44 Applicable tubing M L1 KFG2 KFG2 6 4 5 9 10 16 5.8 3.3 H1 d MS 8 6 14 12 14 18.4 6.6 5.3 A L2 H2 KKA H3 10 7.5 25 6.8 KP Connection thread 15 17 21.4 7.6 10 8 29 7.3 LQ MQR 12 9 38 23 8 16 17 8.5 T 12 10 48 24.5 9 IDK 16 13 86 21 22 26.7 9.3 12 Reference dimensions after installation of R thread 325 KFG2 Series Applicable Tubing: Metric Size, Connection Thread: R, Rc Dimensions Female Connector
15 to +10% of rated voltage Inrush 12.7 (50), 10.7 (60) 7.6 (50), 5.4 (60) 4.8 W, 5 W (With indicator light) Power consumption Note) N.C.
Series CLS Dimensions Center trunnion type/(T) BC CLS125 MODEL SMC FREE LOCK CHECK Cylinder With$ Locking Mechanism 5 30 Rc(PT) 1/4 Unlocking port (unlocked when pressurized) Z + 1/2 stroke Plug with breathing hole GC BB BA GA GA 2-Rc(PT) P 4-J Width across flats KA M MM BZ GB R TY TDe8 90 59 D W 14 AL C A K 43 N N TT B M S + Stroke H BY TX TZ ZZ + Stroke With rod boot Z1 + l + 1/2 stroke
box OUT() Brown(Red) CDJ2 CDVJ CDLJ2 CDM2/CDBM2/CDVM3, 5/CDLM2 CDG1/MGG CDLG1 RSDG MGC MLGC/RHC/REC Reed switch CD-P11 OUT( ) Blue(Black) CD-P12 8 10 10 10 10 10 8 9 9 8 10 10 7 8 8 10 11 Note) q In the case operation load is an inductive load. w In the case the wiring length to load is more than 5m. e In the case the load voltage is 100V AC.
Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30
2 i 12(P1): External pilot port 10(P2) : Pilot EXH port !0 e e u u r i !1 r t !1 !0 Port 1 Port 2 Port 1 Port 2 Valve element A t q q o o w Valve element B y w Port 3 3 Port valve 2 Port valve Working Principle When the pilot operated solenoid valve !2 is not energized, the valve element A t connected to the piston u is closed by the return spring i.
When the pilot solenoid valve is energized (or when pressurized air enters through the 10(P2) port of the air operated style), the valve body closes. w e Plate assembly Valve element Valve cover Piston assembly Return spring Pilot solenoid valve Stainless steel r 32A to 50A are O-ring. NBR, FKM t Aluminum alloy Piano wire y u i Note) et components determine the valve composition.
7 w i t q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A' @6 #2 @8 @9 #0 !8 !9 #1 @7 !4 !
Connect the motor power supply input terminal (U, V, W) to the driver power terminal (U, V, W).
5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.
Front cover A w !0 Misc.
(0.4) 10 (0.4) 5 (0.2) 10 (0.4) Note) 15 (0.6) Note) 20 (0.80) Note) 5 (0.2) 5 (0.2) 1 pc.
t l | | t---{ Pressure display unit | | t--fMfi--l | | f--fkof/cm, l I I [s-f b "t| | I-+-fEr_--] | | tsT kp " ] t l t l I I Cable connector type I S I Straiqht tvpe 3 m I I L I Riqht anqle tvpe 3 m I I j N lWithout cable connector I l L-Bracket Model 7 . l00O tvoe v : 2000 tvoe Pressure [rPa 2 kqf/cm, 3 bar 4 PSI kPa Power supply voltage 0 to 10 VDC Thread type 1/8 (1000 tuoe) 2 1/4 (1000
3ubl6ct to th atrok lgngth incasa ol vsry tllndgr ;iz dus 10 ths lilnil lof a6llocuon of ihe guids shalt (46 c8ful oi collicignt d.l In case ol somo oprational dirscilon, th allowabl load Angle co8lticlsnl lkj: k=t-4s'(-o)l=1 t-601=0 9, I-75'l=0'8' t-90'l=0 7 l0: Dislanosifom rnountlng sudac 10 load's may be dillr6n1ltom th basic dsign val!
When using seal tape, leave one thread exposed when wrapping fitting or pipe. 0.25 f-t-+-t---t-+--j--+--:--t--+-I Set point -~V '" Q. ::; O Mount vertically. c.> 0.2 :; :2 l' Q. Qi '5 0 ~ 5l :r 0. 31<.-t-~-+---="I--;;::'--t-t_1 Q. 0.15 f-t.,---+t--t-+---1--+-t--t-l 8Tightening torque of mounting screw (M3) for gauge is 3-Skgf . cm.
wire length) 82.5 Stations n: Stations Formula L1 = 16n + 11 L2 = 16n + 33 2 43 65 3 59 81 4 75 97 5 91 113 6 107 129 7 123 145 8 139 161 9 155 177 10 171 193 Symbol L1 L2 4-15-9 10 3 Port Solenoid Valve Metal Seal Series VZ400 Model Large flow capacity Low power consumption: 1.8 W (75 mA, 24 VDC) Plug connector One-touch wiring of plug connectors Common pilot exhaust subplate mounted and
Terminal q DC (+) w N.C e DC () r IN (1 to 5 V) e w q Power supply/Output connection cable (Accessory) Power supply/Output connector (8P) Pin no. 7 Green 8 Yellow 6 Red 5 Gray 4 White 3 Black 2 Blue 1 Brown i u y t r e w q Pin no.
. l b t t . l b kwh Volume ins 16387 in3 16.387 ft3 0.0283 ft3 28.329 gal(U.S.)3.785 Volume mm3 6.10 x 10-5 cm3 (cc) 0.0610 m3 35.320 L 0.0353 L 0.2642 Weight g 0.0353 kg 2.2046 1.356 N . m 1.356 J 3.6 l\rJ mm3 cm3 (cc) m3 L L rn3 in3 Energy ft3 N. m f t 3 J gar(u.s.)
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
Digital Flow Switch Series PF2A/PF2W For Air/Water Description Integrated Display Type PF2A710, 750, 711, 721, 751 PF2W704(T), 720(T), 740(T), 11 Remote Type/Display Unit PF2A300, 301, 310, 311 PF2W300, 301, 330, 331 q q w t r SMC FLOW SWITCH w U P e SET e UNIT y RESET OUT2 OUT1 SET u DOWN t y u r RESET button ( + button) If the UP and DOWN buttons are pressed simultaneously, the RESET