24 %-8 0.62 1.17 3.25 0.la7 Wzo 0.75 0.7i19 o 1.t2 0.25 1.06 'L06 o.25 %-16 ora 1.62 400 150 t1%l o.87 1h-20 o_75 o.749 0.38 1.56 0.25 1.25 1.25 o.25 3l-16 0.88 '1.50 3.69 Double End : NC.

3 Port Solenoid Valve SYJ300/500/700 Series

Note) At rated voltage 16 16 3 Port Solenoid Valve Series SYJ700 Valve Specifications External Pilot Type SYJ700R Pilot valve pressure is supplied separately from the main valve pressure through the use of a separate supply port. This model is suitable for low pressure and vacuum applications.

Refrigerated Air Dryer

(IDFB4E to 75E) AMD Power supply voltage: Single-phase 115 VAC (60 Hz) 230 VAC (60 Hz) Three-phase 460 VAC (60 Hz) AMH AME Air flow capacity SCFM (m3/h [ANR]) Series Rated inlet condition Port size Outlet air pressure dew point Note) AMF 37F(2.8C) 45F(7.2C) 50F(10C) IDFB3E IDFB4E IDFB6E IDFB8E IDFB11E IDFB15E IDFB22E IDFB37E IDFB55E IDFB75E NPT3/8 10(17) 11(19) 12(20) ZFC NPT1/2 15(25) 16

Micro-Mist Separator with Prefilter Series AMH

40 13 13 16 16 19 19 22 22 32 100 63 113 76 119 76 145 90 151 90 166 106 173 106 200 122 253 160 8 12 6 40 66 84 28 5 2.0 27 37 1/4,3/8 172 AMH250 178 1/2 8 12 6 40 66 84 28 5 2.0 27 37 3/8, 1/2 204 AMH350 3/4 210 8 14 7 50 80 100 34 5 2.3 32 37 8 14 7 50 80 100 34 5 2.3 32 37 10 14 9 55 88 110 50 9 3.2 37 37 10 14 9 55 88 110 50 9 3.2 37 37 10 16 9 65 102 130 60 10 4.5 39 37 15 20 11 85

One-touch Fittings

2 3.2 4 6 8 10 12 16 V V V V V V How to Order P.174 Variations P.175 Dimensions P.176 Metric P.173 2 3.2 4 6 8 10 12 16 V V V V V V V How to Order P.186 Variations P.187 Dimensions P.188 Inch P.185 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" V V V V V V V How to Order P.196 Variations P.197 Dimensions P.198 Inch P.195 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" V V V V V V Gasket Seal (Uni Thread) Connection

XL-OMY0002

800/220 1200/350 / AC200V 2400/150 3200/220 4800/350 XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0002 . 1 S 12 ( SUS304 M 3 M SUSU316L 8 11 SUS304 2 7 A6063 6 9 6 9 10 9 5 SUS304 4 5 10 4 10 S O S O XLD-25 XLD-40,XLD-

VQ20/30

Series VQ20 L dimension 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Stations No. L 6 8 11 13 15 17 20 22 24 27 29 31 34 36 38 40 43 45 47 50 85.5 110.5 148 173 198 223 260.5 285.5 310.5 348 373 398 435.5 460.5 485.5 510.5 548 573 598 635.5 Series VQ30 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Stations No.

Compact Cylinder Double Acting, Single Rod Bore size: 056(9/16”), 075(3/4”), 106(1 1/16”), 150(1 1/2”), 200(2”), 250(2 1/2”), 300(3”), 400(4”) Series NCQ8

Compact Cylinder Double Acting, Single Rod Bore size: 056(9/16), 075(3/4), 106(1 1/16), 150(1 1/2), 200(2), 250(2 1/2), 300(3), 400(4) Series NCQ8 How to Order Without auto switch B 056 025 NCQ8 B 056 025 Z M9BW S NCDQ8 With auto switch Built-in magnet X-Option Nil XB6 XC4 Standard High temp.

Refrigerated Air Dryer

Verifying the IN and OUT sides When attaching the piping, make sure to avoid interchanging the water and air sides as well as the IN and the OUT sides. 16 18 Series IDF/IDU E Air Preparation Equipment/Precautions 2 Be sure to read before handling. Air Supply Maintenance Maintenance Warning Warning 1.

Free Mount Cylinder

10 Tubing bore: 16 to 50 2 Flat/Flat with ribs Deep Bellows Model Applicable pad model 8 10 13 16 20 25 32 40 50 10 16 25 40 8 10 13 16 20 25 32 40 4 6 6 50 Dia.

KJ

9 16 3.3 3.4 16 14 27 21 19 26 19 30 30 53 42 34 51 61 47 Reference dimensions after R thread installation.

5 Port Solenoid Valve

1 to 12 stations (16 stations, 24 points) SND 16 1 to 8 stations (16 stations, 16 points) SVA CC-Link 32 M12 1 to 12 stations (16 stations, 24 points) SVB 16 1 to 8 stations (16 stations, 16 points) SDA EtherCAT 32 M12 1 to 12 stations (16 stations, 24 points) SDB 16 1 to 8 stations (16 stations, 16 points) SFA PROFINET 32 M12 1 to 12 stations (16 stations, 24 points) SFB 16 1 to 8 stations

42

Maximum stations are 16.

LEC-OM069xx

2.4.3 Setting Parameters.2-16 2.5 Monitor Displays.2-16 3.