Valve Single Unit

Clean appearance P N SS5X3-42 SX340(R) P N SS5X5-41 SX540 P N SS5X5-42 SX540(R) P N SS5X7-42 SX740(R) P N SS5X3-41 SX340 Single base/B mount Common SUP/Common EXH 4 to 12 stations 3 to 12 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P (SUP)/R (EXH) Valve stations (1) In case of a flat cable style, each valve is wired on the print board of manifold

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M3: L2 = 6 mm Applicable shaft types: J, K, T 2. Q1 = M L2 = L2 + (3 x P) 3. L1 + (3 x P) L2 + (3 x P) 4. L2 = Q2 = M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L1 = 5. Q2 = M 6.

90

Note 16) Select C, L, L1, Y when the pressure sensor (P, T) is selected for t Pressure Sensor/Digital Pressure Switch for Vacuum Specifications. Since only grommet type is available for the pressure sensor, sensor without lead wire cannot be selected.

VEX1

Refer to p.5.3-1 for details. 5.1-36

Rubber seal 5 Port Solenoid Valve Series SYJ5000

For connector cable of M8 connector, refer to page 90. 25 Series SYJ5000 Construction 2 position single 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) e w q t r q y t rw (A) 4 (B) 2 (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) i u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t rw 5 (R1) 3 (R2) 1

High Purity Fluoropolymer

Metric size Inch size 1/4" 3/8" 1/8" 1/2" 3/4" 6 8 10 12 19 3/16" 1/8" 1/4" 3/8" 1/2" 3/4" 4 None 2 3 Male 4 P.21 Connector LQ2H 5 2 3 Female 4 P.22 5 2 3 Male 4 P.23 Elbow LQ2L 5 2 3 Female 4 P.24 5 2 3 Male 4 P.25 Run tee LQ2R 5 2 3 Female 4 P.26 5 2 3 Male 4 P.27 Branch tee LQ2B 5 2 3 Female 4 P.28 5 2 3 Union elbow LQ2E 4 P.29 5 2 Union tee LQ2T 3 4 P.29 5 Features 4 Series LQ1 ,TL/TIL

CLS

9 w %7 $1 $2 $3 $6 $8 $9 $0 #3 #0 @5 #2 $5 $4 %0 %1 t y !2 !1 !3 CL u !4 !6 CL1 !7 !5 MLGC CNG e ^0 ^2 !

Vacuum Regulator

IRV10A P P P P IRV20A P P P P P P Symbol Output specifications Part no.

VQ5000

Note 1) Note 2) Note 3) 2-6-15 Base Mounted 16 Series VQ5000 Kit (Terminal block box kit) T 83 29.5 29.5 2-Rc 1/8 (Pilot EXH port) 12 21 47.5 36 PE R1 5 R2 3 P 1 SMC 6-Rc 3/4 (P), 5(R1), 3(R2) port Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-G3/4 Conduit port

Cylinder with Lock Series CNS

across flats KA BP (Rc, NPT, G) Unlocking port 2 x P (Rc, NPT, G) Cylinder port GL GR G G MM Q D EA E BF FY C V FT VA AL A K F BN N N M C B FX FZ H S + Stroke ZZ + Stroke With rod boot 75 40 l h + l ZZ1 + l + Stroke Long stroke Rc BQ plug with breathing hole BC element M GA T 4 x J Width across flats KA 2 x P (Rc, NPT, G) Cylinder port G G BP (Rc, NPT, G) Unlocking port GL GR GB 4 x FD FA

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Operation principles Spool valve w is pushed upward by the return spring e, port P is closed, and port A and port R are opened. When an electric current is applied to the molded coil r, the armature t is attracted to the core y, and through the push rod u, it pushes down the spool valve w. Then, port P and port A are connected.

30

5 P. 12 Metric Inch P. 6 P. 13 Metric R thread G thread P. 3 P. 16 P. 10 Inch Hexagon Socket Head Male Connector KQB2S Union Tee KQB2T Bulkhead Connector KQB2E Metric Inch P. 5 P. 12 Metric R thread G thread Metric Rc thread G thread P. 7 P. 18 P. 3 P. 16 P. 13 P. 10 Inch Inch Straight Union KQB2H Union Y KQB2U Extended Male Elbow KQB2W Metric Inch P. 3 P. 10 Metric Inch P. 5 P. 12 Metric

Hygienic Design Cylinder Series HY

(Rc, NPT, G) Width across flats KA 2 x 4 x J G G MM HA D E E T H1 MB Width across flats B1 K C MA FA AL B N A F N H S + Stroke FB ZZ + Stroke CJ5 CG5 (mm) Bore size A Stroke range AL B B1 C D Ee11 F FA FB G H H1 MA MB J K KA MM N P S T U V W HA ZZ HY 32 40 50 63 500 or less 22 24 32 32 18 20 27 27 50 58 70 84 17 19 24 24 32.5 38 46.5 56.5 12 16 20 20 30 35 40 45 16 18.5 23 23 5 4.5 5 5 4

Refrigerated Thermo-chiller

Regarding the water quality standards for cooling water, refer to Temperature Control Equipment Precautions. 102 Technical Data C O N T E N T S M Magnet pump P. 195 Mechanical seal pump P. 194 N Non-return valve P. 195 NRTL (National Recognized Test Laboratories) P. 199 O Offset function P. 197 ON/OFF temperature control P. 197 Overload relay P. 198 P Particle filter P. 195 Peltier element

High Vacuum Angle Valve

Bellows seal Dust free, P.3 cleaned Single acting (N.C.) XLAV-2 New New Bellows seal Dust free, Solenoid valve P.4 cleaned (With solenoid valve) XLC-2 Double acting Bellows seal Dust free, P.7 Air operated cleaned High-speed operation XLF-2 Single acting (N.C.) O-ring seal P.10 High operating cycles Solenoid valve High-speed operation Single acting (N.C.)

CL

For stopping accuracy, refer to Series CLJ (P. 9-2-12), Series CLM2 (P. 9-2-20), Series CLG1 (P . 9-2-30), and Series CL1 (P . 9-3-2) respectively. 7. In order to further improve stopping accuracy, the time from the stop signal to the operation of the lock should be shortened as much as possible.

IDX-OM-W029

TB FM1 GFCI EDV P TDR FM2 PE V IDU Series 11-6 11 3 IDX-OM-W029 11 T IDU22E/37E-30-T IDU55E-30-T GFCI R GFCI For Option R GFCI R 1 2 3 TB TB MC1 TDR MC1 TDR PRR PRR MC1THR THS PRR MC1 CM MC2 MC1 FM1 MC1 CM FM2 TDR M MC1 THP2 THP1 THS MC1 MC2 MC2 PRS1 P FM2 TDR PRS2 THR PRR P TDR MC1 FM1 MC2 PRS M P IDU75E-30-T GFCI R GFCI For Option R CM FM1 () 1 2 3 TB FM2 MC1 TDR MC1 MC2

LEC-OM02904

P-D P P C C G3 D (2) G4 5m 5m (1) 1.

VZS

Body type Rc 1 8 Plug-in type VVZS3000-P-01-1 Non plug-in type VVZS3000-P-01-2 Rc 1 4 VVZS3000-P-02-1 VVZS3000-P-02-2 Body type Plug-in type AXT625-12A Non plug-in type Part no. Part no. Body type Plug-in type VVZS3000-22A-1 Non plug-in type VVZS3000-22A-2 Part no.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

center line NX X 4 x 2square nut J NH NT LB NW PB PI NV LW T-slot for body mounting NC GB LE H7 depth R Cushion needle 2-P (Hexagon socket head taper plug) 2-P 2-P (Hexagon socket head taper plug) 2-P (Hexagon socket head taper plug) 1 XX SS NE PP QQ RR SS H SMC TT UU VV UU PH A G RW T-slot for body mounting N Z + stroke J M4 x 0.7 M6 x 1 M8 x 1.25 MM M5 x 0.8 M8 x 1.25 M10 x 1.5 Model MY2HT16G