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3 position 0-1OOPSl (0-7kSf ,/cm,) Operating pressure range 6 g 70 E E 60 2 position single P-100PS| (P-7ksf/cm,) P:Supply pressure 50 Pilot pressure range 2 position double 14-100 (1-7ksllcm?)

o

3 position 0-1OOPSl (0-7kSf ,/cm,) Operating pressure range 6 g 70 E E 60 2 position single P-100PS| (P-7ksf/cm,) P:Supply pressure 50 Pilot pressure range 2 position double 14-100 (1-7ksllcm?)

CM2

e r t y u i o !

Lubrication Equipment

Sight dome assembly Siphon tube nut seal Bowl O ring Housing O ring y u i o !

Series PF2W Digital Flow Switch For Water Refer to www. poweraire .com for details of products compatible with overseas standards.

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin No. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

. . p. 19 Made to Order. p. 26 Function Details. . p. 27 Safety Instructions.

0.4

e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2)

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Compact Cylinder with Air Cushion

P-80 (YG) 2nd printing June, 2002 D-DAD P-80 (YG) This catalog is printed on recycled paper with concern for the global environment.

HEC_W-E

Alarm Sequence Setting range : On, Off Indicated content : Use of temp. upper/lower limit alarm U p p e r / L o w e r T e m p . A l a r m S e q u e n c e M O D E < O f f sequence(Ex. : Off) Function : Determines whether or not temp. upper/lower limit alarm is output when power is turned on.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

(Values at the initial period) VG VP JIS Symbol (A) 2 S070 VQ Construction 1 (P) 3 (R) VKF q t o r e VQZ y VZ y VS VFN i w 1(P)2(A)3(R) P R Description Component Parts No. q w e r t y u Note Material Aluminum die-casted Aluminum die-casted Aluminum Resin Stainless steel Steel Solenoid coil assembly Sub-plate Body Spool/Sleeve Manual override Return spring Bracket assembly Gasket assembly

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

3 position 0-1OOPSl (0-7kSf ,/cm,) Operating pressure range 6 g 70 E E 60 2 position single P-100PS| (P-7ksf/cm,) P:Supply pressure 50 Pilot pressure range 2 position double 14-100 (1-7ksllcm?)

Square Tube Type Air Cylinder Series MB1

MM L1 E1 E1 L1 NDH10 NX U1 ND H10 NZ MM R1 U1 R1 NX A A1 32 40 50, 63 80 100 32 40 50, 63 80 100 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 20 22 28 40 40 30 40 50 65 65 I-03M I-04M I-05M I-08M I-10M Y-03M Y-04M Y-05M Y-08M Y-10M +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10

ZR

Lead wire length 3.0 m C Lead wire length 0.6 m CL Lead wire length 3.0 m CN W/o lead wire Pilot valve Connector type Nil DC: 1 W (With indicator light: 1.05 W) AC Refer to page 13-3-5 for part no. of lead wire with connector. Y DC: 0.45 W (With indicator light: 0.5 W) Combination of vacuum switch/Suction filter Electrical entry 24 VDC and 12 VDC are applicable to 0.45 W.

C85

6 y !0 !2 t !7 q !4 !1 w e !3 !

CXT

Load weight W (kg) MX 3. Operating pressure P (MPa) P 0.7 MPa MTS 4.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Relief port (10-, 21-) Vacuum port (11-, 22-) G F MM 2 x LC LZ LX D I 4 x LD 20, 25 Width across flats KA Width across flats B2 Width across flats NA Standard port LT 45 ZZ + Stroke LS + Stroke S + Stroke X Y X Y Z Relief port (10-, 21-) Vacuum port (11-, 22-) 32, 40 (mm) H H2 H1 S P I G D A 12 10 8 6 KA MM NA NN B1 B2 Bore size 13.5 10.5 10.5 10.5 FL K 54 47 47 40 B LH LT LS LX LD 8 13 AL

MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

CE

7 w @5 q y !3 @3 r t @5 e !1 @1 @1 @4 @6 !4 @6 !4 u @8 !5 @0 !8 !9 i Parts list Parts list Description Material Note Description Material Note No. No.