Aluminum High Vacuum Angle Valve XLS-16XLS16-20-G, C, T, D XLS-16-P XLS16-20-PG XLS-25XLS25-20-G, C, T, D XLS-25-P XLS25-20-PG Description Construction No. w y r e-1 e-2 Coil assembly Core assembly Armature assembly O-ring O-ring XLS25-30-1 XLS25-30-2 AS568-018V AS568-030V XLS16-30-1 XLS16-30-2 AS568-018V AS568-025V 465 b
SMC Thermo-chiller Variations Series Temperature stability [C] Set temperature range [C] Cooling capacity [kW] Environment International standards 1.2 1.8 2.4 3 5 6 9 10 15 20 25 28 HRSE Basic type 2.0 10 to 30 V V V Indoor use (Only 230 VAC type) HRS Standard type 0.1 5 to 40 V V V V V V Indoor use (Only 60 Hz) HRS090 Standard type 0.5 5 to 35 V Indoor use (400 V as standard) Outdoor installation
Rod End Lock: -R Bore size (mm) WH W P WA WB 20 30 M5 x 0.8 16 15(16) 23 25 30 M5 x 0.8 16 15(16) 25 32 25 Rc 1/8 16 15(16) 28.5 40 20 Rc 1/8 16 15(16) 33 50 20 Rc 1/4 18 17(18) 40.5 63 20 Rc 1/4 18 17(18) 47.5 80 20 Rc 3/8 22 22 60.5 100 20 Rc 1/2 22 22 71 ( ): Denotes the dimensions for long strokes.
1200 Speed: V [mm/s] Speed: V [mm/s] LEFS40/Ball Screw Drive Horizontal Vertical 70 Lead B 60 30 Work load: W [kg] Work load: W [kg] 50 Lead B Lead A 40 20 30 Lead H 20 10 Lead A/Lead H 10 0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] 39 LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication For the LECP6/LECP1/ LECPMJ
OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 R U V SGDE servo pack 2 1MC M T 3 W 1CN 4 150 PULS PULS SIGN SIGN CLR CLR 1 2 3 4 5 6 Be sure to ground.
plate assembly SYJ700-10-2A P, R port thread -+ -+ -+ -+ -+ -+ -+ -+ Manifold type Stations Nil Rc G NPT NPTF R P 20 21 Type 20 Type 21 2 stations : 20 stations 02 : 20 00F 00N 00T R P P Port 1/4 R port 1/4 P Port 1/8 R port 1/8 Note) For more than 6 stations for type 20 and more than 9 stations for type 21, supply air to both sides of P port and exhaust air from both sides of R port.
24 V 100 V, 200 V Relay PLC DIN terminal Diagnostic indication (2-color indication) A59W Grommet Y59A Y7P J51 Y59B Y7NW Y7PW Y7BW G39 K39 3-wire (NPN) 3-wire (PNP) 5 V, 12 V 24 V IC circuit Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) 2-wire 5 V, 12 V Terminal conduit 12 V Relay PLC 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 5 V, 12 V
Reed switch Solid state switch 5 V IC circuit Z76 Grommet Z73 A54 A59W Y59A Y7P J51 Y59B Y7NW Y7PW Y7BW Y7BA F59F 100 V 12 V Yes Relay, PLC 24 V 2-wire 100 V, 200 V Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC circuit Grommet 12 V 100 V, 200 V 2-wire 3-wire (NPN) 3-wire (PNP) IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2
Example) AMK30-N03B-6RZ-D q e r t y w V w Symbol Description Body size 20 30 40 50 60 V q Filter type AMK Activated carbon filter V V V V V + V e Thread type Nil Rc V V V V V N NPT V V V V V F G V V V V V + 01 1/8 V 02 1/4 V V V 03 3/8 V V 04 1/2 V 06 3/4 V 10 1 V V + V r Port size a Mounting Nil Without mounting option V V V V V Option V t B1 With bracket V V V V V + Nil Polycarbonate
Max. voltage (with no load): 30 Vrms (42.4 V peak) or less Max. current: (1) 8 A or less (including shorts), and (2) When controlled by a circuit protector (fuse, etc.) with the following rating Max. current rating 5.0 100 Peak voltage value No-load voltage (V peak) 0 to 20 [V] Over 20 [V] to 30 [V] 2) A circuit (class 2 circuit) with maximum 30 Vrms (42.4 V peak) or less, and a power supply
Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.
m (kg) 25 16 20 25 16 20 16 16 1 1 0.1 10 20 25 26 50 100 200 0.1 10 20 25 26 50 100 200 Stroke (mm) Stroke (mm) 17 l = 50mm V = 400mm/s 18 l =100mm V = 400mm/s 100 50 50 80 100 50, 63 80 50, 63 50, 63 40 50, 63 40 32 40 32 32, 40 32 10 10 25 25 5 5 Load weight m (kg) 20 20 25 16 20 16 25 20 16 1 1 16 0.1 10 20 25 26 50 100 200 0.1 10 20 25 26 50 100 200 25 Series MGP Compact Guide Cylinder
Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.
A73C A72H A73H E76A E73A F79 F7P J79 F79W 200 V Relay, PLC 2-wire 100 V 12 V Yes 24 V Connector 3-wire (NPN equivalent) IC circuit 10 5 V Grommet 2-wire 24 V Relay, PLC 100 V 12 V F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 10 16 20 25 32 3-wire (NPN) 3-wire (PNP) 24 V IC circuit 16 20 25 32 5 V, 12 V Diagnostic
20 30 40 50 60 70 0 10 20 30 40 50 60 70 0 0 20 40 60 80 100 120 0 20 40 60 80 100 120 Gripping point distance R [mm] Gripping point distance R [mm] Gripping point distance R [mm] Gripping point distance R [mm] 1 2 1 2 MHL2-20DZ MHL2-25DZ MHL2-25D Z MHL2-20D Z 200 200 120 120 160 160 Gripping force [N] Gripping force [N] Gripping force [N] Gripping force [N] Pressure 0.6 MPa Pressure 0.6
Output circuit Surge voltage 24 V 0 V sol.1: Energized 2 V or less R Surge voltage Internal circuit 0V sol.2: De-energized 2 V or less Surge voltage R 24 V 0 V Large capacity Load: Energized 2 V or less R Countermeasure parts Diode (Anode) + (Cathode) Relay Switching element Power supply circuit breaker OFF C Valve R Leakage voltage Power supply 24 VDC Leakage voltage Figure 2.
) [] 2.5 1.2 (3) [] 20 1 [J] 5.6 22 145V TND20V-680KB (135[V]) (78) 370V TND10V-221KB (360[V]) 1.
1 to 5 V, 0 to 5 V 0 to 20 mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.
a safety factor of 20%, 14.0 [kW] x 1.2 = 16.8 [kW] V * This is the calculated value by changing the fluid temperature only.
1(P), 3(R) 4 V Piping specifications 1/8" V 5/32" V Port size M3 V M5 V V 2 V V V Note 1) V 4(A), 2(B) 3.2 V V Note 1) 4 V V V Note 1) V 1/8" V V V 5/32" V V V Type of wiring C Kit: Connector C Kit: Connector S Kit: Serial transmission (EX510) C Kit: Connector Connector kit Connector kit Direct EXH outlet with built-in silencer V Page 755 Blanking plate assembly V V V Page 755 Page 755