Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Compatible motor Actuator part number P Step motor (Servo/24 VDC) (Except cable specifications and actuator options) Example: Enter LEMB25T-300 for the LEMB25T-300W-S12N1.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Pressure Control Equipment Specifications 0 to 1 MPa Rated pressure range Output Specifications 0.1 to 1 MPa Set pressure range NPN open collector output 1.5 MPa Withstand pressure Max. 30 V, 80 mA Residual voltage 1 V or less 0.01 MPa Set pressure resolution 12 to 24 VDC, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage Brown DC (+) 55 mA or less (at

AMP

P-80 (YG)

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

OMU0023

112 70 p 17 11 DC1 49 31 1 81 51 Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X 120 78 x 25 19 EM 57 39 9 89 59 Y 121 79 y 26 1A SUB 58 3A : 90 5A Z 122 7A z 27 1B ESC 59 3B ; 91 5B [ 123 7B

reduces flow setting time

2 q !5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

90

w e OUT side passage IN side passage y u t OUT IN i o Basic type (Knob): IR30l0-A e e r q r w e OUT side passage IN side passage t u OUT IN o i Basic type (Knob): IR30l1 2-A e e r q r w e OUT side passage IN side passage t u OUT IN o i 800 Precision Regulator IR1000-A/2000-A/3000-A Series Dimensions Basic type (Knob): IR10l0-01l-A 10.5 42 ARJ 1.6 Bracket AR425 to 935 Mounting hole for hexagon

MHF2

Printed in Japan. 1st printing February, 2002 D-DAD P-80 (D) This catalog is printed on recycled paper with concern for the global environment.

Drain Separator for Vacuum Series AMJ 1

Description Material Aluminum die-casted Note Body Platinum silver coated q Replacement Parts Material Part no. No.

CJP

Refer to p.0-39 to 0-46 for Safety Instructions and common precautions. CM2 C85 Construction (Disassembly is not possible.) CG1 Piping Caution Panel mounting MB q Use a dedicated hose nipple. On the panel mounting style, use the CJ-5H-4 or CJ-5H-6, a dedicated hose nipple (with a fixed restriction) that is provided.

Compact End Lock Cylinder Series CBQ2

Q End lock mechanism dimensions (mm) B + Stroke L J E Bore size (mm) HN (Max.)

AS-FPQ/AS-FPG

3 q q AS-FG i i y AS-FP AS-FP !5 AS-FM Meter-in type M5 type AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.

Information

w e r t q w e r t i i o o !

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

w e r t q w e r t i i o o !

AS-FPQ/AS-FPG

3 q q AS-FG i i y AS-FP AS-FP !5 AS-FM Meter-in type M5 type AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.

Compact Cylinder with Solenoid Valve/

3 q Manual button u 50, 63 !0 t i y o Length of plug connector lead wire Description No. Material Component Parts The standard length of the plug connector with a lead wire is 300 mm, but other lengths are available as follows.

HRX-OM-Q026

(IEC 60417-5032-1) How to see the serial number Q Z 001 December 2012 Q Z 001 Year Symbol Remarks Month Symbol Remarks Serial no. 2012 Q Repeated from A to Z in alphabetic al order 1 O Repeated from O to Z in alphabetical order, with O for January and Z for December 2013 R 2 P 2014 S 3 Q Fig. 1-1 Position of the product label HRSH Series 1.4 Product Label 1-3 HRX-OM-Q026 Chapter 1 Safety

AP10PA

w q w q 1) Refer to gauge guide (P.1058) for gauge specifications.

AMR3000 to 6000

Switch assembly Adjusting screw Working principle When the MR units OUT side pressure is applied to piston q, piston q moves until it balances with the force of pressure adjustment spring w. The movement of piston q is detected by switch assembly e and outputs ON and OFF signals. The set pressure can be adjusted by turning adjustment screw r, which adjusts the spring force.

VXR21/22/23

N 59 60 60 Port size P Rc H F E A N Q L K J B C D M 74 (81) 88 (98) 90 (100) N M 67 (74) 80 (90) 82 (92) M 67 (74) 80 (90) 82 (92) N M 67 (74) 80 (90) 82 (92) Normally open Normally closed VXR215006 04 06 04 VXR2152, 1 1 VXR2262-10 VXR2272-12 80 90 125 101 (112) 119 (136) 126 (143) 18 32.5 36.5 43.5 46.5 52 36 36 42 53 39 41 20 30 35 35 23 39 47 48 48 92 95 95 59 62 62 1 2 3 4 21 40 45 45